JPS53130972A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53130972A
JPS53130972A JP4618077A JP4618077A JPS53130972A JP S53130972 A JPS53130972 A JP S53130972A JP 4618077 A JP4618077 A JP 4618077A JP 4618077 A JP4618077 A JP 4618077A JP S53130972 A JPS53130972 A JP S53130972A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
recrystallizing
reliability
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4618077A
Other languages
Japanese (ja)
Inventor
Kazutaka Kamitake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4618077A priority Critical patent/JPS53130972A/en
Publication of JPS53130972A publication Critical patent/JPS53130972A/en
Pending legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To manufacture a device having excellent electrical performance and reliability, by recrystallizing non-crystal Si film 0.1 to 5μm thick formed by CVD method after heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
JP4618077A 1977-04-20 1977-04-20 Manufacture for semiconductor device Pending JPS53130972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4618077A JPS53130972A (en) 1977-04-20 1977-04-20 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4618077A JPS53130972A (en) 1977-04-20 1977-04-20 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53130972A true JPS53130972A (en) 1978-11-15

Family

ID=12739825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4618077A Pending JPS53130972A (en) 1977-04-20 1977-04-20 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53130972A (en)

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