JPS5374360A - Heat treatment method for compound semiconductor - Google Patents
Heat treatment method for compound semiconductorInfo
- Publication number
- JPS5374360A JPS5374360A JP15112676A JP15112676A JPS5374360A JP S5374360 A JPS5374360 A JP S5374360A JP 15112676 A JP15112676 A JP 15112676A JP 15112676 A JP15112676 A JP 15112676A JP S5374360 A JPS5374360 A JP S5374360A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- heat treatment
- treatment method
- exfoliation
- avoiding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To ensure a heat treatment without any composition change and exfoliation by avoiding the adverse diffusion from the compound semiconductor and at the same time by forming a protective film featuring nearly identical heat expansion coefficient to the compound semiconductor.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15112676A JPS5374360A (en) | 1976-12-15 | 1976-12-15 | Heat treatment method for compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15112676A JPS5374360A (en) | 1976-12-15 | 1976-12-15 | Heat treatment method for compound semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5374360A true JPS5374360A (en) | 1978-07-01 |
JPS5719849B2 JPS5719849B2 (en) | 1982-04-24 |
Family
ID=15511922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15112676A Granted JPS5374360A (en) | 1976-12-15 | 1976-12-15 | Heat treatment method for compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374360A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946678A (en) * | 1972-09-06 | 1974-05-04 |
-
1976
- 1976-12-15 JP JP15112676A patent/JPS5374360A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946678A (en) * | 1972-09-06 | 1974-05-04 |
Also Published As
Publication number | Publication date |
---|---|
JPS5719849B2 (en) | 1982-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5230167A (en) | Method for production of semiconductor device | |
JPS5373072A (en) | Formation of oxidized film | |
JPS5374360A (en) | Heat treatment method for compound semiconductor | |
JPS5441665A (en) | Manufacture for semiconductor device | |
JPS5236980A (en) | Heat sink for semiconductor devices | |
JPS5286610A (en) | Apparatus for preventing dripping of drain | |
JPS52133961A (en) | 2-hydroxy-3-methyl-3-(6-methoxy-2-naphthayl)-acrylonitrile and method of preparing the same | |
JPS5361269A (en) | Heat treatment of compound semiconductor | |
JPS52104349A (en) | Device for cooling and reducing humidity | |
JPS53142870A (en) | Manufacture for semiconductor device | |
JPS5247123A (en) | Thermal reactor of engine for automobile | |
JPS52155471A (en) | Bottle drying method | |
JPS5335375A (en) | Heating method | |
JPS51117887A (en) | Semiconductor ic device | |
JPS5220007A (en) | Locating method | |
JPS5224468A (en) | Power semiconductor device | |
JPS547879A (en) | Manufacture for semiconductor device | |
JPS52135667A (en) | Dicing method of semiconductor wafer | |
JPS5396761A (en) | Production of semiconductor device | |
JPS52118487A (en) | Isotentoxin and method of preparing the same | |
JPS5411672A (en) | Manufacture for semiconductor device | |
JPS5213773A (en) | Semiconductor unit manufacturing process | |
JPS5270772A (en) | Semiconductor rectifier | |
JPS5211782A (en) | Method of manufacturing semiconductor device | |
JPS52154361A (en) | Production of semiconductor device |