JPS5374360A - Heat treatment method for compound semiconductor - Google Patents

Heat treatment method for compound semiconductor

Info

Publication number
JPS5374360A
JPS5374360A JP15112676A JP15112676A JPS5374360A JP S5374360 A JPS5374360 A JP S5374360A JP 15112676 A JP15112676 A JP 15112676A JP 15112676 A JP15112676 A JP 15112676A JP S5374360 A JPS5374360 A JP S5374360A
Authority
JP
Japan
Prior art keywords
compound semiconductor
heat treatment
treatment method
exfoliation
avoiding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15112676A
Other languages
Japanese (ja)
Other versions
JPS5719849B2 (en
Inventor
Takeshi Konuma
Toshio Sugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15112676A priority Critical patent/JPS5374360A/en
Publication of JPS5374360A publication Critical patent/JPS5374360A/en
Publication of JPS5719849B2 publication Critical patent/JPS5719849B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To ensure a heat treatment without any composition change and exfoliation by avoiding the adverse diffusion from the compound semiconductor and at the same time by forming a protective film featuring nearly identical heat expansion coefficient to the compound semiconductor.
COPYRIGHT: (C)1978,JPO&Japio
JP15112676A 1976-12-15 1976-12-15 Heat treatment method for compound semiconductor Granted JPS5374360A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15112676A JPS5374360A (en) 1976-12-15 1976-12-15 Heat treatment method for compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15112676A JPS5374360A (en) 1976-12-15 1976-12-15 Heat treatment method for compound semiconductor

Publications (2)

Publication Number Publication Date
JPS5374360A true JPS5374360A (en) 1978-07-01
JPS5719849B2 JPS5719849B2 (en) 1982-04-24

Family

ID=15511922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15112676A Granted JPS5374360A (en) 1976-12-15 1976-12-15 Heat treatment method for compound semiconductor

Country Status (1)

Country Link
JP (1) JPS5374360A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4946678A (en) * 1972-09-06 1974-05-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4946678A (en) * 1972-09-06 1974-05-04

Also Published As

Publication number Publication date
JPS5719849B2 (en) 1982-04-24

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