JPS5421171A - Manufacture for compound semiconductor device - Google Patents

Manufacture for compound semiconductor device

Info

Publication number
JPS5421171A
JPS5421171A JP8638377A JP8638377A JPS5421171A JP S5421171 A JPS5421171 A JP S5421171A JP 8638377 A JP8638377 A JP 8638377A JP 8638377 A JP8638377 A JP 8638377A JP S5421171 A JPS5421171 A JP S5421171A
Authority
JP
Japan
Prior art keywords
compound semiconductor
manufacture
semiconductor device
vapor
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8638377A
Other languages
Japanese (ja)
Other versions
JPS5436458B2 (en
Inventor
Hiromitsu Takagi
Kota Kano
Iwao Teramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8638377A priority Critical patent/JPS5421171A/en
Priority to DE2830035A priority patent/DE2830035C2/en
Priority to US05/923,689 priority patent/US4194927A/en
Priority to FR7820897A priority patent/FR2397718A1/en
Priority to GB7829825A priority patent/GB2001048B/en
Priority to CA307,437A priority patent/CA1104267A/en
Publication of JPS5421171A publication Critical patent/JPS5421171A/en
Publication of JPS5436458B2 publication Critical patent/JPS5436458B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Feedback Control In General (AREA)

Abstract

PURPOSE: To form excellent oxide film on a compound semiconductor including As, by performing high temperature treatment under gas including As2O3 vapor.
COPYRIGHT: (C)1979,JPO&Japio
JP8638377A 1977-07-15 1977-07-18 Manufacture for compound semiconductor device Granted JPS5421171A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP8638377A JPS5421171A (en) 1977-07-18 1977-07-18 Manufacture for compound semiconductor device
DE2830035A DE2830035C2 (en) 1977-07-15 1978-07-07 Method of preventing arsenic depletion in oxide films containing arsenic on a semiconductor device
US05/923,689 US4194927A (en) 1977-07-15 1978-07-11 Selective thermal oxidation of As-containing compound semiconductor regions
FR7820897A FR2397718A1 (en) 1977-07-15 1978-07-12 PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES
GB7829825A GB2001048B (en) 1977-07-15 1978-07-14 Method of making semiconductor devices
CA307,437A CA1104267A (en) 1977-07-15 1978-07-14 Method of making semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8638377A JPS5421171A (en) 1977-07-18 1977-07-18 Manufacture for compound semiconductor device

Publications (2)

Publication Number Publication Date
JPS5421171A true JPS5421171A (en) 1979-02-17
JPS5436458B2 JPS5436458B2 (en) 1979-11-09

Family

ID=13885345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8638377A Granted JPS5421171A (en) 1977-07-15 1977-07-18 Manufacture for compound semiconductor device

Country Status (1)

Country Link
JP (1) JPS5421171A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826014A (en) * 1981-07-31 1983-02-16 Agency Of Ind Science & Technol Formation of silicon nitride film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826014A (en) * 1981-07-31 1983-02-16 Agency Of Ind Science & Technol Formation of silicon nitride film
JPS6310893B2 (en) * 1981-07-31 1988-03-10 Kogyo Gijutsuin

Also Published As

Publication number Publication date
JPS5436458B2 (en) 1979-11-09

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