JPS6156111B2 - - Google Patents
Info
- Publication number
- JPS6156111B2 JPS6156111B2 JP56164775A JP16477581A JPS6156111B2 JP S6156111 B2 JPS6156111 B2 JP S6156111B2 JP 56164775 A JP56164775 A JP 56164775A JP 16477581 A JP16477581 A JP 16477581A JP S6156111 B2 JPS6156111 B2 JP S6156111B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- heating resistor
- thermal head
- tantalum nitride
- protective layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 42
- 239000010409 thin film Substances 0.000 claims description 42
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 24
- 239000011241 protective layer Substances 0.000 claims description 22
- 230000006866 deterioration Effects 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 13
- 229910004156 TaNx Inorganic materials 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 27
- 239000010410 layer Substances 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- PWKWDCOTNGQLID-UHFFFAOYSA-N [N].[Ar] Chemical compound [N].[Ar] PWKWDCOTNGQLID-UHFFFAOYSA-N 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 238000005546 reactive sputtering Methods 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- -1 tantalum nitrides Chemical class 0.000 description 1
- 238000007651 thermal printing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
Landscapes
- Electronic Switches (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56164775A JPS5865679A (ja) | 1981-10-14 | 1981-10-14 | サ−マルヘツド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56164775A JPS5865679A (ja) | 1981-10-14 | 1981-10-14 | サ−マルヘツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5865679A JPS5865679A (ja) | 1983-04-19 |
| JPS6156111B2 true JPS6156111B2 (enrdf_load_stackoverflow) | 1986-12-01 |
Family
ID=15799697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56164775A Granted JPS5865679A (ja) | 1981-10-14 | 1981-10-14 | サ−マルヘツド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5865679A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998001369A1 (fr) | 1996-07-08 | 1998-01-15 | Sony Corporation | Boitier de rangement pour cassette |
-
1981
- 1981-10-14 JP JP56164775A patent/JPS5865679A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5865679A (ja) | 1983-04-19 |
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