JPS6154268B2 - - Google Patents

Info

Publication number
JPS6154268B2
JPS6154268B2 JP54166014A JP16601479A JPS6154268B2 JP S6154268 B2 JPS6154268 B2 JP S6154268B2 JP 54166014 A JP54166014 A JP 54166014A JP 16601479 A JP16601479 A JP 16601479A JP S6154268 B2 JPS6154268 B2 JP S6154268B2
Authority
JP
Japan
Prior art keywords
etching
diaphragm
semiconductor substrate
thickness
diffusion regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54166014A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5688372A (en
Inventor
Yutaka Mihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16601479A priority Critical patent/JPS5688372A/ja
Publication of JPS5688372A publication Critical patent/JPS5688372A/ja
Publication of JPS6154268B2 publication Critical patent/JPS6154268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/642—

Landscapes

  • Pressure Sensors (AREA)
JP16601479A 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm Granted JPS5688372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16601479A JPS5688372A (en) 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16601479A JPS5688372A (en) 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm

Publications (2)

Publication Number Publication Date
JPS5688372A JPS5688372A (en) 1981-07-17
JPS6154268B2 true JPS6154268B2 (en:Method) 1986-11-21

Family

ID=15823297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16601479A Granted JPS5688372A (en) 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm

Country Status (1)

Country Link
JP (1) JPS5688372A (en:Method)

Also Published As

Publication number Publication date
JPS5688372A (en) 1981-07-17

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