JPS6152566B2 - - Google Patents

Info

Publication number
JPS6152566B2
JPS6152566B2 JP54170022A JP17002279A JPS6152566B2 JP S6152566 B2 JPS6152566 B2 JP S6152566B2 JP 54170022 A JP54170022 A JP 54170022A JP 17002279 A JP17002279 A JP 17002279A JP S6152566 B2 JPS6152566 B2 JP S6152566B2
Authority
JP
Japan
Prior art keywords
film
photoresist film
substrate
insulating film
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54170022A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5693316A (en
Inventor
Kenji Sugishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17002279A priority Critical patent/JPS5693316A/ja
Publication of JPS5693316A publication Critical patent/JPS5693316A/ja
Publication of JPS6152566B2 publication Critical patent/JPS6152566B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
    • H01L21/31138—Etching organic layers by chemical means by dry-etching

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
JP17002279A 1979-12-26 1979-12-26 Manufacture of semiconductor device Granted JPS5693316A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17002279A JPS5693316A (en) 1979-12-26 1979-12-26 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17002279A JPS5693316A (en) 1979-12-26 1979-12-26 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5693316A JPS5693316A (en) 1981-07-28
JPS6152566B2 true JPS6152566B2 (enrdf_load_stackoverflow) 1986-11-13

Family

ID=15897141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17002279A Granted JPS5693316A (en) 1979-12-26 1979-12-26 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5693316A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2279986T3 (es) * 2004-01-13 2007-09-01 Frape Behr S.A. Dispositivo de sujecion para una valvula de expansion de una instalacion de aire acondicionado para un vehiculo automovil.

Also Published As

Publication number Publication date
JPS5693316A (en) 1981-07-28

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