JPS6147665B2 - - Google Patents
Info
- Publication number
- JPS6147665B2 JPS6147665B2 JP57143597A JP14359782A JPS6147665B2 JP S6147665 B2 JPS6147665 B2 JP S6147665B2 JP 57143597 A JP57143597 A JP 57143597A JP 14359782 A JP14359782 A JP 14359782A JP S6147665 B2 JPS6147665 B2 JP S6147665B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- support surface
- precision
- top surface
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000853 adhesive Substances 0.000 claims description 26
- 230000001070 adhesive effect Effects 0.000 claims description 26
- 239000002994 raw material Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Jigs For Machine Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143597A JPS5937044A (ja) | 1982-08-17 | 1982-08-17 | 精密加工法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143597A JPS5937044A (ja) | 1982-08-17 | 1982-08-17 | 精密加工法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59205193A Division JPS6099559A (ja) | 1984-09-29 | 1984-09-29 | 精密加工法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5937044A JPS5937044A (ja) | 1984-02-29 |
| JPS6147665B2 true JPS6147665B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-20 |
Family
ID=15342418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57143597A Granted JPS5937044A (ja) | 1982-08-17 | 1982-08-17 | 精密加工法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5937044A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6099559A (ja) * | 1984-09-29 | 1985-06-03 | Yoshiaki Nagaura | 精密加工法 |
-
1982
- 1982-08-17 JP JP57143597A patent/JPS5937044A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5937044A (ja) | 1984-02-29 |