JPS6144425A - 半導体基板の熱処理用ボート - Google Patents

半導体基板の熱処理用ボート

Info

Publication number
JPS6144425A
JPS6144425A JP60159026A JP15902685A JPS6144425A JP S6144425 A JPS6144425 A JP S6144425A JP 60159026 A JP60159026 A JP 60159026A JP 15902685 A JP15902685 A JP 15902685A JP S6144425 A JPS6144425 A JP S6144425A
Authority
JP
Japan
Prior art keywords
boat
heat treatment
furnace
boats
semiconductor substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60159026A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224938B2 (cg-RX-API-DMAC7.html
Inventor
Tatsunori Nakajima
中島　龍典
Kosei Kajiwara
梶原　孝生
Kuni Ogawa
小川　久仁
Kosuke Yasuno
安野　耕介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60159026A priority Critical patent/JPS6144425A/ja
Publication of JPS6144425A publication Critical patent/JPS6144425A/ja
Publication of JPS6224938B2 publication Critical patent/JPS6224938B2/ja
Granted legal-status Critical Current

Links

JP60159026A 1985-07-18 1985-07-18 半導体基板の熱処理用ボート Granted JPS6144425A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60159026A JPS6144425A (ja) 1985-07-18 1985-07-18 半導体基板の熱処理用ボート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60159026A JPS6144425A (ja) 1985-07-18 1985-07-18 半導体基板の熱処理用ボート

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP14345577A Division JPS5475985A (en) 1977-11-29 1977-11-29 Heat treatment method of semiconductor substrate and its unit

Publications (2)

Publication Number Publication Date
JPS6144425A true JPS6144425A (ja) 1986-03-04
JPS6224938B2 JPS6224938B2 (cg-RX-API-DMAC7.html) 1987-05-30

Family

ID=15684630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60159026A Granted JPS6144425A (ja) 1985-07-18 1985-07-18 半導体基板の熱処理用ボート

Country Status (1)

Country Link
JP (1) JPS6144425A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2331288A (en) * 1994-12-20 1999-05-19 Dainippon Printing Co Ltd Sawtooth cutter
WO2011101798A1 (en) * 2010-02-18 2011-08-25 Dynamic Micro Systems Stackable substrate carriers

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2331288A (en) * 1994-12-20 1999-05-19 Dainippon Printing Co Ltd Sawtooth cutter
GB2331288B (en) * 1994-12-20 1999-06-30 Dainippon Printing Co Ltd Sawtooth cutter
WO2011101798A1 (en) * 2010-02-18 2011-08-25 Dynamic Micro Systems Stackable substrate carriers
US10770323B2 (en) 2010-02-18 2020-09-08 Brooks Automation Gmbh Stackable substrate carriers

Also Published As

Publication number Publication date
JPS6224938B2 (cg-RX-API-DMAC7.html) 1987-05-30

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