JPS6141446B2 - - Google Patents

Info

Publication number
JPS6141446B2
JPS6141446B2 JP6429378A JP6429378A JPS6141446B2 JP S6141446 B2 JPS6141446 B2 JP S6141446B2 JP 6429378 A JP6429378 A JP 6429378A JP 6429378 A JP6429378 A JP 6429378A JP S6141446 B2 JPS6141446 B2 JP S6141446B2
Authority
JP
Japan
Prior art keywords
electrode
etching
frequency
piezoelectric substrate
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6429378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54156455A (en
Inventor
Yasuo Ehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6429378A priority Critical patent/JPS54156455A/ja
Publication of JPS54156455A publication Critical patent/JPS54156455A/ja
Publication of JPS6141446B2 publication Critical patent/JPS6141446B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP6429378A 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method Granted JPS54156455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6429378A JPS54156455A (en) 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6429378A JPS54156455A (en) 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method

Publications (2)

Publication Number Publication Date
JPS54156455A JPS54156455A (en) 1979-12-10
JPS6141446B2 true JPS6141446B2 (ru) 1986-09-16

Family

ID=13254036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6429378A Granted JPS54156455A (en) 1978-05-31 1978-05-31 Surface acoustic wave element and its trimming method

Country Status (1)

Country Link
JP (1) JPS54156455A (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002271158A (ja) * 2001-03-07 2002-09-20 Murata Mfg Co Ltd 弾性表面波素子の周波数調整方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120410A (ja) * 1984-07-07 1986-01-29 Nec Kansai Ltd 弾性表面波装置の製造方法
JP2602215B2 (ja) * 1986-12-15 1997-04-23 日本電波工業 株式会社 圧電振動子の周波数調整方法
JP2533633Y2 (ja) * 1987-03-06 1997-04-23 日本電波工業 株式会社 Ａｔカット水晶振動子
JP2002043880A (ja) * 2000-07-26 2002-02-08 Murata Mfg Co Ltd 弾性表面波素子の周波数調整方法
JP2002290184A (ja) * 2001-03-28 2002-10-04 Seiko Epson Corp 弾性表面波装置及びその製造方法
JP4591800B2 (ja) 2008-02-20 2010-12-01 エプソントヨコム株式会社 弾性表面波デバイスおよび弾性表面波発振器
JP4645923B2 (ja) * 2009-02-27 2011-03-09 セイコーエプソン株式会社 弾性表面波共振子、および弾性表面波発振器
EP2403141B1 (en) 2009-02-27 2018-10-24 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
JP5678486B2 (ja) 2010-06-17 2015-03-04 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器および電子機器
JP2012049818A (ja) 2010-08-26 2012-03-08 Seiko Epson Corp 弾性表面波共振子、弾性表面波発振器、電子機器
JP5934464B2 (ja) 2010-08-26 2016-06-15 セイコーエプソン株式会社 弾性表面波共振子、および弾性表面波発振器、ならびに電子機器
JP2012049817A (ja) 2010-08-26 2012-03-08 Seiko Epson Corp 弾性表面波デバイス、および弾性表面波発振器、ならびに電子機器
JP2012060420A (ja) 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP5652606B2 (ja) 2010-12-03 2015-01-14 セイコーエプソン株式会社 弾性表面波共振子、弾性表面波発振器、及び電子機器
JP5648908B2 (ja) 2010-12-07 2015-01-07 セイコーエプソン株式会社 振動デバイス、並びに発振器、および電子機器
JP5874738B2 (ja) * 2011-12-01 2016-03-02 株式会社村田製作所 弾性表面波装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118338A (en) * 1977-03-25 1978-10-16 Nippon Telegr & Teleph Corp <Ntt> Active frequency adjustment method for elastic surface wave circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002271158A (ja) * 2001-03-07 2002-09-20 Murata Mfg Co Ltd 弾性表面波素子の周波数調整方法

Also Published As

Publication number Publication date
JPS54156455A (en) 1979-12-10

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