JPS6140771Y2 - - Google Patents
Info
- Publication number
- JPS6140771Y2 JPS6140771Y2 JP6412682U JP6412682U JPS6140771Y2 JP S6140771 Y2 JPS6140771 Y2 JP S6140771Y2 JP 6412682 U JP6412682 U JP 6412682U JP 6412682 U JP6412682 U JP 6412682U JP S6140771 Y2 JPS6140771 Y2 JP S6140771Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge field
- plasma discharge
- plasma
- electrode
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 239000002994 raw material Substances 0.000 claims description 9
- 239000010408 film Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 230000006837 decompression Effects 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6412682U JPS58168560U (ja) | 1982-04-30 | 1982-04-30 | プラズマｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6412682U JPS58168560U (ja) | 1982-04-30 | 1982-04-30 | プラズマｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58168560U JPS58168560U (ja) | 1983-11-10 |
| JPS6140771Y2 true JPS6140771Y2 (OSRAM) | 1986-11-20 |
Family
ID=30074174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6412682U Granted JPS58168560U (ja) | 1982-04-30 | 1982-04-30 | プラズマｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58168560U (OSRAM) |
-
1982
- 1982-04-30 JP JP6412682U patent/JPS58168560U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58168560U (ja) | 1983-11-10 |
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