JPS6327782Y2 - - Google Patents
Info
- Publication number
- JPS6327782Y2 JPS6327782Y2 JP18677682U JP18677682U JPS6327782Y2 JP S6327782 Y2 JPS6327782 Y2 JP S6327782Y2 JP 18677682 U JP18677682 U JP 18677682U JP 18677682 U JP18677682 U JP 18677682U JP S6327782 Y2 JPS6327782 Y2 JP S6327782Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- saturator
- gas
- temperature
- saturators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012495 reaction gas Substances 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 13
- 239000000376 reactant Substances 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 description 5
- 239000012494 Quartz wool Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000006004 Quartz sand Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- GICWIDZXWJGTCI-UHFFFAOYSA-I molybdenum pentachloride Chemical compound Cl[Mo](Cl)(Cl)(Cl)Cl GICWIDZXWJGTCI-UHFFFAOYSA-I 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677682U JPS5993641U (ja) | 1982-12-09 | 1982-12-09 | 反応ガス供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677682U JPS5993641U (ja) | 1982-12-09 | 1982-12-09 | 反応ガス供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5993641U JPS5993641U (ja) | 1984-06-25 |
| JPS6327782Y2 true JPS6327782Y2 (OSRAM) | 1988-07-27 |
Family
ID=30403350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18677682U Granted JPS5993641U (ja) | 1982-12-09 | 1982-12-09 | 反応ガス供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5993641U (OSRAM) |
-
1982
- 1982-12-09 JP JP18677682U patent/JPS5993641U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5993641U (ja) | 1984-06-25 |
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