JPH0521841B2 - - Google Patents

Info

Publication number
JPH0521841B2
JPH0521841B2 JP58134480A JP13448083A JPH0521841B2 JP H0521841 B2 JPH0521841 B2 JP H0521841B2 JP 58134480 A JP58134480 A JP 58134480A JP 13448083 A JP13448083 A JP 13448083A JP H0521841 B2 JPH0521841 B2 JP H0521841B2
Authority
JP
Japan
Prior art keywords
ultrapure water
carbon dioxide
dioxide gas
resistivity
permeable membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58134480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6027603A (ja
Inventor
Tooru Yunoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP58134480A priority Critical patent/JPS6027603A/ja
Publication of JPS6027603A publication Critical patent/JPS6027603A/ja
Publication of JPH0521841B2 publication Critical patent/JPH0521841B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58134480A 1983-07-25 1983-07-25 超純水の比抵抗調整法 Granted JPS6027603A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58134480A JPS6027603A (ja) 1983-07-25 1983-07-25 超純水の比抵抗調整法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58134480A JPS6027603A (ja) 1983-07-25 1983-07-25 超純水の比抵抗調整法

Publications (2)

Publication Number Publication Date
JPS6027603A JPS6027603A (ja) 1985-02-12
JPH0521841B2 true JPH0521841B2 (OSRAM) 1993-03-25

Family

ID=15129309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58134480A Granted JPS6027603A (ja) 1983-07-25 1983-07-25 超純水の比抵抗調整法

Country Status (1)

Country Link
JP (1) JPS6027603A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002292362A (ja) * 2001-03-30 2002-10-08 Kurita Water Ind Ltd 比抵抗調整水製造装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265809A (ja) * 1985-09-14 1987-03-25 Koyo Kikai Sangyo Kk 二重ベルトコンベア
JPS62198127A (ja) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd 半導体ウエハの洗浄方法
JP3814357B2 (ja) * 1997-01-29 2006-08-30 日本碍子株式会社 超純水の比抵抗調整方法および比抵抗調整装置
US6884359B2 (en) 2000-09-27 2005-04-26 Dainippon Ink And Chemicals, Inc. Apparatus and method for controlling resistivity of ultra pure water
JP6460283B2 (ja) 2016-12-20 2019-01-30 Dic株式会社 比抵抗値調整装置及び比抵抗値調整方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631432A (en) * 1979-08-21 1981-03-30 Ebara Infilco Co Ltd Process for dissolving gas into liquid
JPS5933461Y2 (ja) * 1980-11-17 1984-09-18 三菱レイヨン株式会社 飲料水への炭酸ガス溶解装置
JPS587831A (ja) * 1981-07-07 1983-01-17 Sumitomo Shoji Kk 高圧水によるウェハの洗浄方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002292362A (ja) * 2001-03-30 2002-10-08 Kurita Water Ind Ltd 比抵抗調整水製造装置

Also Published As

Publication number Publication date
JPS6027603A (ja) 1985-02-12

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