JPS6139943U - ウエハ検査装置 - Google Patents

ウエハ検査装置

Info

Publication number
JPS6139943U
JPS6139943U JP12438984U JP12438984U JPS6139943U JP S6139943 U JPS6139943 U JP S6139943U JP 12438984 U JP12438984 U JP 12438984U JP 12438984 U JP12438984 U JP 12438984U JP S6139943 U JPS6139943 U JP S6139943U
Authority
JP
Japan
Prior art keywords
wafer inspection
inspection
inspection equipment
wafer
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12438984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331080Y2 (OSRAM
Inventor
哲也 渡邊
正義 鈴木
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP12438984U priority Critical patent/JPS6139943U/ja
Publication of JPS6139943U publication Critical patent/JPS6139943U/ja
Application granted granted Critical
Publication of JPH0331080Y2 publication Critical patent/JPH0331080Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Discharge Of Articles From Conveyors (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sorting Of Articles (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12438984U 1984-08-16 1984-08-16 ウエハ検査装置 Granted JPS6139943U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12438984U JPS6139943U (ja) 1984-08-16 1984-08-16 ウエハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12438984U JPS6139943U (ja) 1984-08-16 1984-08-16 ウエハ検査装置

Publications (2)

Publication Number Publication Date
JPS6139943U true JPS6139943U (ja) 1986-03-13
JPH0331080Y2 JPH0331080Y2 (OSRAM) 1991-07-01

Family

ID=30683115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12438984U Granted JPS6139943U (ja) 1984-08-16 1984-08-16 ウエハ検査装置

Country Status (1)

Country Link
JP (1) JPS6139943U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752147A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Measuring and sorting device for electric characteristics of semiconductor element
JPS5768044A (en) * 1980-10-15 1982-04-26 Tokyo Seimitsu Co Ltd Supplying device for semiconductor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752147A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Measuring and sorting device for electric characteristics of semiconductor element
JPS5768044A (en) * 1980-10-15 1982-04-26 Tokyo Seimitsu Co Ltd Supplying device for semiconductor element

Also Published As

Publication number Publication date
JPH0331080Y2 (OSRAM) 1991-07-01

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