JPS5752147A - Measuring and sorting device for electric characteristics of semiconductor element - Google Patents

Measuring and sorting device for electric characteristics of semiconductor element

Info

Publication number
JPS5752147A
JPS5752147A JP55128212A JP12821280A JPS5752147A JP S5752147 A JPS5752147 A JP S5752147A JP 55128212 A JP55128212 A JP 55128212A JP 12821280 A JP12821280 A JP 12821280A JP S5752147 A JPS5752147 A JP S5752147A
Authority
JP
Japan
Prior art keywords
measuring
fed
mechanisms
measured
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55128212A
Other languages
Japanese (ja)
Inventor
Katsuji Kawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP55128212A priority Critical patent/JPS5752147A/en
Publication of JPS5752147A publication Critical patent/JPS5752147A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To enable to respond to the measurements of multiple functions and to increase the efficiency of the measurements in a device for measuring the electric characteristics of a semiconductor element having guide mechanism, feeding mechanism, measuring mechanism and sorting mechanism by providing a plurality of measuring mechanisms. CONSTITUTION:Two sets of measuring mechanisms B1, B2 are provided, engaging rods 15, 16 and a partition rod 17 are provided on an upper guide rail 4 corresponding to a measuring mechanism B2, and which has a contactor 19 having a contact piece 18 and an arm 20. When two sets of measuring mechanisms treat with measuring instrument having the same type electric characteristic measuring program, semiconductor elements are sequentially fed one by one by the engaging rod, and the partition rod moved upwardly and downwardly, and are measured by the measuring mechanisms. The measured elements are fed by a guide mechanism A, is then fed through a sorting mechanism C guided to the position corresponding to the measured result, and is then exhausted. In this manner, the measurement can be increased in the efficiency.
JP55128212A 1980-09-16 1980-09-16 Measuring and sorting device for electric characteristics of semiconductor element Pending JPS5752147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55128212A JPS5752147A (en) 1980-09-16 1980-09-16 Measuring and sorting device for electric characteristics of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55128212A JPS5752147A (en) 1980-09-16 1980-09-16 Measuring and sorting device for electric characteristics of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5752147A true JPS5752147A (en) 1982-03-27

Family

ID=14979253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55128212A Pending JPS5752147A (en) 1980-09-16 1980-09-16 Measuring and sorting device for electric characteristics of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5752147A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593543U (en) * 1982-06-30 1984-01-11 富士通株式会社 Semiconductor delivery equipment
JPS6139943U (en) * 1984-08-16 1986-03-13 日立電子エンジニアリング株式会社 Wafer inspection equipment
JPH0933609A (en) * 1995-07-24 1997-02-07 Seiwa Sangyo Kk Automatic sorting apparatus for chip-shaped electronic component

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593543U (en) * 1982-06-30 1984-01-11 富士通株式会社 Semiconductor delivery equipment
JPH0113438Y2 (en) * 1982-06-30 1989-04-19
JPS6139943U (en) * 1984-08-16 1986-03-13 日立電子エンジニアリング株式会社 Wafer inspection equipment
JPH0331080Y2 (en) * 1984-08-16 1991-07-01
JPH0933609A (en) * 1995-07-24 1997-02-07 Seiwa Sangyo Kk Automatic sorting apparatus for chip-shaped electronic component

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