JPS6139555A - 放熱板付樹脂封止形半導体装置 - Google Patents

放熱板付樹脂封止形半導体装置

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Publication number
JPS6139555A
JPS6139555A JP15886084A JP15886084A JPS6139555A JP S6139555 A JPS6139555 A JP S6139555A JP 15886084 A JP15886084 A JP 15886084A JP 15886084 A JP15886084 A JP 15886084A JP S6139555 A JPS6139555 A JP S6139555A
Authority
JP
Japan
Prior art keywords
lead frame
semiconductor
heat sink
resin
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15886084A
Other languages
English (en)
Inventor
Toshihiro Kato
加藤 俊博
Shinjiro Kojima
小島 伸次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
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Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP15886084A priority Critical patent/JPS6139555A/ja
Publication of JPS6139555A publication Critical patent/JPS6139555A/ja
Pending legal-status Critical Current

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    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/484Connecting portions
    • H01L2224/4847Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
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    • H01L2924/181Encapsulation

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 [発明の技術分野] 本発明は、電力用半導体素子などを搭載しこれと絶縁さ
れた放熱板を有する放熱板付樹脂封止形半導体装置に関
するもので、例えば電動機速度制御用パワートランジス
タアレイなどに適用される。
[発明の技術分野] 半導体素子と放熱板とが絶縁されている形式の放熱板付
樹脂封止形半導体装置の最近の従来例(特願昭59−2
5198号)について以下図面にもとずき説明する。 
第4図は上記半導体装置の外観平面図(本発明に係るも
のも外観は同じである)であり、1は封止樹脂、2は締
付部だけが外観に現れている放熱板、3はリード部だ【
プが外観に現れているリードフレームである。 第5図
は放熱板2の平面図である。 放熱板2はアルミニウム
系金属条から打法加工して得られたものである。
放熱板2と樹脂との密着を向上させるために樹脂に埋め
込まれる辺(第4図参照)には板厚が薄くなるように潰
し25及び26が、また樹脂との界面にあたる上面に溝
27が形成されている。 放熱板がアルミニウムである
とアルミニウムの熱膨張係数(23,6x 10(/ 
’C)は樹脂のそれ(24×10−’/’C)に近いの
で封止後の放熱板のそりはほとんど問題にならないので
上記の漬し25及び26並びに満27を設けな(でもよ
いが、銅系金属の場合には樹脂との熱uIII2係数差
が大きいのでこの潰し及び溝等の工夫が大切である。 
第6図はリードフレーム3の平面図でありリードフレー
ム3は複数の半導体素子ペレットを搭載するベッド部3
1とリード部32とフレーム33とからなっている。 
リードフレーム3は銅系金属条を抜打加工して(qられ
肉厚は均一である。
第7図はこの従来例の放熱板付樹脂封止形半導体装置に
ついて、第4図IV −IV線に沿う拡大断面図を示し
たものである。 同図にJ3いて6は、半導体素子ペレ
ット5(以下ペレット5と略称する)とリードフレーム
ベッド部31とを固着する固着層、7はペレット5とリ
ードフレームリード部32とを接続する金属細線、そし
て封止樹脂1は放熱板2の一面が露出するようにトラン
スファ成形されている。
[背景技術の問題点] 上記の従来例勇半導体装置では放熱性を悪化させる加工
組立要因をなくすることができて安定な放熱特性が得ら
れるが、熱抵抗の点で十分満足できるものでなくさらに
放熱性の改善が望まれる。
特に過渡熱抵抗を低減し、スイッチング動作時の温度上
昇を抑えることにより長寿命化をはかることが重要な問
題となっている。
[発明の目的] 本発明の目的は、従来例の半導体装置に比し放熱性を向
上し、特に過渡熱抵抗を低減し、スイッチング動作に適
合した新規な構造の絶縁放熱板付樹脂封止形半導体装置
を提供することにある。
[発明の概要] 半導体素子ペレットと放熱板が絶縁されている放熱板付
樹脂封止形半導体装置において過渡熱抵抗を低減する有
効な手段の一つは、半導体搭載部(リードフレームのベ
ッド部を含む)の熱容量を増加することである。 それ
放生導体搭載部は大きければ大きいほど過渡熱特性は向
上する。 しかしながら上記半導体装置の形状寸法は、
電気的熱的特性のみならず経済性生産性等を総合して決
定されたものである。 したがってこれらの条件を考慮
した結果、本発明はリードフレームの半導体搭載部の単
位面積当りの熱容量を該リードフレームのその他の部分
の単位面積当りの熱容量より大きくジるという考えにも
こずいておこなわれた。
すなわち本発明は、特許請求の範囲に記載したように、
半導体素子と放熱板が絶縁されている放熱板付樹脂封止
形半導体装置において、半導体搭載部の肉厚をリードフ
レームの平均肉厚より厚くしたことを特徴とする放熱板
付樹脂封止形半導体装置である。
この発明の望ましい実施態様は、リードフレームのベッ
ド部そのものを半導体搭載部とするとともに、ベッド部
の肉厚をリードフレームのその伯の部分の肉厚より厚く
し、ベッド部を含むリードフレームは同一部材よりつく
られる上記半導体装置である。 また伯の望ましい実施
態様は半導体搭載部をリードフレームのベッド部と熱拡
散板との重合層とし、半導体搭載部の肉厚をリードフレ
ームのその他の部分の肉厚よりも厚くした上記半導体装
置である。 以上のように半導体搭載部の肉厚を増加す
ることにより従来に比し半導体搭載部の熱容量を増加す
ることができ過渡熱抵抗を減少することが可能となった
なお半導体搭載部の下面は該下面と放熱板上面との間隙
の耐電圧特性により、また半導体搭載部の上面は封止樹
脂の高さおよび半導体素子ペレットとリードフレームと
を接続する金属411IFAがペレットに接触しやすく
なること等によりその位置が決められる。 半導体搭載
部の肉厚は上記の条件により一定値以内に制限される。
[発明の実施例コ 以下本発明の一実施例につき図面にもとずき説明する。
 本発明による放熱板付樹脂封止形半導体装置の外観平
面図および放熱板は、第4図および第5図に示す従来の
半導体装置の外観平面図および放熱板とそれぞれ等しく
、また本発明に使用されるリードフレームは半導体搭載
部(ベッド部31)を除き第6図に示す従来のリードフ
レームとほぼ同一である。 なお第1図ないし第6図に
おいて同符号で示し・たちのはそれぞれ同一部分をあら
れす。 第1図は、本発明の放熱板付樹脂封止形半導体
装置について第4図のrV−rV線に沿う拡大断面図で
ある。 この実施例においては半導体搭載部4はリード
フレームのベッド部31と同一であり肉厚は約(1,0
〜3.0) mmとなっている。
ベッド部31及び隣接するベッド部31にはさまれるイ
ンナーリード部のごく一部とを除くその伯のリード部の
肉厚は約(0,4〜0.8) nunであり、したがっ
て半導体搭載部4の肉厚はリードフレームの平均肉厚よ
り厚くなっている。 リードフレームは銅系金属条を打
法加工してtcJられるが、あらかじめベッド部に該当
する部分の該金属条の肉厚とその他の部分の肉厚とを前
記のとおりとした銅系金属の異形材が使用される。 半
導体素子ペレット5は半田等の接合部材6を介して半導
体搭載部4上に取り付けられている。 また金JilI
IIl線7(アルミニウム線又は金線等)で上記ペレッ
ト5上の電極(図示せず)とリードフレーム3のインナ
ーリード部とが接続されている。 その後fJ5[熱板
2をトランスファモールド金型のキャビティ下部に載置
したのち、上記リードフレーム3をモールド型上に設置
し、トランスファモールド樹脂成形される。 この時、
半導体搭載部4と放熱板2の間にも高熱伝導性エポキシ
封止樹脂1が充填される。
上記のようにこの実施例では半導体搭載部4【まリード
フレームベッド部31と同じであり、ベッド部31とそ
の他のリード部は同一部材(銅系金属条)よりつくられ
、肉厚はベッド部31が厚くなっているので熱拡散板と
しての効果を出すことができ、本発明の望ましい実施態
様(特許請求の範囲第2項記載)である。 第2図は本
発明の他の実施例である。 第1図とは半導体搭載部4
0表裏の使い方が異なっていて、半導体素子ペレット5
と金属細線7の組立工程に得失がある。 しかしながら
放熱効果は第1図の装置と第2図の装置とほぼ同等であ
る。
第3図に望ましい実施態様の他の一つ(特許請求の範囲
第3項記載)を示す。 図示の如く半導体搭載部4はリ
ードフレームのベッド部31に半田等の接合部材62を
介して熱拡散板8を固着した手合層である。 半導体素
子ペレット5は半田等の接合部材61により熱拡散板8
上にマウントされる。 リードフレームのベッド部31
とベッド部以外のリード部分の肉厚は同一である。 本
実施例では従来のものに比し熱拡散板を附加しただけ熱
容母が増加しており、第1図または第2図に示した装置
と等価な放熱効果を1r7ることかできた。 熱拡散板
8の材質としてはCu 、W、MOlCu −Cおよび
それらの合金を用いることができる。 (亀合部材62
は一般に半田を用いるが溶接、圧接等により接合すれば
接合部材62を省くことも可能である。 又熱拡散板8
はリードフレームのベッド部下面に接合しても同様な効
果がjnられる。
[発明の効果] 第1図に示す本発明による放熱返付樹脂封止形半導体装
置の過渡熱抵抗を測定したところ従来のものの約1/2
にすることができた。
過渡熱抵抗(Rth +Lrans) )は一般に次式
で表される。
一1/τ0 Rth+uins+ = Rth+ (1−e    
 )[℃/W] Rth +は定常状態における半導体素子内の発熱部よ
り放熱板2までの内部熱抵抗であり、τ。はその熱時定
数である。 封止樹脂の熱伝導率λ=(iox 10−
’ cal / cm −sec ・’C1半導体搭載
部と放熱板との間の樹脂絶縁層の厚さ−0,(3mmで
あって、t =100msec  (上式参照)の時の
Rth (ua ns)を測定した結果、Rth t。
。、)す1℃/W(同一条件で従来品は約2℃/W)で
あった。
以上のごとく過渡熱抵抗をおさえたことによりスイッヂ
ング特性の寿命を延長することができた。
【図面の簡単な説明】
第1図ないし第3図は本発明による放熱板付樹脂封止形
半導体装置の3つの実施例を示したもので、それぞれ第
4図のIV−■線に沿う拡大断面図、第4図ないし第6
図は本発明の実施例と従来例に関連する放熱板付樹脂封
止形半導体装置の外観平面図、放熱板平面図およびリー
ドフレーム平面図、第7図は従来例の放熱板付樹脂封止
形半導体装置のIV−IV線(第4図参照)に沿う拡大
断面図である。 1・・・封止樹脂、 2・・・放熱板、 3・・・リー
ドフレーム、 31・・・リードフレームベッド部、 
4・・・半導体搭載部、 5・・・半導体素子ペレット
、7・・・金属細線、 8・・・熱拡散板。 第1図 と 第2図

Claims (1)

  1. 【特許請求の範囲】 1 単数又は複数の半導体素子ペレットと、該ペレット
    を搭載するための半導体搭載部と、該半導体搭載部を具
    備する銅系金属製リードフレームと、該ペレットと該リ
    ードフレームとを接続するための金属細線と、上面が該
    リードフレームの下面と所定の間隙をへだてて対向する
    ように配置した放熱板と、該間隙を充填しかつ該放熱板
    下面が露出するようにトランスファ樹脂封止する熱伝導
    性樹脂とにより構成される放熱板付樹脂封止形半導体装
    置において、該半導体搭載部の肉厚を該リードフレーム
    の平均肉厚より厚くしたことを特徴とする放熱板付樹脂
    封止形半導体装置。 2 半導体搭載部がリードフレームのベッド部であって
    、該リードフレームの他の部分と肉厚の異なる同一部材
    を用いたものである特許請求の範囲第1項記載の放熱板
    付樹脂封止形半導体装置。 3 半導体搭載部がリードフレームのベッド部と熱拡散
    板との重合層よりなる特許請求の範囲第1項記載の放熱
    板付樹脂封止形半導体装置。
JP15886084A 1984-07-31 1984-07-31 放熱板付樹脂封止形半導体装置 Pending JPS6139555A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15886084A JPS6139555A (ja) 1984-07-31 1984-07-31 放熱板付樹脂封止形半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15886084A JPS6139555A (ja) 1984-07-31 1984-07-31 放熱板付樹脂封止形半導体装置

Publications (1)

Publication Number Publication Date
JPS6139555A true JPS6139555A (ja) 1986-02-25

Family

ID=15680980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15886084A Pending JPS6139555A (ja) 1984-07-31 1984-07-31 放熱板付樹脂封止形半導体装置

Country Status (1)

Country Link
JP (1) JPS6139555A (ja)

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JPS62229961A (ja) * 1986-03-31 1987-10-08 Toshiba Corp 樹脂封止型半導体装置
US5328870A (en) * 1992-01-17 1994-07-12 Amkor Electronics, Inc. Method for forming plastic molded package with heat sink for integrated circuit devices
US5489801A (en) * 1993-11-03 1996-02-06 Intel Corporation Quad flat package heat slug composition
US5530295A (en) * 1993-12-29 1996-06-25 Intel Corporation Drop-in heat sink
US5552960A (en) * 1994-04-14 1996-09-03 Intel Corporation Collapsible cooling apparatus for portable computer
US5608267A (en) * 1992-09-17 1997-03-04 Olin Corporation Molded plastic semiconductor package including heat spreader
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US5834842A (en) * 1996-01-17 1998-11-10 Mitsubishi Denki Kabushiki Kaisha Semiconductor device, semiconductor module, and radiating fin
US5912802A (en) * 1994-06-30 1999-06-15 Intel Corporation Ducted opposing bonded fin heat sink blower multi-microprocessor cooling system
US5939214A (en) * 1989-05-31 1999-08-17 Advanced Technology Interconnect, Incorporated Thermal performance package for integrated circuit chip
JP2000183279A (ja) * 1998-10-05 2000-06-30 Fuji Electric Co Ltd 半導体素子のパッケージおよびその製造方法
US6143981A (en) * 1998-06-24 2000-11-07 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US6281568B1 (en) 1998-10-21 2001-08-28 Amkor Technology, Inc. Plastic integrated circuit device package and leadframe having partially undercut leads and die pad
US6448633B1 (en) 1998-11-20 2002-09-10 Amkor Technology, Inc. Semiconductor package and method of making using leadframe having lead locks to secure leads to encapsulant
US6469369B1 (en) 1999-06-30 2002-10-22 Amkor Technology, Inc. Leadframe having a mold inflow groove and method for making
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US6847099B1 (en) 2003-02-05 2005-01-25 Amkor Technology Inc. Offset etched corner leads for semiconductor package
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JPS62229961A (ja) * 1986-03-31 1987-10-08 Toshiba Corp 樹脂封止型半導体装置
US5939214A (en) * 1989-05-31 1999-08-17 Advanced Technology Interconnect, Incorporated Thermal performance package for integrated circuit chip
US5328870A (en) * 1992-01-17 1994-07-12 Amkor Electronics, Inc. Method for forming plastic molded package with heat sink for integrated circuit devices
US5455462A (en) * 1992-01-17 1995-10-03 Amkor Electronics, Inc. Plastic molded package with heat sink for integrated circuit devices
US5608267A (en) * 1992-09-17 1997-03-04 Olin Corporation Molded plastic semiconductor package including heat spreader
US5489801A (en) * 1993-11-03 1996-02-06 Intel Corporation Quad flat package heat slug composition
US5530295A (en) * 1993-12-29 1996-06-25 Intel Corporation Drop-in heat sink
US5552960A (en) * 1994-04-14 1996-09-03 Intel Corporation Collapsible cooling apparatus for portable computer
US5701034A (en) * 1994-05-03 1997-12-23 Amkor Electronics, Inc. Packaged semiconductor die including heat sink with locking feature
US5722161A (en) * 1994-05-03 1998-03-03 Amkor Electronics, Inc. Method of making a packaged semiconductor die including heat sink with locking feature
US5912802A (en) * 1994-06-30 1999-06-15 Intel Corporation Ducted opposing bonded fin heat sink blower multi-microprocessor cooling system
US5834842A (en) * 1996-01-17 1998-11-10 Mitsubishi Denki Kabushiki Kaisha Semiconductor device, semiconductor module, and radiating fin
US6143981A (en) * 1998-06-24 2000-11-07 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US6433277B1 (en) 1998-06-24 2002-08-13 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
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JP2000183279A (ja) * 1998-10-05 2000-06-30 Fuji Electric Co Ltd 半導体素子のパッケージおよびその製造方法
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US6455356B1 (en) 1998-10-21 2002-09-24 Amkor Technology Methods for moding a leadframe in plastic integrated circuit devices
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US10090228B1 (en) 2012-03-06 2018-10-02 Amkor Technology, Inc. Semiconductor device with leadframe configured to facilitate reduced burr formation
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