JPS6136703B2 - - Google Patents

Info

Publication number
JPS6136703B2
JPS6136703B2 JP3111180A JP3111180A JPS6136703B2 JP S6136703 B2 JPS6136703 B2 JP S6136703B2 JP 3111180 A JP3111180 A JP 3111180A JP 3111180 A JP3111180 A JP 3111180A JP S6136703 B2 JPS6136703 B2 JP S6136703B2
Authority
JP
Japan
Prior art keywords
pellet
pellets
microscope
defective
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3111180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56126934A (en
Inventor
Koichiro Tsutsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3111180A priority Critical patent/JPS56126934A/ja
Publication of JPS56126934A publication Critical patent/JPS56126934A/ja
Publication of JPS6136703B2 publication Critical patent/JPS6136703B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3111180A 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet Granted JPS56126934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3111180A JPS56126934A (en) 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3111180A JPS56126934A (en) 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet

Publications (2)

Publication Number Publication Date
JPS56126934A JPS56126934A (en) 1981-10-05
JPS6136703B2 true JPS6136703B2 (enrdf_load_stackoverflow) 1986-08-20

Family

ID=12322281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3111180A Granted JPS56126934A (en) 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS56126934A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114130693A (zh) * 2021-11-26 2022-03-04 远通五金塑胶制品(深圳)有限公司 一种自动喷码检测机

Also Published As

Publication number Publication date
JPS56126934A (en) 1981-10-05

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