JPS6136616B2 - - Google Patents
Info
- Publication number
- JPS6136616B2 JPS6136616B2 JP54093637A JP9363779A JPS6136616B2 JP S6136616 B2 JPS6136616 B2 JP S6136616B2 JP 54093637 A JP54093637 A JP 54093637A JP 9363779 A JP9363779 A JP 9363779A JP S6136616 B2 JPS6136616 B2 JP S6136616B2
- Authority
- JP
- Japan
- Prior art keywords
- electric heater
- upper layer
- cavity
- bridge
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000012777 electrically insulating material Substances 0.000 claims 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Surface Heating Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363779A JPS5618381A (en) | 1979-07-25 | 1979-07-25 | Electric heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363779A JPS5618381A (en) | 1979-07-25 | 1979-07-25 | Electric heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5618381A JPS5618381A (en) | 1981-02-21 |
| JPS6136616B2 true JPS6136616B2 (zh) | 1986-08-19 |
Family
ID=14087851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9363779A Granted JPS5618381A (en) | 1979-07-25 | 1979-07-25 | Electric heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5618381A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01239102A (ja) * | 1988-03-18 | 1989-09-25 | Mitsubishi Rayon Co Ltd | 使い捨ておむつ |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5811139A (ja) * | 1981-07-14 | 1983-01-21 | 東燃株式会社 | 金属蒸着ポリプロピレンフイルム |
| JPS5872059A (ja) * | 1981-10-09 | 1983-04-28 | ハネウエル・インコ−ポレ−テツド | 半導体装置、流量計及びその製造方法 |
| EP0076935B1 (en) * | 1981-10-09 | 1989-07-19 | Honeywell Inc. | Integrated semiconductor device and method of fabricating said device |
| JPS58154652A (ja) * | 1982-03-10 | 1983-09-14 | Toshiba Corp | 感ガス素子 |
| JPS5957118A (ja) * | 1982-09-28 | 1984-04-02 | Japan Electronic Control Syst Co Ltd | 流量計 |
| JPS604814A (ja) * | 1983-06-23 | 1985-01-11 | Nippon Soken Inc | 熱式流量検出装置 |
| JPS6013220A (ja) * | 1983-07-04 | 1985-01-23 | Esutetsuku:Kk | ガス流量センサ−及びその製造方法 |
| JPS60142268A (ja) * | 1983-12-27 | 1985-07-27 | 株式会社山武 | 流速センサ |
| US4576050A (en) * | 1984-08-29 | 1986-03-18 | General Motors Corporation | Thermal diffusion fluid flow sensor |
| DE3583099D1 (de) * | 1984-10-01 | 1991-07-11 | Honeywell Inc | Halbleitervorrichtung, insbesondere halbleitersensor und verfahren zu ihrer herstellung. |
| JPS6295454A (ja) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | マイクロガスセンサおよびその製造方法 |
| JPS62159627U (zh) * | 1986-03-31 | 1987-10-09 | ||
| JPH0257066U (zh) * | 1988-10-18 | 1990-04-25 | ||
| JPH0795076B2 (ja) * | 1989-05-23 | 1995-10-11 | 山武ハネウエル株式会社 | 流速センサ |
| KR100448035B1 (ko) | 1997-12-11 | 2004-09-08 | 데이진 가부시키가이샤 | 이축배향 폴리에스테르 필름 |
| JP4866191B2 (ja) * | 2006-09-25 | 2012-02-01 | シチズンホールディングス株式会社 | ガスセンサ及びその製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3359462A (en) * | 1964-08-04 | 1967-12-19 | Telefunken Patent | Electrical circuit device |
| JPS5389799A (en) * | 1977-01-18 | 1978-08-07 | Mitsubishi Electric Corp | Combustible gas detector |
| US4129848A (en) * | 1975-09-03 | 1978-12-12 | Raytheon Company | Platinum film resistor device |
-
1979
- 1979-07-25 JP JP9363779A patent/JPS5618381A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3359462A (en) * | 1964-08-04 | 1967-12-19 | Telefunken Patent | Electrical circuit device |
| US4129848A (en) * | 1975-09-03 | 1978-12-12 | Raytheon Company | Platinum film resistor device |
| JPS5389799A (en) * | 1977-01-18 | 1978-08-07 | Mitsubishi Electric Corp | Combustible gas detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01239102A (ja) * | 1988-03-18 | 1989-09-25 | Mitsubishi Rayon Co Ltd | 使い捨ておむつ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5618381A (en) | 1981-02-21 |
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