JPS6135716B2 - - Google Patents

Info

Publication number
JPS6135716B2
JPS6135716B2 JP56160062A JP16006281A JPS6135716B2 JP S6135716 B2 JPS6135716 B2 JP S6135716B2 JP 56160062 A JP56160062 A JP 56160062A JP 16006281 A JP16006281 A JP 16006281A JP S6135716 B2 JPS6135716 B2 JP S6135716B2
Authority
JP
Japan
Prior art keywords
surface acoustic
zinc oxide
oxide film
acoustic wave
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56160062A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5861686A (ja
Inventor
Takeshi Okamoto
Ryuichi Asai
Shoichi Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Faurecia Clarion Electronics Co Ltd
Original Assignee
Clarion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP56031562A priority Critical patent/JPS57145419A/ja
Priority to JP56139724A priority patent/JPS5844806A/ja
Priority to JP56153825A priority patent/JPS5856513A/ja
Priority to JP56153826A priority patent/JPS5856514A/ja
Priority to JP56153827A priority patent/JPS5856515A/ja
Application filed by Clarion Co Ltd filed Critical Clarion Co Ltd
Priority to JP56160062A priority patent/JPS5861686A/ja
Priority to JP56163148A priority patent/JPS5863214A/ja
Priority to US06/354,430 priority patent/US4449107A/en
Priority to FR8203628A priority patent/FR2509927B1/fr
Priority to GB8206465A priority patent/GB2095948B/en
Priority to DE3208239A priority patent/DE3208239C2/de
Priority to NL8200935A priority patent/NL8200935A/nl
Priority to DE19823237358 priority patent/DE3237358A1/de
Priority to FR8216922A priority patent/FR2514567B1/fr
Priority to GB08228854A priority patent/GB2110033B/en
Priority to US06/433,483 priority patent/US4480209A/en
Priority to NL8203917A priority patent/NL8203917A/nl
Publication of JPS5861686A publication Critical patent/JPS5861686A/ja
Publication of JPS6135716B2 publication Critical patent/JPS6135716B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP56160062A 1981-03-05 1981-10-09 表面弾性波素子 Granted JPS5861686A (ja)

Priority Applications (17)

Application Number Priority Date Filing Date Title
JP56031562A JPS57145419A (en) 1981-03-05 1981-03-05 Surface acoustic wave element
JP56139724A JPS5844806A (ja) 1981-03-05 1981-09-07 弾性表面波用素子
JP56153825A JPS5856513A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153826A JPS5856514A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153827A JPS5856515A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56160062A JPS5861686A (ja) 1981-03-05 1981-10-09 表面弾性波素子
JP56163148A JPS5863214A (ja) 1981-03-05 1981-10-12 表面弾性波素子
US06/354,430 US4449107A (en) 1981-03-05 1982-03-03 Surface elastic wave element
GB8206465A GB2095948B (en) 1981-03-05 1982-03-04 Surface elastic wave element
FR8203628A FR2509927B1 (fr) 1981-03-05 1982-03-04 Element a onde elastique de surface
DE3208239A DE3208239C2 (de) 1981-03-05 1982-03-05 Oberflächenwellenbauelement
NL8200935A NL8200935A (nl) 1981-03-05 1982-03-05 Oppervlakte-elastisch golfelement.
DE19823237358 DE3237358A1 (de) 1981-03-05 1982-10-08 Element fuer elastische oberflaechenwellen
FR8216922A FR2514567B1 (fr) 1981-03-05 1982-10-08 Element a onde elastique de surface
GB08228854A GB2110033B (en) 1981-03-05 1982-10-08 Surface elastic wave element
US06/433,483 US4480209A (en) 1981-10-09 1982-10-08 Surface acoustic wave device having a specified crystalline orientation
NL8203917A NL8203917A (nl) 1981-03-05 1982-10-08 Element voor elastische oppervlaktegolven.

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP56031562A JPS57145419A (en) 1981-03-05 1981-03-05 Surface acoustic wave element
JP56139724A JPS5844806A (ja) 1981-03-05 1981-09-07 弾性表面波用素子
JP56153826A JPS5856514A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153827A JPS5856515A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153825A JPS5856513A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56160062A JPS5861686A (ja) 1981-03-05 1981-10-09 表面弾性波素子
JP56163148A JPS5863214A (ja) 1981-03-05 1981-10-12 表面弾性波素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP60094219A Division JPS6116610A (ja) 1985-04-30 1985-04-30 表面弾性波素子

Publications (2)

Publication Number Publication Date
JPS5861686A JPS5861686A (ja) 1983-04-12
JPS6135716B2 true JPS6135716B2 (OSRAM) 1986-08-14

Family

ID=27564285

Family Applications (7)

Application Number Title Priority Date Filing Date
JP56031562A Granted JPS57145419A (en) 1981-03-05 1981-03-05 Surface acoustic wave element
JP56139724A Pending JPS5844806A (ja) 1981-03-05 1981-09-07 弾性表面波用素子
JP56153827A Granted JPS5856515A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153825A Granted JPS5856513A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153826A Pending JPS5856514A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56160062A Granted JPS5861686A (ja) 1981-03-05 1981-10-09 表面弾性波素子
JP56163148A Granted JPS5863214A (ja) 1981-03-05 1981-10-12 表面弾性波素子

Family Applications Before (5)

Application Number Title Priority Date Filing Date
JP56031562A Granted JPS57145419A (en) 1981-03-05 1981-03-05 Surface acoustic wave element
JP56139724A Pending JPS5844806A (ja) 1981-03-05 1981-09-07 弾性表面波用素子
JP56153827A Granted JPS5856515A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153825A Granted JPS5856513A (ja) 1981-03-05 1981-09-30 表面弾性波素子
JP56153826A Pending JPS5856514A (ja) 1981-03-05 1981-09-30 表面弾性波素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP56163148A Granted JPS5863214A (ja) 1981-03-05 1981-10-12 表面弾性波素子

Country Status (6)

Country Link
US (1) US4449107A (OSRAM)
JP (7) JPS57145419A (OSRAM)
DE (2) DE3208239C2 (OSRAM)
FR (2) FR2509927B1 (OSRAM)
GB (2) GB2095948B (OSRAM)
NL (2) NL8200935A (OSRAM)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145419A (en) * 1981-03-05 1982-09-08 Clarion Co Ltd Surface acoustic wave element
US4625184A (en) * 1982-07-02 1986-11-25 Clarion Co., Ltd. Surface acoustic wave device with impedance matching network formed thereon
JPS598418A (ja) * 1982-07-06 1984-01-17 Clarion Co Ltd 弾性表面波装置
JPS59231911A (ja) * 1983-06-14 1984-12-26 Clarion Co Ltd 表面弾性波素子
JPS60124109A (ja) * 1983-12-09 1985-07-03 Clarion Co Ltd 表面弾性波素子
JPS60124112A (ja) * 1983-12-09 1985-07-03 Clarion Co Ltd 表面弾性波素子
JPS60124111A (ja) * 1983-12-09 1985-07-03 Clarion Co Ltd 表面弾性波素子
US4567392A (en) * 1983-12-09 1986-01-28 Clarion Co., Ltd. Sezawa surface-acoustic-wave device using ZnO(0001)/SiO2 / Si(100)(011)
JPH07101832B2 (ja) * 1986-06-23 1995-11-01 株式会社日立製作所 圧電変換器及びその製造方法
GB2206257B (en) * 1987-05-26 1991-08-14 Clarion Co Ltd Surface acoustic wave device
DE3731309A1 (de) * 1987-09-17 1989-03-30 Siemens Ag Oberflaechenwellenanordnung mit konversionsstruktur zur vermeidung unerwuenschter reflektierter wellen
JPH0217707A (ja) * 1988-07-05 1990-01-22 Clarion Co Ltd 広帯域弾性表面波フィルタ
JPH0388406A (ja) * 1989-04-11 1991-04-12 Sanyo Electric Co Ltd 弾性表面波素子
JPH02290316A (ja) * 1989-06-23 1990-11-30 Clarion Co Ltd 表面弾性波素子
JPH0340510A (ja) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd 弾性表面波装置
JPH0438357A (ja) * 1990-06-04 1992-02-07 Toyo Tire & Rubber Co Ltd コンクリート上の歩行域の設定工法
JPH04343514A (ja) * 1991-05-20 1992-11-30 Clarion Co Ltd 弾性表面波素子
US5446330A (en) * 1993-03-15 1995-08-29 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device having a lamination structure
JPH07297675A (ja) * 1994-04-26 1995-11-10 Fujitsu Ltd 弾性表面波共振器
US5831492A (en) * 1995-09-15 1998-11-03 Sawtek Inc. Weighted tapered spudt saw device
US5818310A (en) * 1996-08-27 1998-10-06 Sawtek Inc. Series-block and line-width weighted saw filter device
JP3233413B2 (ja) * 1996-10-18 2001-11-26 ティーディーケイ株式会社 弾性表面波装置
CN1112763C (zh) * 1996-10-18 2003-06-25 Tdk株式会社 声表面波器件
US6452305B1 (en) * 2000-03-14 2002-09-17 Motorola, Inc. High power surface acoustic wave device
DE10155712B4 (de) * 2001-11-09 2009-07-16 Forschungszentrum Jülich GmbH Zinkoxid-Schicht und Verfahren zu dessen Herstellung
JP3841053B2 (ja) 2002-07-24 2006-11-01 株式会社村田製作所 弾性表面波装置及びその製造方法
DE10325281B4 (de) * 2003-06-04 2018-05-17 Snaptrack, Inc. Elektroakustisches Bauelement und Verfahren zur Herstellung
JP2006245990A (ja) * 2005-03-03 2006-09-14 Matsushita Electric Ind Co Ltd 弾性表面波素子及びその製造方法
CN1829082B (zh) * 2005-03-04 2010-05-26 鸿富锦精密工业（深圳）有限公司 声表面波器件及多频移动电话
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
US8058769B2 (en) * 2008-12-17 2011-11-15 Sand9, Inc. Mechanical resonating structures including a temperature compensation structure
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
KR102215432B1 (ko) * 2017-03-09 2021-02-16 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 멀티플렉서, 고주파 프론트 엔드 회로 및 통신 장치
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786373A (en) * 1971-10-01 1974-01-15 Raytheon Co Temperature compensated acoustic surface wave device
US3828283A (en) * 1973-07-24 1974-08-06 Westinghouse Electric Corp Method for improving semiconductor surface wave transducer efficiency
DE2607837C2 (de) * 1975-03-04 1984-09-13 Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto Mehrschichten-Interdigital-Wandler für akustische Oberflächenwellen
US4037176A (en) * 1975-03-18 1977-07-19 Matsushita Electric Industrial Co., Ltd. Multi-layered substrate for a surface-acoustic-wave device
JPS54114484A (en) * 1978-02-27 1979-09-06 Toko Inc Production of piezoelectric thin layer
US4194171A (en) * 1978-07-07 1980-03-18 The United States Of America As Represented By The Secretary Of The Navy Zinc oxide on silicon device for parallel in, serial out, discrete fourier transform
JPS5687913A (en) * 1979-12-19 1981-07-17 Matsushita Electric Ind Co Ltd Surface elastic wave element
JPS57145419A (en) * 1981-03-05 1982-09-08 Clarion Co Ltd Surface acoustic wave element
US4358745A (en) * 1981-03-16 1982-11-09 International Business Machines Corporation Semiconductor surface acoustic wave device

Also Published As

Publication number Publication date
FR2514567B1 (fr) 1987-10-16
JPH025327B2 (OSRAM) 1990-02-01
JPS5863214A (ja) 1983-04-15
NL8203917A (nl) 1983-05-02
DE3237358A1 (de) 1983-04-28
FR2514567A1 (fr) 1983-04-15
DE3208239A1 (de) 1982-11-25
JPS5856515A (ja) 1983-04-04
JPS5856513A (ja) 1983-04-04
JPS5856514A (ja) 1983-04-04
FR2509927A1 (fr) 1983-01-21
NL8200935A (nl) 1982-10-01
GB2095948A (en) 1982-10-06
JPS57145419A (en) 1982-09-08
GB2110033B (en) 1985-09-25
GB2110033A (en) 1983-06-08
JPH029485B2 (OSRAM) 1990-03-02
FR2509927B1 (fr) 1986-11-21
JPH027526B2 (OSRAM) 1990-02-19
JPH027525B2 (OSRAM) 1990-02-19
DE3208239C2 (de) 1994-06-16
US4449107A (en) 1984-05-15
JPS5844806A (ja) 1983-03-15
JPS5861686A (ja) 1983-04-12
GB2095948B (en) 1986-02-26

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