JPS6135562Y2 - - Google Patents
Info
- Publication number
- JPS6135562Y2 JPS6135562Y2 JP4994782U JP4994782U JPS6135562Y2 JP S6135562 Y2 JPS6135562 Y2 JP S6135562Y2 JP 4994782 U JP4994782 U JP 4994782U JP 4994782 U JP4994782 U JP 4994782U JP S6135562 Y2 JPS6135562 Y2 JP S6135562Y2
- Authority
- JP
- Japan
- Prior art keywords
- zinc
- gas
- raw material
- gas phase
- znse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 46
- 229910052725 zinc Inorganic materials 0.000 claims description 46
- 239000011701 zinc Substances 0.000 claims description 46
- 239000007789 gas Substances 0.000 claims description 28
- 239000012159 carrier gas Substances 0.000 claims description 22
- 239000002994 raw material Substances 0.000 claims description 21
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- -1 ZnSe compound Chemical class 0.000 claims description 9
- 238000010574 gas phase reaction Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical class [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 7
- 230000000704 physical effect Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4994782U JPS58155343U (ja) | 1982-04-08 | 1982-04-08 | ＺｎＳｅ化合物の気相反応装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4994782U JPS58155343U (ja) | 1982-04-08 | 1982-04-08 | ＺｎＳｅ化合物の気相反応装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58155343U JPS58155343U (ja) | 1983-10-17 |
| JPS6135562Y2 true JPS6135562Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-16 |
Family
ID=30060764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4994782U Granted JPS58155343U (ja) | 1982-04-08 | 1982-04-08 | ＺｎＳｅ化合物の気相反応装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58155343U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010113298A1 (ja) * | 2009-04-01 | 2010-10-07 | 電気化学工業株式会社 | 気相反応装置 |
-
1982
- 1982-04-08 JP JP4994782U patent/JPS58155343U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58155343U (ja) | 1983-10-17 |
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