JPS6135268B2 - - Google Patents

Info

Publication number
JPS6135268B2
JPS6135268B2 JP52017701A JP1770177A JPS6135268B2 JP S6135268 B2 JPS6135268 B2 JP S6135268B2 JP 52017701 A JP52017701 A JP 52017701A JP 1770177 A JP1770177 A JP 1770177A JP S6135268 B2 JPS6135268 B2 JP S6135268B2
Authority
JP
Japan
Prior art keywords
film
conductive film
transparent conductive
molded product
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52017701A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53102881A (en
Inventor
Hitoshi Mikoshiba
Norio Takagi
Masato Sugyama
Kunihiko Teranishi
Juji Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP1770177A priority Critical patent/JPS53102881A/ja
Publication of JPS53102881A publication Critical patent/JPS53102881A/ja
Publication of JPS6135268B2 publication Critical patent/JPS6135268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Conductive Materials (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP1770177A 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane Granted JPS53102881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1770177A JPS53102881A (en) 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1770177A JPS53102881A (en) 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane

Publications (2)

Publication Number Publication Date
JPS53102881A JPS53102881A (en) 1978-09-07
JPS6135268B2 true JPS6135268B2 (enrdf_load_stackoverflow) 1986-08-12

Family

ID=11951081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1770177A Granted JPS53102881A (en) 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane

Country Status (1)

Country Link
JP (1) JPS53102881A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473659U (enrdf_load_stackoverflow) * 1990-11-07 1992-06-29

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140581B (en) * 1983-05-23 1987-03-18 American Optical Corp Anti-static and/or anti-reflective abrasion-resistant ophthalmic lenses

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473659U (enrdf_load_stackoverflow) * 1990-11-07 1992-06-29

Also Published As

Publication number Publication date
JPS53102881A (en) 1978-09-07

Similar Documents

Publication Publication Date Title
EP0030732B1 (en) Transparent electrically conductive film and process for production thereof
US4952423A (en) Production of a transparent electric conductor
JP4438381B2 (ja) 結晶性ｉｔｏ膜、ｉｔｏ膜の結晶化方法、透明導電性フィルム、タッチパネル及び色素増感型太陽電池
AU714268B2 (en) Process for manufacturing an electrode for an electrochemical device
US20070259132A1 (en) Composite material
US4000346A (en) Optically transparent, electrically conductive coating
KR100336621B1 (ko) 고분자 기판 위의 인듐산화물 또는 인듐주석산화물 박막증착 방법
JPS6179647A (ja) 透明導電性積層体及びその製造方法
JPS6135268B2 (enrdf_load_stackoverflow)
JP3349194B2 (ja) 透明導電性積層体
JPS61183809A (ja) 透明導電性積層体及びその製造方法
JP4705340B2 (ja) 酸化インジウム膜の製造方法
CN103310873B (zh) 透明导电石墨烯薄膜及其制备方法和应用
WO2018225736A1 (ja) グラフェンシートの導電性改善方法及び導電性が改善されたグラフェンシートを用いた電極構造
JPS6039090B2 (ja) 透明導電性被膜の形成法
JP2628519B2 (ja) 電子電熱変換材料の製造方法および電子電熱変換材料
JPS6346526B2 (enrdf_load_stackoverflow)
JPS60131711A (ja) 透明導電性積層体
JPS6143805B2 (enrdf_load_stackoverflow)
JPH09198926A (ja) 導電性を備えたポリマー組成物及びその製造方法
JPH0815712A (ja) 透明導電性薄膜の製造方法
JP7260117B2 (ja) 可視光応答型複合薄膜光触媒材料及び可視光応答型複合薄膜光触媒材料の製造方法
WO2023042848A1 (ja) 透明導電性フィルム
KR100322850B1 (ko) 투명도전성 박막용 조성물 및 이를 이용한 저저항투명도전성 박막의 제조방법
JP4007082B2 (ja) 透明導電膜及びその形成方法