JPS613116A - 洗滌の後の真空蒸着又は陰極スパツタによる被覆等の処理を行なうべき担体の多重保持装置 - Google Patents

洗滌の後の真空蒸着又は陰極スパツタによる被覆等の処理を行なうべき担体の多重保持装置

Info

Publication number
JPS613116A
JPS613116A JP60117649A JP11764985A JPS613116A JP S613116 A JPS613116 A JP S613116A JP 60117649 A JP60117649 A JP 60117649A JP 11764985 A JP11764985 A JP 11764985A JP S613116 A JPS613116 A JP S613116A
Authority
JP
Japan
Prior art keywords
holding
treatment
rinsing
holding device
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60117649A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151163B2 (https=
Inventor
ベルンハルト・ブラヒヤー
カール・バウマン
ヘルマン・シユタウプ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of JPS613116A publication Critical patent/JPS613116A/ja
Publication of JPH0151163B2 publication Critical patent/JPH0151163B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Eyeglasses (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP60117649A 1984-05-30 1985-05-30 洗滌の後の真空蒸着又は陰極スパツタによる被覆等の処理を行なうべき担体の多重保持装置 Granted JPS613116A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH2652/84-9 1984-05-30
CH2652/84A CH659485A5 (de) 1984-05-30 1984-05-30 Mehrfach-haltevorrichtung fuer zu behandelnde substrate.

Publications (2)

Publication Number Publication Date
JPS613116A true JPS613116A (ja) 1986-01-09
JPH0151163B2 JPH0151163B2 (https=) 1989-11-01

Family

ID=4238562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60117649A Granted JPS613116A (ja) 1984-05-30 1985-05-30 洗滌の後の真空蒸着又は陰極スパツタによる被覆等の処理を行なうべき担体の多重保持装置

Country Status (7)

Country Link
US (1) US4643128A (https=)
JP (1) JPS613116A (https=)
CH (1) CH659485A5 (https=)
DE (1) DE3513137A1 (https=)
FR (1) FR2566433B1 (https=)
GB (1) GB2159541B (https=)
NL (1) NL8501220A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63301U (https=) * 1986-06-18 1988-01-05
JPH02131701U (https=) * 1989-04-03 1990-11-01

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0385157A1 (de) * 1989-03-01 1990-09-05 Balzers Aktiengesellschaft Substrathalter zur Aufnahme von zu beschichtenden Gläsern und kalottenförmiger Substratträger zur Aufnahme von Substrathaltern
DE3912295C2 (de) * 1989-04-14 1997-05-28 Leybold Ag Katodenzerstäubungsanlage
GB8911566D0 (en) * 1989-05-19 1989-07-05 Sun Ind Coatings Plating system
DE3921671A1 (de) * 1989-07-01 1991-01-03 Leybold Ag Linsenhalterung, insbesondere halterung fuer in einer hochvakuum-aufdampfanlage oder -sputteranlage zu beschichtende brillenglaslinsen
CH679838A5 (en) * 1990-05-11 1992-04-30 Balzers Hochvakuum Glass lens mounting ring - supporting lens at edges for coating
DE4232902C2 (de) * 1992-09-30 2001-06-28 Leybold Ag Substrathalter
DE4446179C2 (de) * 1994-12-23 2003-08-21 Leybold Optics Gmbh Halterung für scheibenförmige Substrate
US6017581A (en) * 1997-04-18 2000-01-25 Semi-Alloys Company Method for coating lenticular articles
US7727581B2 (en) * 2004-03-17 2010-06-01 Essilor International Compagnie Generale D' Optique Process for applying a coating on an optical lens face and implementation system
US6972914B2 (en) * 2004-03-17 2005-12-06 Essilor International Compagnie Generale D'optique Optical lens holder
EP1914579A1 (en) * 2006-10-18 2008-04-23 ESSILOR INTERNATIONAL Compagnie Générale d'Optique Optical lens holder for holding lenses during manufacturing process
USD785060S1 (en) * 2007-07-09 2017-04-25 Willie Leon Sapp Pottery holder
US10050009B2 (en) * 2015-09-15 2018-08-14 Semiconductor Components Industries, Llc Methods and apparatus for improved bonding

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB288297A (en) * 1927-04-05 1928-08-23 Otto Scheuchzer Improvements in and relating to supporting devices for colour screens, lenses or the like
GB306297A (en) * 1928-03-10 1929-02-21 W & J George Ltd Improvements in or relating to holding devices for lenses, prisms and similar objects
US2532971A (en) * 1947-04-12 1950-12-05 Pacific Universal Products Cor Method and apparatus for producing optical coatings
GB655856A (en) * 1948-07-14 1951-08-01 W & J George & Becker Ltd Improvements relating to optical apparatus for educational and demonstration use
GB662762A (en) * 1949-01-04 1951-12-12 James Pinder Stephenson Improvements in or relating to optical benches
US3315637A (en) * 1963-04-10 1967-04-25 United Aircraft Corp Self-centering, proportionating wafer fixture
US3336902A (en) * 1966-06-01 1967-08-22 American Optical Corp Lens holder
CH585675A5 (https=) * 1973-06-13 1977-03-15 Satis Vacuum Ag
DE3028536C2 (de) * 1980-07-28 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Halterung von kreisförmigen Substratscheiben und ihre Verwendung
JPS589980A (ja) * 1981-07-08 1983-01-20 Hitachi Ltd プラネタリ形蒸着装置
US4455964A (en) * 1982-02-01 1984-06-26 Techsight Corporation Mount for handling and masking optical materials

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63301U (https=) * 1986-06-18 1988-01-05
JPH02131701U (https=) * 1989-04-03 1990-11-01

Also Published As

Publication number Publication date
FR2566433A1 (fr) 1985-12-27
GB8512469D0 (en) 1985-06-19
JPH0151163B2 (https=) 1989-11-01
US4643128A (en) 1987-02-17
GB2159541A (en) 1985-12-04
NL8501220A (nl) 1985-12-16
DE3513137A1 (de) 1985-12-05
GB2159541B (en) 1987-08-19
CH659485A5 (de) 1987-01-30
FR2566433B1 (fr) 1988-07-29

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