JPS6129722Y2 - - Google Patents
Info
- Publication number
- JPS6129722Y2 JPS6129722Y2 JP743682U JP743682U JPS6129722Y2 JP S6129722 Y2 JPS6129722 Y2 JP S6129722Y2 JP 743682 U JP743682 U JP 743682U JP 743682 U JP743682 U JP 743682U JP S6129722 Y2 JPS6129722 Y2 JP S6129722Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- evaporation source
- vacuum chamber
- shielding plate
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008020 evaporation Effects 0.000 claims description 27
- 238000001704 evaporation Methods 0.000 claims description 27
- 238000012544 monitoring process Methods 0.000 claims description 11
- 238000000151 deposition Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP743682U JPS58113766U (ja) | 1982-01-25 | 1982-01-25 | 蒸発源監視機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP743682U JPS58113766U (ja) | 1982-01-25 | 1982-01-25 | 蒸発源監視機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58113766U JPS58113766U (ja) | 1983-08-03 |
| JPS6129722Y2 true JPS6129722Y2 (cs) | 1986-09-01 |
Family
ID=30020184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP743682U Granted JPS58113766U (ja) | 1982-01-25 | 1982-01-25 | 蒸発源監視機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58113766U (cs) |
-
1982
- 1982-01-25 JP JP743682U patent/JPS58113766U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58113766U (ja) | 1983-08-03 |
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