JPS6129453B2 - - Google Patents

Info

Publication number
JPS6129453B2
JPS6129453B2 JP51045521A JP4552176A JPS6129453B2 JP S6129453 B2 JPS6129453 B2 JP S6129453B2 JP 51045521 A JP51045521 A JP 51045521A JP 4552176 A JP4552176 A JP 4552176A JP S6129453 B2 JPS6129453 B2 JP S6129453B2
Authority
JP
Japan
Prior art keywords
light
transparent object
defects
lens
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51045521A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52129582A (en
Inventor
Katsumi Takami
Noriaki Pponma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4552176A priority Critical patent/JPS52129582A/ja
Publication of JPS52129582A publication Critical patent/JPS52129582A/ja
Publication of JPS6129453B2 publication Critical patent/JPS6129453B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4552176A 1976-04-23 1976-04-23 Flaw detector Granted JPS52129582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4552176A JPS52129582A (en) 1976-04-23 1976-04-23 Flaw detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4552176A JPS52129582A (en) 1976-04-23 1976-04-23 Flaw detector

Publications (2)

Publication Number Publication Date
JPS52129582A JPS52129582A (en) 1977-10-31
JPS6129453B2 true JPS6129453B2 (en, 2012) 1986-07-07

Family

ID=12721707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4552176A Granted JPS52129582A (en) 1976-04-23 1976-04-23 Flaw detector

Country Status (1)

Country Link
JP (1) JPS52129582A (en, 2012)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643539A (en) * 1979-09-19 1981-04-22 Hitachi Ltd Defect inspection device of face plate
JPS58162038A (ja) * 1982-03-23 1983-09-26 Canon Inc 面状態検査装置
JPS5982727A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 異物検出方法及びその装置
US4886975A (en) * 1986-02-14 1989-12-12 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
JPH02245642A (ja) * 1989-03-20 1990-10-01 Toshiba Corp 付着物検出装置
JPH079407B2 (ja) * 1991-10-28 1995-02-01 株式会社日立製作所 異物検査方法
JP5596925B2 (ja) * 2009-01-20 2014-09-24 株式会社山梨技術工房 異物検査装置及び検査方法
JP5532792B2 (ja) * 2009-09-28 2014-06-25 富士通株式会社 表面検査装置及び表面検査方法
TWI485392B (zh) * 2010-02-08 2015-05-21 Ygk Corp Foreign body inspection device and inspection method
JP2013140061A (ja) * 2012-01-02 2013-07-18 Yamanashi Gijutsu Kobo:Kk 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置

Also Published As

Publication number Publication date
JPS52129582A (en) 1977-10-31

Similar Documents

Publication Publication Date Title
KR0127686B1 (ko) 결함용 레티클 검사장치 및 방법
JP4500641B2 (ja) 欠陥検査方法およびその装置
JPH03267745A (ja) 表面性状検出方法
GB2051349A (en) Automatic defecting inspection apparatus
JPH10160683A (ja) 異物検査方法とその装置
US3814943A (en) Method of and apparatus for analysing patterns and inspecting objects
JPH08128959A (ja) 光学的検査方法および光学的検査装置
JP2999712B2 (ja) 端部欠陥検査方法とその装置
US20060007448A1 (en) System and method for performing bright field and dark field optical inspection
JPS6129453B2 (en, 2012)
WO2004005902A1 (ja) 光学的測定方法およびその装置
JP2873450B2 (ja) 光による欠点検査装置
JP4040777B2 (ja) 異物検査装置
JP2004163129A (ja) 欠陥検査方法
JPH0228815B2 (en, 2012)
JPH09218162A (ja) 表面欠陥検査装置
JPH03115844A (ja) 表面欠点検出方法
JPH10142160A (ja) 光学的検査方法とその装置
JP3446754B2 (ja) 微小異物検出方法及びその検出装置
JPH0431748A (ja) 透明板状体の欠点検査方法
JPH10293103A (ja) 光学測定方法および装置およびパターン付き基板用光学測定装置
GB1596295A (en) Optical apparatus and method
JPS5643539A (en) Defect inspection device of face plate
JP2001050720A (ja) 表面検査方法および装置
JP3406951B2 (ja) 表面状態検査装置