JPS52129582A - Flaw detector - Google Patents

Flaw detector

Info

Publication number
JPS52129582A
JPS52129582A JP4552176A JP4552176A JPS52129582A JP S52129582 A JPS52129582 A JP S52129582A JP 4552176 A JP4552176 A JP 4552176A JP 4552176 A JP4552176 A JP 4552176A JP S52129582 A JPS52129582 A JP S52129582A
Authority
JP
Japan
Prior art keywords
flaw detector
flaw
difficuit
sides
optical means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4552176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129453B2 (en, 2012
Inventor
Katsumi Takami
Noriaki Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4552176A priority Critical patent/JPS52129582A/ja
Publication of JPS52129582A publication Critical patent/JPS52129582A/ja
Publication of JPS6129453B2 publication Critical patent/JPS6129453B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4552176A 1976-04-23 1976-04-23 Flaw detector Granted JPS52129582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4552176A JPS52129582A (en) 1976-04-23 1976-04-23 Flaw detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4552176A JPS52129582A (en) 1976-04-23 1976-04-23 Flaw detector

Publications (2)

Publication Number Publication Date
JPS52129582A true JPS52129582A (en) 1977-10-31
JPS6129453B2 JPS6129453B2 (en, 2012) 1986-07-07

Family

ID=12721707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4552176A Granted JPS52129582A (en) 1976-04-23 1976-04-23 Flaw detector

Country Status (1)

Country Link
JP (1) JPS52129582A (en, 2012)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643539A (en) * 1979-09-19 1981-04-22 Hitachi Ltd Defect inspection device of face plate
FR2524162A1 (fr) * 1982-03-23 1983-09-30 Canon Kk Appareil et procede de controle de negatifs et dispositif de cadrage de masques
JPS5982727A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 異物検出方法及びその装置
JPS64452A (en) * 1988-06-03 1989-01-05 Hitachi Ltd Detection of foreign matter
JPH02245642A (ja) * 1989-03-20 1990-10-01 Toshiba Corp 付着物検出装置
US5017798A (en) * 1986-02-14 1991-05-21 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
JPH0510889A (ja) * 1991-10-28 1993-01-19 Hitachi Ltd 異物検査方法
JP2010169453A (ja) * 2009-01-20 2010-08-05 Yamanashi Gijutsu Kobo:Kk 異物検査装置及び検査方法
JP2011069749A (ja) * 2009-09-28 2011-04-07 Fujitsu Ltd 表面検査装置及び表面検査方法
JP2013140061A (ja) * 2012-01-02 2013-07-18 Yamanashi Gijutsu Kobo:Kk 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置
TWI485392B (zh) * 2010-02-08 2015-05-21 Ygk Corp Foreign body inspection device and inspection method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643539A (en) * 1979-09-19 1981-04-22 Hitachi Ltd Defect inspection device of face plate
FR2524162A1 (fr) * 1982-03-23 1983-09-30 Canon Kk Appareil et procede de controle de negatifs et dispositif de cadrage de masques
JPS5982727A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 異物検出方法及びその装置
US5017798A (en) * 1986-02-14 1991-05-21 Canon Kabushiki Kaisha Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
JPS64452A (en) * 1988-06-03 1989-01-05 Hitachi Ltd Detection of foreign matter
JPH02245642A (ja) * 1989-03-20 1990-10-01 Toshiba Corp 付着物検出装置
JPH0510889A (ja) * 1991-10-28 1993-01-19 Hitachi Ltd 異物検査方法
JP2010169453A (ja) * 2009-01-20 2010-08-05 Yamanashi Gijutsu Kobo:Kk 異物検査装置及び検査方法
JP2011069749A (ja) * 2009-09-28 2011-04-07 Fujitsu Ltd 表面検査装置及び表面検査方法
TWI485392B (zh) * 2010-02-08 2015-05-21 Ygk Corp Foreign body inspection device and inspection method
JP2013140061A (ja) * 2012-01-02 2013-07-18 Yamanashi Gijutsu Kobo:Kk 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置

Also Published As

Publication number Publication date
JPS6129453B2 (en, 2012) 1986-07-07

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