JPS6128030B2 - - Google Patents

Info

Publication number
JPS6128030B2
JPS6128030B2 JP55169057A JP16905780A JPS6128030B2 JP S6128030 B2 JPS6128030 B2 JP S6128030B2 JP 55169057 A JP55169057 A JP 55169057A JP 16905780 A JP16905780 A JP 16905780A JP S6128030 B2 JPS6128030 B2 JP S6128030B2
Authority
JP
Japan
Prior art keywords
chamber
cassette
substrates
processing
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55169057A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5792838A (en
Inventor
Nobuyuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP16905780A priority Critical patent/JPS5792838A/ja
Publication of JPS5792838A publication Critical patent/JPS5792838A/ja
Publication of JPS6128030B2 publication Critical patent/JPS6128030B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
JP16905780A 1980-12-02 1980-12-02 Cassette to cassette substrate process device Granted JPS5792838A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16905780A JPS5792838A (en) 1980-12-02 1980-12-02 Cassette to cassette substrate process device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16905780A JPS5792838A (en) 1980-12-02 1980-12-02 Cassette to cassette substrate process device

Publications (2)

Publication Number Publication Date
JPS5792838A JPS5792838A (en) 1982-06-09
JPS6128030B2 true JPS6128030B2 (de) 1986-06-28

Family

ID=15879535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16905780A Granted JPS5792838A (en) 1980-12-02 1980-12-02 Cassette to cassette substrate process device

Country Status (1)

Country Link
JP (1) JPS5792838A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015917A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 分子線エピタキシ装置
JPS60117615A (ja) * 1983-11-30 1985-06-25 Hitachi Ltd 分子線エピタキシ装置
DE3427057A1 (de) * 1984-07-23 1986-01-23 Standard Elektrik Lorenz Ag, 7000 Stuttgart Anlage zum herstellen von halbleiter-schichtstrukturen durch epitaktisches wachstum
JPH0612605Y2 (ja) * 1985-01-17 1994-03-30 日新電機株式会社 イオン注入装置用エンドステ−シヨン

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104580A (en) * 1977-02-25 1978-09-11 Ulvac Corp Vacuum continuous treatment apparatus
JPS5526047B2 (de) * 1976-05-06 1980-07-10

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58696Y2 (ja) * 1978-08-07 1983-01-07 株式会社徳田製作所 試料処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526047B2 (de) * 1976-05-06 1980-07-10
JPS53104580A (en) * 1977-02-25 1978-09-11 Ulvac Corp Vacuum continuous treatment apparatus

Also Published As

Publication number Publication date
JPS5792838A (en) 1982-06-09

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