JPS6127898B2 - - Google Patents
Info
- Publication number
- JPS6127898B2 JPS6127898B2 JP49101668A JP10166874A JPS6127898B2 JP S6127898 B2 JPS6127898 B2 JP S6127898B2 JP 49101668 A JP49101668 A JP 49101668A JP 10166874 A JP10166874 A JP 10166874A JP S6127898 B2 JPS6127898 B2 JP S6127898B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- insulating film
- substrate
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 28
- 238000007747 plating Methods 0.000 description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 14
- 239000010931 gold Substances 0.000 description 14
- 229910052737 gold Inorganic materials 0.000 description 14
- 235000012239 silicon dioxide Nutrition 0.000 description 14
- 239000000377 silicon dioxide Substances 0.000 description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- 239000010936 titanium Substances 0.000 description 12
- 229910052719 titanium Inorganic materials 0.000 description 12
- 239000012212 insulator Substances 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 239000004020 conductor Substances 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10166874A JPS5128755A (en) | 1974-09-04 | 1974-09-04 | Handotaisochi no seizohoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10166874A JPS5128755A (en) | 1974-09-04 | 1974-09-04 | Handotaisochi no seizohoho |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18317882A Division JPS5878426A (ja) | 1982-10-18 | 1982-10-18 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5128755A JPS5128755A (en) | 1976-03-11 |
| JPS6127898B2 true JPS6127898B2 (hu) | 1986-06-27 |
Family
ID=14306737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10166874A Granted JPS5128755A (en) | 1974-09-04 | 1974-09-04 | Handotaisochi no seizohoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5128755A (hu) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS587671U (ja) * | 1981-07-07 | 1983-01-18 | 株式会社松井色素化学工業所 | 転写捺染シ−ト |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4910673A (hu) * | 1972-04-05 | 1974-01-30 | ||
| JPS4915103A (hu) * | 1972-06-02 | 1974-02-09 | ||
| JPS4918577A (hu) * | 1972-06-14 | 1974-02-19 | ||
| JPS4933431A (hu) * | 1972-07-26 | 1974-03-27 | ||
| JPS4937578A (hu) * | 1972-08-09 | 1974-04-08 |
-
1974
- 1974-09-04 JP JP10166874A patent/JPS5128755A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4910673A (hu) * | 1972-04-05 | 1974-01-30 | ||
| JPS4915103A (hu) * | 1972-06-02 | 1974-02-09 | ||
| JPS4918577A (hu) * | 1972-06-14 | 1974-02-19 | ||
| JPS4933431A (hu) * | 1972-07-26 | 1974-03-27 | ||
| JPS4937578A (hu) * | 1972-08-09 | 1974-04-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5128755A (en) | 1976-03-11 |
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