JPS6127896B2 - - Google Patents

Info

Publication number
JPS6127896B2
JPS6127896B2 JP54123692A JP12369279A JPS6127896B2 JP S6127896 B2 JPS6127896 B2 JP S6127896B2 JP 54123692 A JP54123692 A JP 54123692A JP 12369279 A JP12369279 A JP 12369279A JP S6127896 B2 JPS6127896 B2 JP S6127896B2
Authority
JP
Japan
Prior art keywords
tube
joint
furnace
core tube
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54123692A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5648130A (en
Inventor
Kazunori Meguro
Masayoshi Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP12369279A priority Critical patent/JPS5648130A/ja
Publication of JPS5648130A publication Critical patent/JPS5648130A/ja
Publication of JPS6127896B2 publication Critical patent/JPS6127896B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0436—

Landscapes

  • Furnace Details (AREA)
JP12369279A 1979-09-26 1979-09-26 Structure of furnace core tube for semiconductor diffusion Granted JPS5648130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12369279A JPS5648130A (en) 1979-09-26 1979-09-26 Structure of furnace core tube for semiconductor diffusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12369279A JPS5648130A (en) 1979-09-26 1979-09-26 Structure of furnace core tube for semiconductor diffusion

Publications (2)

Publication Number Publication Date
JPS5648130A JPS5648130A (en) 1981-05-01
JPS6127896B2 true JPS6127896B2 (OSRAM) 1986-06-27

Family

ID=14866955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12369279A Granted JPS5648130A (en) 1979-09-26 1979-09-26 Structure of furnace core tube for semiconductor diffusion

Country Status (1)

Country Link
JP (1) JPS5648130A (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58418U (ja) * 1981-06-24 1983-01-05 沖電気工業株式会社 半導体熱処理装置
JPS5944821A (ja) * 1982-09-07 1984-03-13 Toshiba Corp 半導体熱処理容器
JPS61152226A (ja) * 1984-12-26 1986-07-10 理研ビタミン株式会社 冷凍生地用品質改良剤
JPS62123066A (ja) * 1985-11-22 1987-06-04 東芝セラミツクス株式会社 熱処理用部材
JPH0311623A (ja) * 1989-06-09 1991-01-18 Toshiba Ceramics Co Ltd 半導体熱処理用炉芯管
JPH0311622A (ja) * 1989-06-09 1991-01-18 Toshiba Ceramics Co Ltd 排気キャップ
JP2764436B2 (ja) * 1989-06-29 1998-06-11 東芝セラミックス株式会社 縦型拡散炉
JPH03241735A (ja) * 1990-02-20 1991-10-28 Toshiba Ceramics Co Ltd 半導体拡散炉用炉芯管
JP2010232637A (ja) * 2009-03-04 2010-10-14 Hitachi Kokusai Electric Inc 基板処理装置及び半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5648130A (en) 1981-05-01

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