JPS612734B2 - - Google Patents

Info

Publication number
JPS612734B2
JPS612734B2 JP5929182A JP5929182A JPS612734B2 JP S612734 B2 JPS612734 B2 JP S612734B2 JP 5929182 A JP5929182 A JP 5929182A JP 5929182 A JP5929182 A JP 5929182A JP S612734 B2 JPS612734 B2 JP S612734B2
Authority
JP
Japan
Prior art keywords
substrate
vapor
furnace
vapor deposition
deposited layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5929182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58177461A (ja
Inventor
Naoyoshi Akyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toho Kinzoku Co Ltd
Original Assignee
Toho Kinzoku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toho Kinzoku Co Ltd filed Critical Toho Kinzoku Co Ltd
Priority to JP5929182A priority Critical patent/JPS58177461A/ja
Publication of JPS58177461A publication Critical patent/JPS58177461A/ja
Publication of JPS612734B2 publication Critical patent/JPS612734B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP5929182A 1982-04-08 1982-04-08 化学蒸着法によるパイプの製法 Granted JPS58177461A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5929182A JPS58177461A (ja) 1982-04-08 1982-04-08 化学蒸着法によるパイプの製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5929182A JPS58177461A (ja) 1982-04-08 1982-04-08 化学蒸着法によるパイプの製法

Publications (2)

Publication Number Publication Date
JPS58177461A JPS58177461A (ja) 1983-10-18
JPS612734B2 true JPS612734B2 (ru) 1986-01-27

Family

ID=13109128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5929182A Granted JPS58177461A (ja) 1982-04-08 1982-04-08 化学蒸着法によるパイプの製法

Country Status (1)

Country Link
JP (1) JPS58177461A (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243179A (ja) * 1985-04-22 1986-10-29 Denki Kagaku Kogyo Kk 金属管内面の被膜形成装置
JPS62124909A (ja) * 1985-11-26 1987-06-06 三井造船株式会社 セラミツクス製管状部材の製造方法

Also Published As

Publication number Publication date
JPS58177461A (ja) 1983-10-18

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