JPS61272542A - クリ−ンル−ム - Google Patents

クリ−ンル−ム

Info

Publication number
JPS61272542A
JPS61272542A JP60115102A JP11510285A JPS61272542A JP S61272542 A JPS61272542 A JP S61272542A JP 60115102 A JP60115102 A JP 60115102A JP 11510285 A JP11510285 A JP 11510285A JP S61272542 A JPS61272542 A JP S61272542A
Authority
JP
Japan
Prior art keywords
exhaust
air
clean
clean area
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60115102A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373785B2 (enrdf_load_stackoverflow
Inventor
Masanobu Saito
正信 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taikisha Ltd
Original Assignee
Taikisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taikisha Ltd filed Critical Taikisha Ltd
Priority to JP60115102A priority Critical patent/JPS61272542A/ja
Publication of JPS61272542A publication Critical patent/JPS61272542A/ja
Publication of JPH0373785B2 publication Critical patent/JPH0373785B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP60115102A 1985-05-28 1985-05-28 クリ−ンル−ム Granted JPS61272542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60115102A JPS61272542A (ja) 1985-05-28 1985-05-28 クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60115102A JPS61272542A (ja) 1985-05-28 1985-05-28 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS61272542A true JPS61272542A (ja) 1986-12-02
JPH0373785B2 JPH0373785B2 (enrdf_load_stackoverflow) 1991-11-22

Family

ID=14654269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60115102A Granted JPS61272542A (ja) 1985-05-28 1985-05-28 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS61272542A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019143933A (ja) * 2018-02-23 2019-08-29 三機工業株式会社 クリーンルーム及びクリーンルームの排気量調整方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019143933A (ja) * 2018-02-23 2019-08-29 三機工業株式会社 クリーンルーム及びクリーンルームの排気量調整方法

Also Published As

Publication number Publication date
JPH0373785B2 (enrdf_load_stackoverflow) 1991-11-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees