JPS61269995A - レ−ザ光線による彫刻方法 - Google Patents
レ−ザ光線による彫刻方法Info
- Publication number
- JPS61269995A JPS61269995A JP60111770A JP11177085A JPS61269995A JP S61269995 A JPS61269995 A JP S61269995A JP 60111770 A JP60111770 A JP 60111770A JP 11177085 A JP11177085 A JP 11177085A JP S61269995 A JPS61269995 A JP S61269995A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- metal layer
- film
- laser
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 25
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 9
- 238000005260 corrosion Methods 0.000 claims abstract description 7
- 230000007797 corrosion Effects 0.000 claims abstract description 7
- 238000001259 photo etching Methods 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000002023 wood Substances 0.000 abstract description 8
- 238000010030 laminating Methods 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000010422 painting Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000839 emulsion Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000251468 Actinopterygii Species 0.000 description 1
- 241000193738 Bacillus anthracis Species 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60111770A JPS61269995A (ja) | 1985-05-23 | 1985-05-23 | レ−ザ光線による彫刻方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60111770A JPS61269995A (ja) | 1985-05-23 | 1985-05-23 | レ−ザ光線による彫刻方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61269995A true JPS61269995A (ja) | 1986-11-29 |
| JPH0448552B2 JPH0448552B2 (enrdf_load_stackoverflow) | 1992-08-07 |
Family
ID=14569729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60111770A Granted JPS61269995A (ja) | 1985-05-23 | 1985-05-23 | レ−ザ光線による彫刻方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61269995A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0648097A (ja) * | 1992-07-29 | 1994-02-22 | Utsudo Retsukusu:Kk | レーザ光線による彫刻方法 |
| JP2008073768A (ja) * | 2006-08-25 | 2008-04-03 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
| US8088268B2 (en) | 2007-12-13 | 2012-01-03 | Hyundai Motor Company | Method of fabricating mask for forming wood grain patterns |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50106701A (enrdf_load_stackoverflow) * | 1972-08-25 | 1975-08-22 | ||
| JPS5279964A (en) * | 1975-12-25 | 1977-07-05 | Citizen Watch Co Ltd | Watch |
| JPS597553A (ja) * | 1982-06-29 | 1984-01-14 | Nippon Seiko Kk | 肉厚均一な楕円輪を研削・成形する方法 |
-
1985
- 1985-05-23 JP JP60111770A patent/JPS61269995A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50106701A (enrdf_load_stackoverflow) * | 1972-08-25 | 1975-08-22 | ||
| JPS5279964A (en) * | 1975-12-25 | 1977-07-05 | Citizen Watch Co Ltd | Watch |
| JPS597553A (ja) * | 1982-06-29 | 1984-01-14 | Nippon Seiko Kk | 肉厚均一な楕円輪を研削・成形する方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0648097A (ja) * | 1992-07-29 | 1994-02-22 | Utsudo Retsukusu:Kk | レーザ光線による彫刻方法 |
| JP2008073768A (ja) * | 2006-08-25 | 2008-04-03 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
| US8088268B2 (en) | 2007-12-13 | 2012-01-03 | Hyundai Motor Company | Method of fabricating mask for forming wood grain patterns |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0448552B2 (enrdf_load_stackoverflow) | 1992-08-07 |
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