JPS61269842A - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS61269842A
JPS61269842A JP60109659A JP10965985A JPS61269842A JP S61269842 A JPS61269842 A JP S61269842A JP 60109659 A JP60109659 A JP 60109659A JP 10965985 A JP10965985 A JP 10965985A JP S61269842 A JPS61269842 A JP S61269842A
Authority
JP
Japan
Prior art keywords
image
energy
electron beam
electron microscope
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60109659A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03738B2 (enrdf_load_stackoverflow
Inventor
Tadanori Yoshioka
吉岡　忠則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60109659A priority Critical patent/JPS61269842A/ja
Publication of JPS61269842A publication Critical patent/JPS61269842A/ja
Publication of JPH03738B2 publication Critical patent/JPH03738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP60109659A 1985-05-22 1985-05-22 電子顕微鏡 Granted JPS61269842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60109659A JPS61269842A (ja) 1985-05-22 1985-05-22 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60109659A JPS61269842A (ja) 1985-05-22 1985-05-22 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS61269842A true JPS61269842A (ja) 1986-11-29
JPH03738B2 JPH03738B2 (enrdf_load_stackoverflow) 1991-01-08

Family

ID=14515897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60109659A Granted JPS61269842A (ja) 1985-05-22 1985-05-22 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS61269842A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH03738B2 (enrdf_load_stackoverflow) 1991-01-08

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