JPH03738B2 - - Google Patents

Info

Publication number
JPH03738B2
JPH03738B2 JP60109659A JP10965985A JPH03738B2 JP H03738 B2 JPH03738 B2 JP H03738B2 JP 60109659 A JP60109659 A JP 60109659A JP 10965985 A JP10965985 A JP 10965985A JP H03738 B2 JPH03738 B2 JP H03738B2
Authority
JP
Japan
Prior art keywords
sample
electron beam
image
energy
imaging lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60109659A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61269842A (ja
Inventor
Tadanori Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60109659A priority Critical patent/JPS61269842A/ja
Publication of JPS61269842A publication Critical patent/JPS61269842A/ja
Publication of JPH03738B2 publication Critical patent/JPH03738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP60109659A 1985-05-22 1985-05-22 電子顕微鏡 Granted JPS61269842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60109659A JPS61269842A (ja) 1985-05-22 1985-05-22 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60109659A JPS61269842A (ja) 1985-05-22 1985-05-22 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS61269842A JPS61269842A (ja) 1986-11-29
JPH03738B2 true JPH03738B2 (enrdf_load_stackoverflow) 1991-01-08

Family

ID=14515897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60109659A Granted JPS61269842A (ja) 1985-05-22 1985-05-22 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS61269842A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61269842A (ja) 1986-11-29

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