JPS6329928B2 - - Google Patents

Info

Publication number
JPS6329928B2
JPS6329928B2 JP56130618A JP13061881A JPS6329928B2 JP S6329928 B2 JPS6329928 B2 JP S6329928B2 JP 56130618 A JP56130618 A JP 56130618A JP 13061881 A JP13061881 A JP 13061881A JP S6329928 B2 JPS6329928 B2 JP S6329928B2
Authority
JP
Japan
Prior art keywords
lens
magnetic pole
objective lens
pole piece
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56130618A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5832348A (ja
Inventor
Takeshi Tomita
Kojin Kondo
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56130618A priority Critical patent/JPS5832348A/ja
Publication of JPS5832348A publication Critical patent/JPS5832348A/ja
Publication of JPS6329928B2 publication Critical patent/JPS6329928B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56130618A 1981-08-20 1981-08-20 透過型電子顕微鏡 Granted JPS5832348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56130618A JPS5832348A (ja) 1981-08-20 1981-08-20 透過型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56130618A JPS5832348A (ja) 1981-08-20 1981-08-20 透過型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5832348A JPS5832348A (ja) 1983-02-25
JPS6329928B2 true JPS6329928B2 (enrdf_load_stackoverflow) 1988-06-15

Family

ID=15038527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130618A Granted JPS5832348A (ja) 1981-08-20 1981-08-20 透過型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5832348A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344533A (ja) * 2005-06-09 2006-12-21 Kawasaki Heavy Ind Ltd Ｘ線用光電変換型イメージング管
JP2013096900A (ja) * 2011-11-02 2013-05-20 Jeol Ltd 透過電子顕微鏡および透過電子顕微鏡像の観察方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5150650A (en) * 1974-10-30 1976-05-04 Hitachi Ltd Denshisensochino hitenshusahoseisochi

Also Published As

Publication number Publication date
JPS5832348A (ja) 1983-02-25

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