JPS6340019B2 - - Google Patents
Info
- Publication number
- JPS6340019B2 JPS6340019B2 JP56130617A JP13061781A JPS6340019B2 JP S6340019 B2 JPS6340019 B2 JP S6340019B2 JP 56130617 A JP56130617 A JP 56130617A JP 13061781 A JP13061781 A JP 13061781A JP S6340019 B2 JPS6340019 B2 JP S6340019B2
- Authority
- JP
- Japan
- Prior art keywords
- analyzer
- electron beam
- power source
- lens
- deflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 79
- 230000005284 excitation Effects 0.000 claims description 26
- 230000005540 biological transmission Effects 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56130617A JPS5832347A (ja) | 1981-08-20 | 1981-08-20 | 透過型電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56130617A JPS5832347A (ja) | 1981-08-20 | 1981-08-20 | 透過型電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5832347A JPS5832347A (ja) | 1983-02-25 |
| JPS6340019B2 true JPS6340019B2 (enrdf_load_stackoverflow) | 1988-08-09 |
Family
ID=15038501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56130617A Granted JPS5832347A (ja) | 1981-08-20 | 1981-08-20 | 透過型電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5832347A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62170142A (ja) * | 1986-01-23 | 1987-07-27 | Jeol Ltd | オメガ型エネルギ−アナライザモ−ドにおける残留磁場打ち消し装置 |
| JP2852713B2 (ja) * | 1992-03-19 | 1999-02-03 | 株式会社日立製作所 | 電子顕微鏡及びその使用方法 |
| JP3139920B2 (ja) * | 1994-07-25 | 2001-03-05 | 株式会社日立製作所 | エネルギフィルタおよびこれを備えた透過電子顕微鏡 |
| JPH10302711A (ja) * | 1997-02-27 | 1998-11-13 | Jeol Ltd | オメガ型エネルギーフィルタ |
| DE19738070A1 (de) * | 1997-09-01 | 1999-03-04 | Leo Elektronenmikroskopie Gmbh | Energiefilter, insbesondere für ein Elektronenmikroskop |
| JP4048925B2 (ja) | 2002-11-18 | 2008-02-20 | 株式会社日立製作所 | 電子顕微鏡 |
-
1981
- 1981-08-20 JP JP56130617A patent/JPS5832347A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5832347A (ja) | 1983-02-25 |
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