JPS61268083A - ジヨセフソン接合装置の製造方法 - Google Patents

ジヨセフソン接合装置の製造方法

Info

Publication number
JPS61268083A
JPS61268083A JP60003362A JP336285A JPS61268083A JP S61268083 A JPS61268083 A JP S61268083A JP 60003362 A JP60003362 A JP 60003362A JP 336285 A JP336285 A JP 336285A JP S61268083 A JPS61268083 A JP S61268083A
Authority
JP
Japan
Prior art keywords
film
resist pattern
section
etching
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60003362A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058596B2 (enExample
Inventor
Yoshinobu Taruya
良信 樽谷
Koji Yamada
宏治 山田
Mikio Hirano
幹夫 平野
Shinichiro Yano
振一郎 矢野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60003362A priority Critical patent/JPS61268083A/ja
Publication of JPS61268083A publication Critical patent/JPS61268083A/ja
Publication of JPH058596B2 publication Critical patent/JPH058596B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60003362A 1985-01-14 1985-01-14 ジヨセフソン接合装置の製造方法 Granted JPS61268083A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60003362A JPS61268083A (ja) 1985-01-14 1985-01-14 ジヨセフソン接合装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60003362A JPS61268083A (ja) 1985-01-14 1985-01-14 ジヨセフソン接合装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61268083A true JPS61268083A (ja) 1986-11-27
JPH058596B2 JPH058596B2 (enExample) 1993-02-02

Family

ID=11555234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60003362A Granted JPS61268083A (ja) 1985-01-14 1985-01-14 ジヨセフソン接合装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61268083A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461178A (ja) * 1990-06-22 1992-02-27 Agency Of Ind Science & Technol ジョセフソン集積回路の作製方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461178A (ja) * 1990-06-22 1992-02-27 Agency Of Ind Science & Technol ジョセフソン集積回路の作製方法

Also Published As

Publication number Publication date
JPH058596B2 (enExample) 1993-02-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term