JPS6126679A - 透明導電性被膜形成液 - Google Patents
透明導電性被膜形成液Info
- Publication number
- JPS6126679A JPS6126679A JP14592684A JP14592684A JPS6126679A JP S6126679 A JPS6126679 A JP S6126679A JP 14592684 A JP14592684 A JP 14592684A JP 14592684 A JP14592684 A JP 14592684A JP S6126679 A JPS6126679 A JP S6126679A
- Authority
- JP
- Japan
- Prior art keywords
- compound
- indium
- organic
- acetope
- forming liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 83
- 239000011248 coating agent Substances 0.000 title abstract description 8
- 238000000576 coating method Methods 0.000 title abstract description 8
- 150000002472 indium compounds Chemical class 0.000 claims abstract description 38
- 239000003960 organic solvent Substances 0.000 claims abstract description 22
- PWEVMPIIOJUPRI-UHFFFAOYSA-N dimethyltin Chemical compound C[Sn]C PWEVMPIIOJUPRI-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 10
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 7
- 229910052738 indium Inorganic materials 0.000 claims abstract description 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 7
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 6
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 6
- 150000003606 tin compounds Chemical class 0.000 claims description 33
- 150000001875 compounds Chemical class 0.000 claims description 28
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 27
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 15
- -1 indium trismethylacetoacetate Chemical compound 0.000 claims description 15
- 150000002902 organometallic compounds Chemical class 0.000 claims description 15
- AYOHIQLKSOJJQH-UHFFFAOYSA-N dibutyltin Chemical compound CCCC[Sn]CCCC AYOHIQLKSOJJQH-UHFFFAOYSA-N 0.000 claims description 14
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 11
- BXVLQFGQYHYURU-UHFFFAOYSA-N diethyltin Chemical compound CC[Sn]CC BXVLQFGQYHYURU-UHFFFAOYSA-N 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 9
- 238000010304 firing Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 5
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N alpha-methyl toluene Natural products CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 claims 1
- BERAKHOYBRJMRI-UHFFFAOYSA-K bis[(4,4-diethyl-3-oxohexanoyl)oxy]indiganyl 4,4-diethyl-3-oxohexanoate Chemical compound C(C)C(C(CC(=O)[O-])=O)(CC)CC.[In+3].C(C)C(C(CC(=O)[O-])=O)(CC)CC.C(C)C(C(CC(=O)[O-])=O)(CC)CC BERAKHOYBRJMRI-UHFFFAOYSA-K 0.000 claims 1
- 150000001336 alkenes Chemical class 0.000 abstract description 4
- 238000007654 immersion Methods 0.000 description 28
- 239000000758 substrate Substances 0.000 description 12
- CUJRVFIICFDLGR-UHFFFAOYSA-N acetylacetonate Chemical compound CC(=O)[CH-]C(C)=O CUJRVFIICFDLGR-UHFFFAOYSA-N 0.000 description 10
- 230000000704 physical effect Effects 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 238000010923 batch production Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012046 mixed solvent Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000000499 gel Substances 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- JJLKTTCRRLHVGL-UHFFFAOYSA-L [acetyloxy(dibutyl)stannyl] acetate Chemical compound CC([O-])=O.CC([O-])=O.CCCC[Sn+2]CCCC JJLKTTCRRLHVGL-UHFFFAOYSA-L 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910017053 inorganic salt Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 210000003454 tympanic membrane Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Paints Or Removers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14592684A JPS6126679A (ja) | 1984-07-16 | 1984-07-16 | 透明導電性被膜形成液 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14592684A JPS6126679A (ja) | 1984-07-16 | 1984-07-16 | 透明導電性被膜形成液 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6126679A true JPS6126679A (ja) | 1986-02-05 |
JPH0233075B2 JPH0233075B2 (enrdf_load_stackoverflow) | 1990-07-25 |
Family
ID=15396270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14592684A Granted JPS6126679A (ja) | 1984-07-16 | 1984-07-16 | 透明導電性被膜形成液 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6126679A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE37183E1 (en) | 1987-12-10 | 2001-05-22 | Hitachi, Ltd. | Image display panel having antistatic film with transparent and electroconductive properties and process for processing same |
US6455101B1 (en) | 1999-07-28 | 2002-09-24 | Anelva Corporation | Method for depositing a protective carbon coating on a data recording disk |
US8753987B2 (en) | 2010-06-08 | 2014-06-17 | Sumitomo Metal Mining Co., Ltd. | Method of manufacturing metal oxide film |
US8963146B2 (en) | 2009-11-05 | 2015-02-24 | Sumitomo Metal Mining Co., Ltd. | Method of manufacturing transparent conductive film, the transparent conductive substrate using the film, as well as device using the substrate |
US10283230B2 (en) | 2012-08-29 | 2019-05-07 | Sumitomo Metal Mining Co., Ltd. | Production method for coating liquid for formation of transparent conductive film |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5889666A (ja) * | 1981-11-25 | 1983-05-28 | Alps Electric Co Ltd | 透明導電性被膜形成用ペ−スト及びその製造方法 |
-
1984
- 1984-07-16 JP JP14592684A patent/JPS6126679A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5889666A (ja) * | 1981-11-25 | 1983-05-28 | Alps Electric Co Ltd | 透明導電性被膜形成用ペ−スト及びその製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE37183E1 (en) | 1987-12-10 | 2001-05-22 | Hitachi, Ltd. | Image display panel having antistatic film with transparent and electroconductive properties and process for processing same |
US6455101B1 (en) | 1999-07-28 | 2002-09-24 | Anelva Corporation | Method for depositing a protective carbon coating on a data recording disk |
US8963146B2 (en) | 2009-11-05 | 2015-02-24 | Sumitomo Metal Mining Co., Ltd. | Method of manufacturing transparent conductive film, the transparent conductive substrate using the film, as well as device using the substrate |
US8753987B2 (en) | 2010-06-08 | 2014-06-17 | Sumitomo Metal Mining Co., Ltd. | Method of manufacturing metal oxide film |
US10283230B2 (en) | 2012-08-29 | 2019-05-07 | Sumitomo Metal Mining Co., Ltd. | Production method for coating liquid for formation of transparent conductive film |
Also Published As
Publication number | Publication date |
---|---|
JPH0233075B2 (enrdf_load_stackoverflow) | 1990-07-25 |
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