JPS6126679A - Liquid forming electrically conductive transparent coating film - Google Patents

Liquid forming electrically conductive transparent coating film

Info

Publication number
JPS6126679A
JPS6126679A JP14592684A JP14592684A JPS6126679A JP S6126679 A JPS6126679 A JP S6126679A JP 14592684 A JP14592684 A JP 14592684A JP 14592684 A JP14592684 A JP 14592684A JP S6126679 A JPS6126679 A JP S6126679A
Authority
JP
Japan
Prior art keywords
compound
indium
organic
acetope
forming liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14592684A
Other languages
Japanese (ja)
Other versions
JPH0233075B2 (en
Inventor
Tsunemitsu Torigoe
恒光 鳥越
Mitsuru Kano
満 鹿野
Yoshinori Kato
加藤 義徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP14592684A priority Critical patent/JPS6126679A/en
Publication of JPS6126679A publication Critical patent/JPS6126679A/en
Publication of JPH0233075B2 publication Critical patent/JPH0233075B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To provide the titled film-forming liquid containing a specific organic indium compound forming an electrically conductive transparent metal oxide by baking, an electrical resistance controlling agent and an organic solvent, and giving a coating film having long life, high mass-productivity excellent conductivity, transparency, etc. CONSTITUTION:The objective film-forming liquid contains (A) an organic indium compound capable of forming an electrically conductive transparent metal oxide by baking and represented by the formula I [X is alkyl of formula CnH2n+1 (n is 1-4), alkene of formula CnH2n (n is 3-5) or alkoxy of formula OCnH2n+1 (n is 1-4)] (e.g. trismethylacetate indium), (B) an electrical resistance controlling agent of preferably the formula II (X is beta-diketone; Y is alkyl) (e.g. dimethyltin acetope) and (C) an organic solvent dissolving the components A and B.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、浸漬法に適した透明導電性被膜形成液に係り
、特に焼成によって透明導電性金属酸化物となる有機金
属化合物を含む透明導電性被膜形成液に関する。
Detailed Description of the Invention [Field of Application of the Invention] The present invention relates to a transparent conductive film forming solution suitable for a dipping method, and particularly to a transparent conductive film forming solution containing an organometallic compound that becomes a transparent conductive metal oxide upon firing. Regarding film forming liquid.

ガラス、セラ之ツク等の絶縁基板上に形成した、In 
、 Sn、 Sb 、 ca等の酸化物被膜は、光透過
率が高く良好な導電性を示すことはよく知られており、
半導体素子、液晶表示装置等に使用したり、或は電子写
真用紀録媒体などの光と電場が関与する電子機能デバイ
スの構成要素の1つとして、この他太陽電池や撮像管な
どの光電変換素子また透明面発熱体(デフロスタ−)や
透明断熱体、抵抗体や赤外線反射体などの機能膜として
利用されてきている。
In is formed on an insulating substrate such as glass or ceramics.
It is well known that oxide films such as , Sn, Sb, and ca have high light transmittance and good conductivity.
Used in semiconductor devices, liquid crystal display devices, etc., or as one of the components of electronic functional devices that involve light and electric fields, such as electrophotographic recording media, as well as photoelectric conversion elements such as solar cells and image pickup tubes. It has also been used as a functional film for transparent heat generating elements (defroster), transparent heat insulators, resistors, infrared reflectors, etc.

この金玩酸化物透明導電膜の形成法としては化学スプレ
ー法、真空蒸着法、スパッタリング法、スクリーン印刷
法がある。化学スプレー法は比較的面積の大きな被膜を
得るには有利であるが、装置が大損りで、また特性の制
御が困難である。真空蒸着法は最近マスク蒸着法が発達
し、エツチング処理の必要はなくなったが、処理がバッ
チ式であるために量産性の点で問題がある。スパッタリ
ング法も真空蒸着法と同様処理がバッチ式であるために
量産性の点で問題がある。スパッタリング法も真空蒸着
法と同様処理がバッチ式であるから、大面積のものを得
るには不適当である。スクリーン印刷法は印刷時の作業
性が悪く、特に微細なパターンを安定に印刷しに〈<、
また形成された被膜の導電性の良否にもバラツキが大き
いという欠点があった。
Methods for forming this metal oxide transparent conductive film include a chemical spray method, a vacuum evaporation method, a sputtering method, and a screen printing method. Although the chemical spray method is advantageous in obtaining a film with a relatively large area, it requires a large amount of equipment and is difficult to control properties. Recently, the vacuum evaporation method has developed into a mask evaporation method, which eliminates the need for etching, but since the process is a batch process, there is a problem in terms of mass production. Like the vacuum evaporation method, the sputtering method also has problems in terms of mass production because the processing is a batch process. Like the vacuum evaporation method, the sputtering method is also a batch process, and is therefore unsuitable for obtaining large-area products. The screen printing method has poor workability during printing, and is particularly difficult to print fine patterns stably.
Further, there was a drawback that the conductivity of the formed film varied widely.

これらの欠点を解消するものとして、近年浸漬法が注目
されている。この方法では、(イ)基材上への有機金属
化合物溶液の塗布、(ロ)乾燥、(ハ)焼成、に)エツ
チングの簡単な工程で、基材上に任意の形状の被膜を形
成することが可能であり、しかも設備も大損りのものを
必要とせず、また多電生産も容易である。
In recent years, the immersion method has attracted attention as a solution to these drawbacks. This method forms a film of any shape on a substrate through the simple steps of (a) applying an organometallic compound solution onto the substrate, (b) drying, (c) baking, and (d) etching. Moreover, it does not require expensive equipment, and it is easy to produce a large amount of electricity.

この浸漬法の原料としては、色々のものが検討されてき
ているが、種々の問題があり、実用化されていなイ。す
なわちIn0d、 、 InNOs 、 Snug、 
Various materials have been studied as raw materials for this dipping method, but they have not been put to practical use due to various problems. That is, In0d, , InNOs, Snug,
.

5107?*−等の無機塩の有機溶剤分散液を使用した
場合は、形成された膜が白濁化しており、膜の機械的強
度が弱く、傷がつぎやすい等の欠点がある。
5107? When an organic solvent dispersion of an inorganic salt such as *- is used, there are drawbacks such as the formed film becomes cloudy, has low mechanical strength, and is easily scratched.

一方、オクチル畝インジウム、あるいはインジウムトリ
プトキサイドl:IH(004H・)、〕などのアルコ
キシ置換の有機インジウム化合物を主体とし、これに電
気抵抗値調整剤としてテトラブトキシスズCSn (O
OaHo)、)  などのアルコキシ置換の有機スズ化
合物を添加したものが透明導電性被膜形成液として用い
られていた。ところがこれらの有機金属化合物は加水分
′解し易いから浸漬液の安定性に欠け、液の寿命が短か
いため被膜形成時の作業性に問題がある。また絶縁基板
に塗布した時に加水分解を起こして被膜が白濁化するこ
と、及び透明の被膜が搏られても面積抵抗値や機械的強
度等の物理的性質が不十力である。また加水分解し易い
ため、形成された透明導電性被膜の膜特性がばらつき易
く、品質の安定した゛導電性被膜が得られない。
On the other hand, it is mainly composed of alkoxy-substituted organic indium compounds such as octyl ribbed indium or indium triptoxide l:IH (004H), and tetrabutoxytin CSn (O
A solution containing an alkoxy-substituted organic tin compound such as OaHo), ) has been used as a transparent conductive film forming solution. However, since these organometallic compounds are easily hydrolyzed, the immersion liquid lacks stability, and the life of the liquid is short, causing problems in workability during film formation. Further, when applied to an insulating substrate, hydrolysis occurs and the coating becomes cloudy, and even if the transparent coating is rubbed, physical properties such as sheet resistance and mechanical strength are insufficient. Furthermore, since it is easily hydrolyzed, the film properties of the formed transparent conductive film tend to vary, making it impossible to obtain a conductive film of stable quality.

〔発明の目的〕[Purpose of the invention]

本発明はこの目的とするところは、前述した従来技術の
欠点な解消し、浸漬液の寿命が長く、量産性に優れ、し
かも低抵抗で透明度および蕾着強度の高い透明導電性被
膜が得られる透明導電性被膜形成液を提供することを目
的とする0〔発明の概要〕 この目的を達成するため11本発明は、焼成によって透
明導電性金属酸化物となる有機金錫化合物と、電気抵抗
値Il整剤と、これら有機金属化合物および電気抵抗値
調整剤を溶解する有機溶媒とを含有する透明導電性被膜
形成液において、前記有機金属化合物が、rlに素の直
接配位した下記の一般構造式な有する有機インジウム化
合物であることを特徴とする。
The purpose of the present invention is to overcome the above-mentioned drawbacks of the prior art, to provide a transparent conductive coating that has a long immersion liquid life, is excellent in mass production, and has low resistance, high transparency, and high adhesion strength. [Summary of the Invention] In order to achieve this object, the present invention provides an organic gold-tin compound that becomes a transparent conductive metal oxide by firing, and an electrical resistance value. In a transparent conductive film forming liquid containing an Il adjustment agent and an organic solvent that dissolves these organometallic compounds and an electrical resistance value adjusting agent, the organometallic compound has the following general structure in which the element is directly coordinated to rl. It is characterized by being an organic indium compound having the formula.

一般式 但し、式中のXは一般式0HH2n4.1 (n −1
〜4 )で表わされるアルキル基、あるいはOnHgn
 (n −3〜5)で表わされるアンクン類、又は00
nH2n+1(n−1〜4)で表わされるアルコキシ基
である。
General formula However, X in the formula is general formula 0HH2n4.1 (n -1
-4) or an alkyl group represented by OnHgn
(n-3 to 5), or 00
It is an alkoxy group represented by nH2n+1 (n-1 to 4).

この一般式で示されるアセト酢酸エステルインジウム化
合物としては、例えばトリスイソブチルアセトアセテー
トインジウム(2) などがある。
Examples of the indium acetoacetate compound represented by this general formula include indium trisisobutylacetoacetate (2).

また、本発明で用いられる電気抵抗値調整剤としては、
次の一般式で示される有機スズ化合物が好適である。
In addition, the electrical resistance value adjusting agent used in the present invention includes:
Organotin compounds represented by the following general formula are preferred.

一般式 %式%() 但し、式中のXはβ−ジー?)ン類、Yは一般式cnl
(2n+1  (但しn −1〜s ) テab サh
;6゜この一般式で示される有機スズ化合物としては、
例えばアセチルアセトンとブタンが結合したジブチルス
ズアセトープO(04H@)2 Sn (αcac)*
 、ジメチルスズアセトープ(OHM )tsn (α
cac)、 、  ジエチルスズアセトープ(C!H1
) * Sn (αcac )などが用いられる。
General formula % formula % () However, is X in the formula β-G? ), Y is the general formula cnl
(2n+1 (however, n -1~s) Te ab Sah
;6゜As the organic tin compound represented by this general formula,
For example, dibutyltin acetope O(04H@)2 Sn (αcac)*, which is a combination of acetylacetone and butane.
, dimethyltin acetope (OHM) tsn (α
cac), , diethyltin acetope (C!H1
) * Sn (αcac) etc. are used.

前述の有機インジウム化合物ならびに電気抵抗値調整剤
を溶解する有機溶剤としては、焼成の前の乾燥工程での
揮発の容易さ、溶液の安定性、経済性等から低沸点の有
機溶剤、例えはメタノール、エタノールなどの低級アル
コール類、酢酸エチルや酢酸プ四ビルなどのエステル類
、アセトンやメチルケトンなどのケトン類、ベンゼンや
ヘキサンなどの炭化水素化合物などが好適である。
As the organic solvent for dissolving the above-mentioned organic indium compound and electrical resistance value adjusting agent, organic solvents with a low boiling point, such as methanol, are recommended due to their ease of volatilization in the drying process before firing, stability of the solution, economic efficiency, etc. , lower alcohols such as ethanol, esters such as ethyl acetate and tetravir acetate, ketones such as acetone and methyl ketone, and hydrocarbon compounds such as benzene and hexane.

次に本発明の形成液を使用して透明導電膜を基材上に形
成する方法について説明する。基材としてはガラス、セ
ラミック等の板状またはその他の形状のものが用途に応
じて選ばれる。また、所望する膜厚に応じて形成液の濃
度や引き上げ速度を調整する。このようにして、基材上
に形成液を塗布した後、乾燥される。乾燥条件としては
140℃で10分間放置すれば溶剤は充分に蒸発し、基
板上に透明な膜が生成する。次に空気中において500
℃で30分間焼成する。この処理により有機物は完全に
分解し、基板上に透明な導電膜が形成される0この1回
の処理で膜厚等が不十分な場合は同様な処理を繰り返し
行ない、所望の膜厚を有する機械的強度の優れた透明導
電性膜を得ることができる。以下実施例に従って更に詳
細に述べる。
Next, a method for forming a transparent conductive film on a substrate using the forming liquid of the present invention will be described. As the base material, a plate-like material such as glass or ceramic or a material in other shapes is selected depending on the purpose. Further, the concentration of the forming liquid and the pulling speed are adjusted depending on the desired film thickness. After the forming liquid is applied onto the base material in this manner, it is dried. As for drying conditions, if the film is left at 140° C. for 10 minutes, the solvent will sufficiently evaporate and a transparent film will be formed on the substrate. Then 500 in the air
Bake for 30 minutes at ℃. This treatment completely decomposes the organic matter and forms a transparent conductive film on the substrate. If the film thickness is insufficient with this one treatment, repeat the same treatment to achieve the desired film thickness. A transparent conductive film with excellent mechanical strength can be obtained. The following will be described in more detail according to examples.

〔発明の実施例〕[Embodiments of the invention]

実施例1 インジウム化合物に於いて(Xが一般式c’n)Izn
+1(n−1〜4)で表わされるアルキル基)、これら
の化合物が可溶な有機溶剤を見い出すべく検討を重ねた
Example 1 In an indium compound (X is the general formula c'n) Izn
+1 (alkyl group represented by n-1 to 4)), and repeated studies were conducted to find an organic solvent in which these compounds are soluble.

式中のnが1〜4のそれぞれの化合物に対する結果をそ
れに応じて第1表から第4表に示す。なお表中の溶液安
定性及び溶液透明度については、浸漬液調整後1ケ月間
沈澱、にこり及び浸漬液の液面に浮遊物質等の異物が全
くなく、調整直後の状態がそのまま保持されていると判
断したものは◎印、上述の化学的性質に変化があったも
のは○印、調整直後と較べて著しく浸漬液の劣化が進ん
でいると判断したものはX印で示す。浸漬時の成膜性に
ついては◎印は優秀、○印は良好、X印は悪いと判断し
たものである。
The results for each compound in which n is 1 to 4 are shown in Tables 1 to 4 accordingly. Regarding the solution stability and solution transparency in the table, it is assumed that there is no sediment, dirt, or foreign matter such as floating substances on the surface of the immersion solution for one month after the immersion solution is adjusted, and the condition immediately after adjustment is maintained. Those judged to be immersed in water are marked with ◎, those where the above-mentioned chemical properties have changed are marked with ○, and those where it is judged that the immersion liquid has deteriorated significantly compared to immediately after adjustment are marked with X. Regarding film formation properties during immersion, ◎ marks are judged to be excellent, ○ marks are judged to be good, and X marks are judged to be poor.

l5 これらの表から明らかな様に有機溶剤としてはメチルエ
チルケトン、酢酸エチルあるいはこの2種の混合溶剤が
好ましい。これらの有機溶剤を用いた浸漬液は1ケ月以
上の長期にわたり化学的に安定しており、液の劣化の無
い浸漬液を得ることができた。
15 As is clear from these tables, the organic solvent is preferably methyl ethyl ketone, ethyl acetate, or a mixed solvent of the two. The immersion liquid using these organic solvents was chemically stable for a long period of one month or more, and it was possible to obtain an immersion liquid without deterioration of the liquid.

これに対してメタノール、エタノールのアルコール類や
エーテルを有機溶剤として用いた浸漬液は調整後2〜3
日で沈澱が発生し、液表面に結晶性の浮遊物が生じ、そ
の結果として浸漬液が白濁化してしまい、透明度が著し
く低下した。またnの増加に伴い各種有機溶剤に対する
溶解度も増加したがn−3の場合とn−4の場合では化
合物としての化学的特性は同等であった。
On the other hand, immersion liquids using alcohols such as methanol or ethanol or ether as organic solvents are
Sedimentation occurred over time, and crystalline floating substances were formed on the liquid surface, resulting in the immersion liquid becoming cloudy and significantly reducing its transparency. Further, as n increased, solubility in various organic solvents also increased, but the chemical properties of the compounds were the same in the cases of n-3 and n-4.

わされる有機インジウム化合物に於いて(Xが一般式0
nH2n (n −3〜5)で表わされろアルケン類)
、これらの化合物が可溶な有機溶剤を見い出すべく検討
を重ねた。nが3〜5のそれぞれの化合物に対する結果
をそれに応じて第5表から第7表に示す。なお表中の各
性質の判断基準は実施例1に準じた。
In the organic indium compound to be used (X has the general formula 0
nH2n (alkenes represented by n -3 to 5))
We conducted repeated studies to find organic solvents in which these compounds are soluble. The results for the respective compounds with n from 3 to 5 are shown accordingly in Tables 5 to 7. Note that the criteria for determining each property in the table were based on Example 1.

以上の表より明らかな様にn−5の場合に有機溶剤に対
する溶解性その他の化学的特性の優れた溶液を提供する
ことができる。一方n−3、及び4の場合には溶解性そ
の他の化学的特性は実施例1の有機インジウム化合物と
較べて劣っていることが判明した。
As is clear from the above table, in the case of n-5, a solution with excellent solubility in organic solvents and other chemical properties can be provided. On the other hand, in the case of n-3 and n-4, it was found that the solubility and other chemical properties were inferior to those of the organic indium compound of Example 1.

表わされる有機インジウム化合物に於いて(Xが一般弐
〇〇nHgn+1(n −1〜4 )で表わされるアル
コキシ基)、これらの化合物が可溶な有機溶剤を見い出
すべく検討を重ねた。nが1〜4のそれぞれの化合物に
対する結果をそれに応じて第8表から第11表に示す。
Regarding the organic indium compounds represented by the formula (X is an alkoxy group generally represented by 2〇〇nHgn+1 (n-1 to 4)), repeated studies were conducted to find an organic solvent in which these compounds can be dissolved. The results for the respective compounds with n from 1 to 4 are shown accordingly in Tables 8 to 11.

なお表中の各性質の判断基準は実施例1に準じた。Note that the criteria for determining each property in the table were based on Example 1.

これらの表から明らかな様に有機溶剤としては、メチル
エチルケトン、酢酸エチル、この2種の混合溶剤、およ
びベンゼンが好ましい。nが1及び2の有機インジウム
化合物を用いた浸漬液は1り月以上の長期にわたり化学
的に安定しており、液の劣化の無い浸漬液を得ることが
できた。メタノール、エタノールのアルコール類ヤエー
テルナ有機溶剤として用いた浸漬液は調整後2〜3日で
沈澱が発生し、液表面に結晶性の浮遊物が生じその結果
とし【溶液が白濁化してしまい、透明度が著しく低下す
る。nが3及び4の有機インジウム化合物を用いた浸漬
液は加水分解が激しく、溶液調整後、数時間で沈澱が発
生し、白濁化してしまい、透明度は著しく低下し浸漬液
としては使用不能である事が判明した。
As is clear from these tables, methyl ethyl ketone, ethyl acetate, a mixed solvent of the two, and benzene are preferred as the organic solvent. The immersion liquid using organic indium compounds with n of 1 and 2 was chemically stable for a long period of one month or more, and it was possible to obtain an immersion liquid without deterioration of the liquid. The immersion liquid used as an alcoholic solvent such as methanol or ethanol will precipitate within 2 to 3 days after adjustment, and crystalline suspended matter will form on the surface of the liquid. Significantly decreased. Immersion solutions using organic indium compounds with n of 3 and 4 undergo severe hydrolysis, and precipitates occur within a few hours after the solution is prepared, turning cloudy, resulting in a significant decrease in transparency and making it unusable as an immersion solution. The thing has become clear.

実施例4 実施例1から3までの結果から有機インジウム化合物が
可溶な有機溶剤としてメチルエチルケトン、酢酸エチル
、前記2種の混合溶剤およびベンゼンが好ましい事が判
明したが、メチルエチルケトンを使用して電気抵抗値調
整用有機スズ化合物について検討を行った。
Example 4 From the results of Examples 1 to 3, it was found that methyl ethyl ketone, ethyl acetate, a mixed solvent of the above two types, and benzene were preferable as organic solvents in which the organic indium compound was soluble. We investigated organic tin compounds for value adjustment.

まず、有機インジウム化合物として、一般式OnHla
n+1で表わされるアルキル基においてn −3、及び
n−4)の2種を用い、更に電気抵抗値調整用有機スズ
化合物としてジブチルススアセドープ(a、n、)、 
sn (acac )1  を、そして有機溶剤として
メチルエチルケトンをそれぞれ用い、下記組成比の浸漬
液な2種類作成した。
First, as an organic indium compound, the general formula OnHla
In the alkyl group represented by n+1, two types of n-3 and n-4) were used, and dibutylsucedope (a, n,) was used as an organic tin compound for adjusting the electrical resistance value.
Two types of immersion liquids were prepared using sn (acac)1 and methyl ethyl ketone as an organic solvent, each having the following composition ratio.

(溶剤) メチルエチルケトン 100−y重量優この浸漬液をA
液とする。
(Solvent) Methyl ethyl ketone 100-y weight
Make it into a liquid.

(有機金属) (溶剤) メチルエチルケトン  100−y  重置チこの浸漬
液をB液とする。
(Organic metal) (Solvent) Methyl ethyl ketone 100-y The immersion liquid of the overlying silicone is referred to as B liquid.

但し、組成中のXは有機インジウム化合物と有機スズ化
合物の混合物中における有機スズ化合物の含有率、yは
浸漬液中における有機スズ化合物(有機インジウム化合
物+有機スズ化合物)の含有率である。
However, in the composition, X is the content of the organic tin compound in the mixture of the organic indium compound and the organic tin compound, and y is the content of the organic tin compound (organic indium compound + organic tin compound) in the immersion liquid.

A液とB液に於いて有機金属化合物の含有率yを10重
量%に規定して、有機金属化合物中における有機スズ化
合物の含有率Xを種★かえた被膜形tiを作成シて〜こ
の液中に幅が50a+X25關、厚さが1rNRのソー
ダガラス基板を浸漬した。
The content y of the organometallic compound in the A and B solutions was defined as 10% by weight, and the film type ti was created by changing the content X of the organotin compound in the organometallic compound. A soda glass substrate having a width of 50 mm x 25 mm and a thickness of 1 rNR was immersed in the solution.

20cflK/分の引上げ速度で基板を溶液から引き上
げ、140℃10分間予備乾燥を行った。次いでベルト
炉中で500℃、30分間焼成して、ガラス基板上に透
明導電性被膜を得た。
The substrate was pulled out of the solution at a pulling rate of 20 cflK/min and pre-dried at 140°C for 10 minutes. Next, it was baked in a belt furnace at 500° C. for 30 minutes to obtain a transparent conductive film on the glass substrate.

この被膜の表面抵抗、膜厚、光透過度及び膜強度等の被
膜物性を測定した。表面抵抗と有機スズ化合物の含有率
Xとの関係を第1図に示す。図中の点IAは浸漬液A液
を、実WBは浸漬液B液のものをそれぞれ示す。またA
液についての上記の被膜物性を第12表に、B液につい
ての被膜物性を第13表にそれぞれ示す。透過率は55
0nmの可視光線透過度である。
The physical properties of this film, such as surface resistance, film thickness, light transmittance, and film strength, were measured. The relationship between the surface resistance and the content X of the organic tin compound is shown in FIG. Point IA in the figure indicates immersion liquid A, and point WB indicates immersion liquid B. Also A
Table 12 shows the above-mentioned film properties for the liquid, and Table 13 shows the film properties for the B liquid. Transmittance is 55
The visible light transmittance is 0 nm.

第12表 第13表 これらの表および図から明らかな様に、いずれの浸漬液
の場合にも有機スズ化合物の添加量xは全有機金属量に
対して10〜15重偵−の範囲のものが好ましい。その
うちで1285重鯖:%のちのは低い面積抵抗値を有す
る導電性被膜が得られる。
Table 12 Table 13 As is clear from these tables and figures, in all immersion liquids, the amount x of the organotin compound added is in the range of 10 to 15 times the total amount of organometallics. is preferred. Among them, a conductive film having a low sheet resistance value of 1285:% can be obtained.

しかし光透過度はいずれの場合も低いと゛いう事が判明
した。
However, it was found that the light transmittance was low in all cases.

実施例5 前記実施例4のジブチルスズアセトープの代りにジメチ
ルスズアセトープ(OHa)t 5n(acac)、を
用いて実施例4と同様の組成比を有する被膜形成液を作
る。
Example 5 A film forming solution having the same composition ratio as in Example 4 was prepared using dimethyltin acetope (OHa)t 5n (acac) instead of dibutyltin acetope in Example 4.

実施例6 @紀実施例4のジブチルスズアセトープの代りにジエチ
ルスズアセトープ(OxHs)t Sn (acac 
’) tを用いて実施例4と同様の組成比を有する破膜
形成液を作る。
Example 6 Diethyltin acetope (OxHs) t Sn (acac
') A membrane rupture-forming solution having the same composition ratio as in Example 4 is prepared using t.

実施例5および実施例6の破膜形成液も、有機スズ化合
□物と面積抵抗値の特性それとwBk物性も実施例4の
結果とほぼ同様の傾向を示すことが実験でr4詔された
It was experimentally determined that the membrane rupture forming solutions of Examples 5 and 6 exhibited almost the same tendency as the results of Example 4 in terms of organotin compounds, area resistance values, and wBk physical properties.

実施例7 ンジウム化合物としてXが一般式an)(anで表わさ
れるアルケン類でn−5の化合物を用い、更に電気抵抗
値調整用有機スズ化合物としてジブチルススアセドープ
を、そして有!lie剤としてメチルエチルクトンをそ
れぞれ用い実施例4と同じ組成比の浸漬液を作成した。
Example 7 A compound in which X is an alkene represented by the general formula an) (an) was used as a tin compound, dibutylsucedope was used as an organic tin compound for adjusting the electric resistance value, and as a !lie agent. An immersion liquid having the same composition ratio as in Example 4 was prepared using methyl ethyl lactone.

この浸漬液を用いてガラス基板上に透明導電性鼓膜を形
成し、物性を第14表に示した。また、面積抵抗値と有
機スズ化合物の含有率Xとの関係を第2図に示した。
A transparent conductive eardrum was formed on a glass substrate using this immersion liquid, and the physical properties are shown in Table 14. Moreover, the relationship between the sheet resistance value and the content X of the organic tin compound is shown in FIG.

第14表 これらの表から明らかな様に、有機・スズ化合物の添加
量Xは全有機金属量に対して10〜15重量優の範囲の
ものが好ましい。そのうちで12.5重量−のものは低
い面積抵抗値を有する導電性被膜が得られる。
Table 14 As is clear from these tables, the amount X of the organic tin compound added is preferably in the range of 10 to 15% by weight based on the total amount of organic metals. Among them, those having a weight of 12.5% can provide a conductive film having a low sheet resistance value.

実施例8 前記実施例7のジブチルスズアセトープの代りにジメチ
ルスズアセトープ(OH3)x SH((Lcac)、
を用いて実施例4と同様の組成比な有する被膜形成液を
作る。
Example 8 Dimethyltin acetope (OH3) x SH ((Lcac),
A film forming solution having the same composition ratio as in Example 4 was prepared using the following.

実施例9 前記実施例7のジブチルスズアセトープの代りにジエチ
ルスズアセトープ(01H*)z SH((LC(LC
)!を用いて実施例4と同様の組成比を有する被膜形成
液を作る。
Example 9 Diethyltin acetope (01H*)z SH((LC(LC
)! A film forming solution having the same composition ratio as in Example 4 was prepared using the following.

実施例8および実施例9の被膜形成液も有機スス化合物
と面積抵抗値の特性それと被膜物性も実施例7の結果と
ほぼ同様の傾向な示すことが実験で確認されている。
It has been experimentally confirmed that the film-forming solutions of Examples 8 and 9 exhibit almost the same tendency as the results of Example 7 in the characteristics of the organic soot compound and the sheet resistance value, as well as the physical properties of the films.

ンジウム化合物として×が一般式0(3HHan+1で
表、わされるアルコキシ基でn−1およびn−2をそれ
ぞれ用い、更に電気抵抗値調整用有機スズ化合物として
ジブチルスズアセトープ、(04Ho ) ! SH(
acac) !そして有機溶剤としてメチルエチルケト
ンを用い実施例4と同じ組成比の浸漬液を2種類作成し
た。
As an indium compound, x is an alkoxy group represented by the general formula 0 (3HHan+1, and n-1 and n-2 are respectively used, and as an organic tin compound for adjusting the electric resistance value, dibutyltin acetope, (04Ho)!SH(
acac)! Two types of immersion liquids having the same composition ratio as in Example 4 were prepared using methyl ethyl ketone as an organic solvent.

n−1の場合で示される有機インジウム化合物を使用し
た形成液をO液、n−2の有機インジウム化合物を使用
した形成液をD液とする。この2種類の浸漬液を用いて
ガラス基板上に透明導電性被膜を得て、この被膜の物性
を測定した。C液に対する被膜物性を第15表に、D液
に対する被膜物性を第16表に示す。形成された導電性
被膜の面積抵抗値と有機スズ化合物の含有率Xとの関係
な第3図に示す。図中点線Cは被膜形成液C液のもの、
実11Dは被膜形成液り液のものである。
The forming liquid using the organic indium compound shown in the case of n-1 is called O solution, and the forming liquid using the organic indium compound of n-2 is called D solution. A transparent conductive film was obtained on a glass substrate using these two types of immersion liquid, and the physical properties of this film were measured. The physical properties of the coating for liquid C are shown in Table 15, and the physical properties of the coating for liquid D are shown in Table 16. FIG. 3 shows the relationship between the sheet resistance value of the formed conductive film and the content X of the organic tin compound. Dotted line C in the figure is for film forming liquid C;
Sample 11D is a film-forming liquid.

第15表 第16表 これらの表から明らかな様に、有機スズ化合物の添加量
Xは全有機金属量に対して10〜15重量−の範囲のも
のが好ましい。そのうちで12..5重量−のものは低
い面積抵抗値を有する導電性被膜が得られる。
Table 15 Table 16 As is clear from these tables, the amount X of the organic tin compound added is preferably in the range of 10 to 15 weight based on the total amount of organic metal. 12 of them. .. 5% by weight, a conductive film having a low sheet resistance value can be obtained.

実施例11 前記実施例10のジブチルスズアセトープの代りにジメ
チルススアセドープ(OHI)15n(acac)。
Example 11 Dimethyltin acetope (OHI) 15n (acac) was used instead of dibutyltin acetope in Example 10.

を用いて実施例4と同様の組成比を有する被膜形成液を
作る。
A film forming solution having the same composition ratio as in Example 4 was prepared using the following.

実施例12 前記実施例10のジブチルススアセドープの代りにジエ
チルスズアセトープ(0xHs)*Sn (acac)
Example 12 Diethyltin acetope (0xHs)*Sn (acac) was used instead of dibutyltin acetope in Example 10.
.

を用いて実施例4と同様の組成比を有する被膜形成液な
作る。 。
A film forming solution having the same composition ratio as in Example 4 was prepared using the following. .

実施例11お−よび実施例12の被膜形成液も有機スズ
化合、物と面積抵抗値の特性ならびに被膜物性も実施例
1Oの結果とほぼ同様の傾向を示すことが実験で確認さ
れている。
It has been experimentally confirmed that the film-forming liquids of Examples 11 and 12 exhibit almost the same tendency as the results of Example 1O in terms of organotin compounds, physical properties, sheet resistance values, and film physical properties.

実施例j3  、  、y 実施例4から実施例、12までの結果により一1有機金
属化合物中における。有機スズ化合物の含有率Xは12
5重量−が最適である事が、判明したので、次に有機金
属化合物の適正含有率について検討した。この検討を行
うために7下ε組成の形成液を作成した。
Example j3, , y According to the results of Examples 4 to 12, in organometallic compounds. The content X of organotin compounds is 12
Since it was found that 5% by weight was optimal, the appropriate content of the organometallic compound was next investigated. In order to conduct this study, a forming solution with a composition of 7 or less ε was prepared.

但しXは一般式cn)Ign+lノで示されるアルキル
基でn−3及び4 ((04Ho)tSn(cLcac)1]  o、12
5y重蓋優(溶媒) メチルエチルケトン  100−y点景チ但しyは全有
機金属含有率である。
However, X is an alkyl group represented by the general formula cn)Ign+l, n-3 and 4 ((04Ho)tSn(cLcac)1] o, 12
5y Heavy Lid Yu (solvent) Methyl ethyl ketone 100-y Encyclopedia CH However, y is the total organometallic content.

この組成において、有機金属化合物の含有率yを次の表
に示すように種々変えて被膜形成液をつくり、この形成
液の安定性、浸漬時の成膜性、焼成後の膜面状態、面積
抵抗値Rs 、光透過率、膜強度ならびに膜厚をそれぞ
れ検討した結果を第17表に示す。同表はn−3の化合
物を使用した被膜形成液の緒特性である。
With this composition, a film forming solution was prepared by varying the content y of the organometallic compound as shown in the table below. Table 17 shows the results of examining the resistance value Rs, light transmittance, film strength, and film thickness. The same table shows the characteristics of the film forming solution using compound n-3.

なお形成液の安定性においては、15日以上使用可能な
ものに○印、1日以上14日以内使用可能なものにΔ印
、それ以下のものにX印を付した。
Regarding the stability of the forming solution, those that can be used for 15 days or more are marked with a circle, those that can be used for 1 to 14 days are marked with a Δ, and those that are less than that are marked with an X.

浸漬時の成膜性については、浸漬後の白濁、膜厚むらの
顕著なものにX印、やや顕著なものにΔ印、特に問題の
ないものに○印を付した。さらに焼成後の膜面状態につ
いては、クラック、白濁の顕著なものにX印、やや顕著
なものにΔ印、特に問題のないものにO印を付した。
Regarding the film formability during immersion, those with noticeable white cloudiness and unevenness in film thickness after immersion were marked with an X mark, those with a slightly noticeable difference were marked with a Δ, and those with no particular problems were marked with an ○ mark. Furthermore, regarding the film surface condition after firing, those with noticeable cracks and cloudiness were marked with an X mark, those with somewhat noticeable cracks were marked with a Δ mark, and those with no particular problems were marked with an O mark.

第17表 この表から明らかな様に、全有機金に含有蚤iyが10
〜30重量%、好ましくは15〜20重量%のものは、
優れた諸種の特性を有している。また35重凰チではク
ラック、ひび割れ等が発生した。n−4の有機インジウ
ム化合物を使用した形成液も第17表と同等の特性を示
した。しかし光透過率はいずれの場合も低い事が判明し
た0実施例14 前記実施例13のジブチルスズアセトープの代りにジメ
チルスズアセトープ(CHa’)t Sn (αc(L
c)。
Table 17 As is clear from this table, the total amount of flea iy contained in the total organic gold is 10
~30% by weight, preferably 15-20% by weight,
It has various excellent properties. In addition, cracks and cracks occurred in the 35-layer hood. The forming solution using the n-4 organic indium compound also showed the same characteristics as shown in Table 17. However, the light transmittance was found to be low in all cases. Example 14 Dimethyltin acetope (CHa')t Sn (αc(L
c).

を用いて実施例13と同様の組成比を有する被膜形成液
を作る。
A film forming solution having the same composition ratio as in Example 13 was prepared using the following.

実施例15 前記実施例13のジブチルスズアセトープの代’) K
 シーc チA/ スズアセドープ(C3HI+)、S
n(αcac)。
Example 15 Substituent of dibutyltin acetope of Example 13') K
Sea c Chi A/ Tin acedope (C3HI+), S
n(αcac).

を用いて、実施例13と同様の組成比を有する被膜形成
液な作る。  一 実施例14および実施例15の被膜形成液も、この形成
液自体の特性、この形成液により作成された被膜の緒特
性も実施例13と同様の傾向を示すことが実験で確認さ
れている。
A film forming solution having the same composition ratio as in Example 13 was prepared using the following. It has been confirmed through experiments that the film forming liquids of Examples 14 and 15 exhibit similar tendencies to those of Example 13 in terms of the properties of the forming liquids themselves and the properties of the films created with these forming liquids. .

実施例16 で表わされる(但しXは一般式011Hzlで表わされ
るアルケン類においてn−5)有機インジウム化合物を
使用して実施例13と同枠の組成比を有する被膜形成液
な作成し、有機金属化合物の−1含有率について検討し
た。その結果を第18表に示す。なお、表中の各性質の
判断基準は実施例13に準、じた。
Example 16 A film forming solution having the same composition ratio as Example 13 was prepared using an organic indium compound (where X is n-5 in alkenes represented by the general formula 011Hzl), and an organic metal The -1 content of the compound was studied. The results are shown in Table 18. Note that the criteria for each property in the table were the same as in Example 13.

この表から明らかな様に、全有機金属含有量yが10〜
20重量−が好ましい。10〜17.5重@優のものは
、優れた諸種の特性を有している。
As is clear from this table, the total organometallic content y is 10~
20% by weight is preferred. Those with a weight of 10 to 17.5 @excellent have various excellent properties.

また25重址優ではクラック、ひび割れ等が発生した。In addition, cracks and crazing occurred in the 25-story building.

実施例17 前記実施例16のジブチルススアセドープの代りにジエ
チルスズアセトープCCtHJz sn (acac)
Example 17 Diethyltin acetope CCtHJz sn (acac) was used instead of dibutyltin acetate in Example 16.
.

を用いて実施例16と同様の組成比を有する被膜形成液
を作る。
A film forming solution having the same composition ratio as in Example 16 was prepared using the following.

実施例18 前記実施例16のジブチルスズアセトープの代りにジメ
チルスズアセトープ(OHs)t sn (acac)
 、を用いて実施例16と同様の組成比を有する被膜形
成液を作る。
Example 18 Dimethyltin acetope (OHs) t sn (acac) was used instead of dibutyltin acetope in Example 16.
A film forming solution having the same composition ratio as in Example 16 was prepared using the following.

実施例17および実施例18の被膜形成液も、この形成
液自体の特性、この形成液により作成された被膜の緒特
性も実施例16と同様の傾向な示すことが実験で確認さ
れている。
It has been confirmed through experiments that the coating forming liquids of Examples 17 and 18 exhibit similar tendencies to those of Example 16 in terms of the properties of the forming liquids themselves and the properties of the films formed with these forming liquids.

実施例19 で表わされる(但しXは一般式00nH2n+1で表わ
されるアルコキシ基においてn−1及びn−2)有機イ
ンジウム化合物を使用して実施例13と同様の組成比な
有する被膜形成液を作成し、有機金属化合物の適正含有
率について検討した結果を第19表に示す。これはn−
1の場合の有機インジウム化合物を使用した被膜形成液
の緒特性である。
Example 19 A film-forming solution having the same composition ratio as Example 13 was prepared using an organic indium compound represented by (where X is n-1 and n-2 in the alkoxy group represented by the general formula 00nH2n+1). Table 19 shows the results of a study on the appropriate content of organometallic compounds. This is n-
These are the initial characteristics of the film forming solution using the organic indium compound in case 1.

なお、表中の各性質の判断基準は実施例13に準じた。Note that the criteria for each property in the table were based on Example 13.

第19表 この表から明らかな様に、有機金属化合物の含有率yが
10〜25重量−の時が好ましい。特に10〜20重蓋
−のものは緒特性が優れている。
Table 19 As is clear from this table, it is preferable that the content y of the organometallic compound is 10 to 25% by weight. In particular, those with 10 to 20 layers have excellent properties.

また含有率が30重量優な越えるとクラック、ひび割れ
が発生する事が判明した。n−2の場合の有機インジウ
ム化合物を使用した形成液も第19表と同等の特性を示
した。
It has also been found that cracks occur when the content exceeds 30% by weight. The forming solution using an organic indium compound in the case of n-2 also showed the same characteristics as shown in Table 19.

実施例20 前記実施例19のジブチルスズアセトープの代りにジエ
チルススアセドープCCHs)tsn(acac )t
を用いて、実施例19と同様の組成比を有する被膜形成
液を作る。
Example 20 Diethylstinacedope CCHs)tsn(acac)t instead of dibutyltinacetope in Example 19
A film forming solution having the same composition ratio as in Example 19 was prepared using the following.

実施例21 前記実施例19のジブチルスズアセトープの代りにジメ
チルスズアセトープ(C2HJ@Sn(acac)2を
用いて、実施例19と同様の組成比を有する被膜形成液
を作成する。実施例20及び実施例21の被膜形成液も
この形成液自体の特性、この形成液により作成された被
膜の緒特性も実施例19と同様の傾向を示すことが実験
で確認されている。
Example 21 A film forming solution having the same composition ratio as in Example 19 is prepared by using dimethyltin acetope (C2HJ@Sn(acac)2) instead of dibutyltin acetope in Example 19. Example 20 It has been experimentally confirmed that the film forming liquid of Example 21 also exhibits the same tendency as Example 19 in the properties of this forming liquid itself and the properties of the film formed with this forming liquid.

実施例22 導電性被膜形成液のポットライフを検討するため、次の
組成表に示すような本発明に係る被膜形成液、E液、F
液、G液と従来の被膜形成液H液を作成する。これをそ
れぞれ所定期間室温で放iαしてその後導電性被膜をつ
くり、放置にともなう面積抵抗値変化を測定し、その結
果を第4図に示す0 第4図から明らかなように、従来の被膜形成液Hな用い
たものは、被膜形成液の放置にともなう面積抵抗値の増
大が暑しいが、本発明に係る被膜形成液E、F、G液の
いずれの場合も経時的変化が少なく、被膜形成液をしば
らく放置しても常に低い面積抵抗値を有する導電性被膜
が形成される。
Example 22 In order to study the pot life of the conductive film forming liquid, the film forming liquids, E liquid, and F liquid according to the present invention as shown in the following composition table were used.
Prepare liquid, G liquid, and conventional film forming liquid H liquid. Each of these was left to stand at room temperature for a predetermined period of time, then a conductive film was formed, and the change in area resistance as it was left was measured.The results are shown in Figure 4. The film-forming solution H that was used showed a significant increase in the sheet resistance value as the film-forming solution was left to stand, but all of the film-forming solutions E, F, and G according to the present invention show little change over time. Even if the film-forming solution is allowed to stand for a while, a conductive film with a low sheet resistance value is always formed.

また従来の被膜形成液Hの場合には、調整後1日で白濁
化し、3日目で完全にゲル化するなど、液の安定性も良
くない。これに対し本発明に係る被膜形成液E、F、G
では、放置によって有機溶媒が揮散して濃度変化はある
ものの、20日以上ゲル化することがなく、従来のもの
に比べて長いポットライフを有する。
Furthermore, in the case of the conventional film forming liquid H, the stability of the liquid is not good, as it becomes cloudy within one day after preparation and completely gels on the third day. On the other hand, film forming liquids E, F, and G according to the present invention
Although the organic solvent volatilizes and the concentration changes when left to stand, it does not gel for more than 20 days and has a longer pot life than conventional ones.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図、第3図はそれぞれ本発明の各実施例に
係る被膜形成液中の有機スズ化合物含有率と形成された
導電性被膜の面積抵抗値との関係な示す特性図、第4図
は本発明に係る被膜形成液と従来の被膜形成液の放置期
間にともなう面積抵抗値の変化を示す特性図である。 第1図 刊機スズ゛化合′@含有争x(重量%)第2図
FIG. 1, FIG. 2, and FIG. 3 are characteristic diagrams showing the relationship between the organic tin compound content in the film forming solution and the sheet resistance value of the formed conductive film according to each example of the present invention, respectively; FIG. 4 is a characteristic diagram showing changes in sheet resistance values of the film-forming liquid according to the present invention and the conventional film-forming liquid as they are left for a period of time. Figure 1: Tin compound' @ content content x (wt%) Figure 2

Claims (14)

【特許請求の範囲】[Claims] (1)焼成によって透明導電性金属酸化物となる有機金
属化合物と、電気抵抗値調整剤と、これら有機金属化合
物および電気抵抗値調整剤を溶解する有機溶媒とを含有
する透明導電性被膜形成液において、前記有機金属化合
物が次の一般式で示される有機インジウム化合物である
ことを特徴とする透明導電性被膜形成液。 一般式 ▲数式、化学式、表等があります▼ 但し、式中のXは一般式C_nH_2_n_+_1(n
=1〜4)で表わされるアルキル基、あるいはC_nH
_2_n(n=3〜5)で表わされるアンケン類、又は
OC_nH_2_n_+_1(n=1〜4)で表わされ
るアルコキシ基である。
(1) A transparent conductive film forming liquid containing an organometallic compound that becomes a transparent conductive metal oxide by firing, an electrical resistance value adjusting agent, and an organic solvent that dissolves the organometallic compound and the electrical resistance value adjusting agent. A transparent conductive film forming liquid, wherein the organometallic compound is an organoindium compound represented by the following general formula. General formula ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ However, X in the formula is the general formula C_nH_2_n_+_1 (n
=1-4) or C_nH
It is an ankene group represented by _2_n (n=3 to 5) or an alkoxy group represented by OC_nH_2_n_+_1 (n=1 to 4).
(2)特許請求の範囲第(1)項記載において、前記有
機インジウム化合物がトリスメチルアセトアセテートイ
ンジウム、トリスエチルアセトアセテートインジウム、
トリスプロピルアセトアセテートインジウム、トリスイ
ソブチルアセトアセテートインジウムのグループから選
択された有機インジウム化合物であることを特徴とする
透明導電性被膜形成液。
(2) Claim (1), wherein the organic indium compound is indium trismethylacetoacetate, indium trisethylacetoacetate,
A transparent conductive film forming liquid characterized by being an organic indium compound selected from the group consisting of indium trispropylacetoacetate and indium trisisobutylacetoacetate.
(3)特許請求の範囲第(1)項記載に於いて、前記有
機インジウム化合物がトリス−1−プロペンアセトアセ
テートインジウム、トリス−1−ブテンアセトアセテー
トインジウム、トリス−1−ペンテンアセトアセテート
インジウムのグループから選択された有機インジウム化
合物であることを特徴とする透明導電性被膜形成液。
(3) In claim (1), the organic indium compound is a group of indium tris-1-propeneacetoacetate, indium tris-1-buteneacetoacetate, and indium tris-1-pentenacetoacetate. A transparent conductive film forming liquid characterized by being an organic indium compound selected from the following.
(4)特許請求の範囲第(1)項記載に於いて、前記有
機インジウム化合物がトリスメトキシアセトアセテート
インジウム、トリスエトキシアセトアセテートインジウ
ム、トリスプロポキシアセトアセテートインジウム、ト
リスブトキシアセトアセテートインジウム、のグループ
から選択された有機インジウム化合物であることを特徴
とする透明導電性被膜形成液。
(4) In claim (1), the organic indium compound is selected from the group consisting of indium trismethoxyacetoacetate, indium trisethoxyacetoacetate, indium trispropoxyacetoacetate, and indium trisbutoxyacetoacetate. A transparent conductive film forming liquid characterized by being an organic indium compound.
(5)特許請求の範囲第(1)項記載において、前記電
気抵抗値調整剤が次の一般式で示される有機スズ化合物
であることを特徴とする透明導電性被膜形成液。 一般式 (Y)_2Sn(X)_2 但し、式中Xはβ−ジケトン、Yはアルキル基。
(5) A transparent conductive film forming liquid as set forth in claim (1), wherein the electrical resistance value adjusting agent is an organic tin compound represented by the following general formula. General formula (Y)_2Sn(X)_2 However, in the formula, X is β-diketone and Y is an alkyl group.
(6)特許請求の範囲第(5)項記載において、前記有
機スズ化合物が、ジブチルスズアセトープ、ジメチルス
ズアセトープ、およびジエチルスズアセトープから選択
された少なくとも1種の有機スズ化合物であることを特
徴とする透明導電性被膜形成液。
(6) Claim (5) states that the organotin compound is at least one organotin compound selected from dibutyltin acetope, dimethyltin acetope, and diethyltin acetope. Characteristic transparent conductive film forming liquid.
(7)特許請求の範囲第(1)項記載において、前記有
機溶剤が低沸点有機液体であることを特徴とする透明導
電性被膜形成液。
(7) A transparent conductive film-forming liquid according to claim (1), wherein the organic solvent is a low boiling point organic liquid.
(8)特許請求の範囲第(7)項記載において、前記有
機溶剤がメチルエチルケトン、酢酸エチル、ベンゼンの
グループから選択されたものであることを特徴とする透
明導電性被膜形成液。
(8) A transparent conductive film forming liquid as set forth in claim (7), wherein the organic solvent is selected from the group of methyl ethyl ketone, ethyl acetate, and benzene.
(9)特許請求の範囲第(5)項記載において、前記有
機インジウム化合物がトリスプロピルアセトアセテート
インジウムで、前記有機スズ化合物がジブチルスズアセ
トープ、ジメチルスズアセトープ、およびジエチルスズ
アセトープのグループから選択された少なくとも1種の
有機スズ化合物で、前記有機インジウム化合物と有機ス
ズ化合物の混合物中における有機スズ化合物の含有率が
約5〜20重量%の範囲に規制されていることを特徴と
する透明導電性被膜形成液。
(9) Claim (5), wherein the organic indium compound is indium trispropylacetoacetate, and the organic tin compound is selected from the group of dibutyltin acetope, dimethyltin acetope, and diethyltin acetope. at least one organic tin compound, wherein the content of the organic tin compound in the mixture of the organic indium compound and the organic tin compound is regulated to a range of about 5 to 20% by weight. Sex film forming liquid.
(10)特許請求の範囲第(5)項記載において、前記
有機インジウム化合物がトリスブチルアセトアセテート
インジウムで、前記有機スズ化合物がジブチルスズアセ
トープ、ジメチルスズアセトープ、およびジエチルスズ
アセトープのグループから選択された少なくとも1種の
有機スズ化合物で前記有機インジウム化合物と有機スズ
化合物の混合物中における有機スズ化合物の含有率が約
5〜20重量%の範囲に規制されていることを特徴とす
る透明導電性被膜形成液。
(10) Claim (5), wherein the organic indium compound is indium trisbutylacetoacetate, and the organic tin compound is selected from the group of dibutyltin acetope, dimethyltin acetope, and diethyltin acetope. The content of the organic tin compound in the mixture of the organic indium compound and the organic tin compound is regulated to a range of about 5 to 20% by weight. Film forming liquid.
(11)特許請求の範囲第(5)項記載において、前記
有機インジウム化合物がトリス−1−ペンテンアセトア
セテートインジウムで、前記有機スズ化合物がジブチル
スズアセトープ、ジメチルスズアセトープ、ジエチルス
ズアセトープのグループから選択された少なくとも1種
の有機スズ化合物で、前記有機インジウム化合物と有機
スズ化合物の混合物中における有機スズ化合物の含有率
が約5〜20重量%の範囲に規制されていることを特徴
とする透明導電性被膜形成液。
(11) Claim (5), wherein the organic indium compound is indium tris-1-pentenacetoacetate, and the organic tin compound is a group of dibutyltin acetope, dimethyltin acetope, and diethyltin acetope. At least one organic tin compound selected from the following, characterized in that the content of the organic tin compound in the mixture of the organic indium compound and the organic tin compound is regulated to a range of about 5 to 20% by weight. Transparent conductive film forming liquid.
(12)特許請求の範囲第(5)項記載において、前記
有機インジウム化合物がトリスメトキシアセトアセテー
トインジウムで、前記有機スズ化合物がジブチルスズア
セトープ、ジメチルスズアセトープ、ジエチルスズアセ
トープのグループから選択された少なくとも1種の有機
スズ化合物で、前記有機インジウム化合物と有機スズ化
合物の混合物中における有機スズ化合物の含有率が約5
〜20重量%の範囲に規制されていることを特徴とする
透明導電性被膜形成液。
(12) Claim (5), wherein the organic indium compound is indium trismethoxyacetoacetate, and the organic tin compound is selected from the group of dibutyltin acetope, dimethyltin acetope, and diethyltin acetope. at least one organotin compound, and the content of the organotin compound in the mixture of the organoindium compound and the organotin compound is about 5%.
A transparent conductive film-forming liquid characterized by being regulated within a range of 20% by weight.
(13)特許請求の範囲第(5)項記載において、前記
有機インジウム化合物がトリスエトキシアセトアセテー
トインジウムで、前記有機スズ化合物がジブチルスズア
セトープ、ジメチルスズアセトープ、ジエチルスズアセ
トープのグループから選択された少なくとも1種の有機
スズ化合物で、前記有機インジウム化合物と有機スズ化
合物の混合物中における有機スズ化合物の含有率が約5
〜20重量%の範囲に規制されていることを特徴とする
透明導電性被膜形成液。
(13) Claim (5), wherein the organic indium compound is indium trisethoxyacetoacetate, and the organic tin compound is selected from the group of dibutyltin acetope, dimethyltin acetope, and diethyltin acetope. at least one organotin compound, and the content of the organotin compound in the mixture of the organoindium compound and the organotin compound is about 5%.
A transparent conductive film-forming liquid characterized by being regulated within a range of 20% by weight.
(14)特許請求の範囲第(5)項記載において、前記
有機インジウム化合物と有機スズ化合物の全有機金属量
が被膜形成液中に約6〜40重量%含有されていること
を特徴とする透明導電性被膜形成液。
(14) The transparent film according to claim (5), wherein the total amount of organic metals in the organic indium compound and the organic tin compound is contained in the film forming liquid in an amount of about 6 to 40% by weight. Conductive film forming liquid.
JP14592684A 1984-07-16 1984-07-16 Liquid forming electrically conductive transparent coating film Granted JPS6126679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14592684A JPS6126679A (en) 1984-07-16 1984-07-16 Liquid forming electrically conductive transparent coating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14592684A JPS6126679A (en) 1984-07-16 1984-07-16 Liquid forming electrically conductive transparent coating film

Publications (2)

Publication Number Publication Date
JPS6126679A true JPS6126679A (en) 1986-02-05
JPH0233075B2 JPH0233075B2 (en) 1990-07-25

Family

ID=15396270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14592684A Granted JPS6126679A (en) 1984-07-16 1984-07-16 Liquid forming electrically conductive transparent coating film

Country Status (1)

Country Link
JP (1) JPS6126679A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37183E1 (en) 1987-12-10 2001-05-22 Hitachi, Ltd. Image display panel having antistatic film with transparent and electroconductive properties and process for processing same
US6455101B1 (en) 1999-07-28 2002-09-24 Anelva Corporation Method for depositing a protective carbon coating on a data recording disk
US8753987B2 (en) 2010-06-08 2014-06-17 Sumitomo Metal Mining Co., Ltd. Method of manufacturing metal oxide film
US8963146B2 (en) 2009-11-05 2015-02-24 Sumitomo Metal Mining Co., Ltd. Method of manufacturing transparent conductive film, the transparent conductive substrate using the film, as well as device using the substrate
US10283230B2 (en) 2012-08-29 2019-05-07 Sumitomo Metal Mining Co., Ltd. Production method for coating liquid for formation of transparent conductive film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889666A (en) * 1981-11-25 1983-05-28 Alps Electric Co Ltd Paste for forming transparent electrically conductive film and preparation thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889666A (en) * 1981-11-25 1983-05-28 Alps Electric Co Ltd Paste for forming transparent electrically conductive film and preparation thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37183E1 (en) 1987-12-10 2001-05-22 Hitachi, Ltd. Image display panel having antistatic film with transparent and electroconductive properties and process for processing same
US6455101B1 (en) 1999-07-28 2002-09-24 Anelva Corporation Method for depositing a protective carbon coating on a data recording disk
US8963146B2 (en) 2009-11-05 2015-02-24 Sumitomo Metal Mining Co., Ltd. Method of manufacturing transparent conductive film, the transparent conductive substrate using the film, as well as device using the substrate
US8753987B2 (en) 2010-06-08 2014-06-17 Sumitomo Metal Mining Co., Ltd. Method of manufacturing metal oxide film
US10283230B2 (en) 2012-08-29 2019-05-07 Sumitomo Metal Mining Co., Ltd. Production method for coating liquid for formation of transparent conductive film

Also Published As

Publication number Publication date
JPH0233075B2 (en) 1990-07-25

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