JPS61266305A - 回転窯による窒化珪素の製造方法 - Google Patents

回転窯による窒化珪素の製造方法

Info

Publication number
JPS61266305A
JPS61266305A JP10389085A JP10389085A JPS61266305A JP S61266305 A JPS61266305 A JP S61266305A JP 10389085 A JP10389085 A JP 10389085A JP 10389085 A JP10389085 A JP 10389085A JP S61266305 A JPS61266305 A JP S61266305A
Authority
JP
Japan
Prior art keywords
powder
nitriding
rotary kiln
granules
rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10389085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542362B2 (cs
Inventor
Yukihiko Miwa
三和 幸彦
Eiichi Miura
三浦 永一
Isamu Watanabe
勇 渡辺
Hiroshi Shimizu
浩 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiheiyo Cement Corp
Original Assignee
Onoda Cement Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onoda Cement Co Ltd filed Critical Onoda Cement Co Ltd
Priority to JP10389085A priority Critical patent/JPS61266305A/ja
Publication of JPS61266305A publication Critical patent/JPS61266305A/ja
Publication of JPH0542362B2 publication Critical patent/JPH0542362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP10389085A 1985-05-17 1985-05-17 回転窯による窒化珪素の製造方法 Granted JPS61266305A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10389085A JPS61266305A (ja) 1985-05-17 1985-05-17 回転窯による窒化珪素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10389085A JPS61266305A (ja) 1985-05-17 1985-05-17 回転窯による窒化珪素の製造方法

Publications (2)

Publication Number Publication Date
JPS61266305A true JPS61266305A (ja) 1986-11-26
JPH0542362B2 JPH0542362B2 (cs) 1993-06-28

Family

ID=14366019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10389085A Granted JPS61266305A (ja) 1985-05-17 1985-05-17 回転窯による窒化珪素の製造方法

Country Status (1)

Country Link
JP (1) JPS61266305A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232677A (en) * 1990-01-31 1993-08-03 Shin-Etsu Chemical Co., Ltd. Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed
JP2006160548A (ja) * 2004-12-06 2006-06-22 Japan Atomic Energy Agency 単結晶窒化ケイ素ナノシートとその製造方法
JP2012511490A (ja) * 2008-12-13 2012-05-24 アルツケム・トロストベルク・ゲーエムベーハー 高純度窒化ケイ素の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550882A (en) * 1978-10-06 1980-04-14 Yaskawa Electric Mfg Co Ltd Screen-removing device in automatic dried-laver manufacturing machine
JPS5562804A (en) * 1979-10-09 1980-05-12 Sumitomo Electric Ind Ltd Production of nitride
JPS6197110A (ja) * 1984-10-18 1986-05-15 Osaka Titanium Seizo Kk 高α相率窒化けい素の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550882A (en) * 1978-10-06 1980-04-14 Yaskawa Electric Mfg Co Ltd Screen-removing device in automatic dried-laver manufacturing machine
JPS5562804A (en) * 1979-10-09 1980-05-12 Sumitomo Electric Ind Ltd Production of nitride
JPS6197110A (ja) * 1984-10-18 1986-05-15 Osaka Titanium Seizo Kk 高α相率窒化けい素の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232677A (en) * 1990-01-31 1993-08-03 Shin-Etsu Chemical Co., Ltd. Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed
JP2006160548A (ja) * 2004-12-06 2006-06-22 Japan Atomic Energy Agency 単結晶窒化ケイ素ナノシートとその製造方法
JP2012511490A (ja) * 2008-12-13 2012-05-24 アルツケム・トロストベルク・ゲーエムベーハー 高純度窒化ケイ素の製造方法
US8697023B2 (en) 2008-12-13 2014-04-15 Alzchem Trostberg Gmbh Method for producing high-purity silicon nitride

Also Published As

Publication number Publication date
JPH0542362B2 (cs) 1993-06-28

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