JPS61256242A - 欠陥検査方法及びその装置 - Google Patents

欠陥検査方法及びその装置

Info

Publication number
JPS61256242A
JPS61256242A JP9771885A JP9771885A JPS61256242A JP S61256242 A JPS61256242 A JP S61256242A JP 9771885 A JP9771885 A JP 9771885A JP 9771885 A JP9771885 A JP 9771885A JP S61256242 A JPS61256242 A JP S61256242A
Authority
JP
Japan
Prior art keywords
signal
value
defect
circuit
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9771885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525061B2 (enrdf_load_stackoverflow
Inventor
Minoru Tanaka
稔 田中
Mitsuyoshi Koizumi
小泉　光義
Yoshimasa Oshima
良正 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9771885A priority Critical patent/JPS61256242A/ja
Publication of JPS61256242A publication Critical patent/JPS61256242A/ja
Publication of JPH0525061B2 publication Critical patent/JPH0525061B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP9771885A 1985-05-10 1985-05-10 欠陥検査方法及びその装置 Granted JPS61256242A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9771885A JPS61256242A (ja) 1985-05-10 1985-05-10 欠陥検査方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9771885A JPS61256242A (ja) 1985-05-10 1985-05-10 欠陥検査方法及びその装置

Publications (2)

Publication Number Publication Date
JPS61256242A true JPS61256242A (ja) 1986-11-13
JPH0525061B2 JPH0525061B2 (enrdf_load_stackoverflow) 1993-04-09

Family

ID=14199670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9771885A Granted JPS61256242A (ja) 1985-05-10 1985-05-10 欠陥検査方法及びその装置

Country Status (1)

Country Link
JP (1) JPS61256242A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05273141A (ja) * 1992-03-30 1993-10-22 Taiyo Yuden Co Ltd 光ディスク検査装置
JP2006194900A (ja) * 2005-01-13 2006-07-27 Komag Inc テストヘッドからプロセッサへデータを選択的に供給する方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05273141A (ja) * 1992-03-30 1993-10-22 Taiyo Yuden Co Ltd 光ディスク検査装置
JP2006194900A (ja) * 2005-01-13 2006-07-27 Komag Inc テストヘッドからプロセッサへデータを選択的に供給する方法及び装置

Also Published As

Publication number Publication date
JPH0525061B2 (enrdf_load_stackoverflow) 1993-04-09

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