JPS61254361A - 電子写真プリンタ用記録ヘッドの製造方法 - Google Patents
電子写真プリンタ用記録ヘッドの製造方法Info
- Publication number
- JPS61254361A JPS61254361A JP60096091A JP9609185A JPS61254361A JP S61254361 A JPS61254361 A JP S61254361A JP 60096091 A JP60096091 A JP 60096091A JP 9609185 A JP9609185 A JP 9609185A JP S61254361 A JPS61254361 A JP S61254361A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resistant organic
- organic material
- substrate
- high heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 title description 8
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 239000011368 organic material Substances 0.000 claims abstract description 18
- 230000001681 protective effect Effects 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 13
- 238000005530 etching Methods 0.000 abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- 229910001120 nichrome Inorganic materials 0.000 abstract description 3
- 238000007639 printing Methods 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 238000002955 isolation Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 22
- 239000004642 Polyimide Substances 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229910004479 Ta2N Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002429 hydrazines Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/345—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads characterised by the arrangement of resistors or conductors
Landscapes
- Non-Adjustable Resistors (AREA)
- Dot-Matrix Printers And Others (AREA)
- Electronic Switches (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60096091A JPS61254361A (ja) | 1985-05-08 | 1985-05-08 | 電子写真プリンタ用記録ヘッドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60096091A JPS61254361A (ja) | 1985-05-08 | 1985-05-08 | 電子写真プリンタ用記録ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61254361A true JPS61254361A (ja) | 1986-11-12 |
| JPH0414631B2 JPH0414631B2 (enExample) | 1992-03-13 |
Family
ID=14155724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60096091A Granted JPS61254361A (ja) | 1985-05-08 | 1985-05-08 | 電子写真プリンタ用記録ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61254361A (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613185A (en) * | 1979-07-12 | 1981-02-09 | Ricoh Co Ltd | Luminescent element array for spot scanning and recorder |
| JPS5845072A (ja) * | 1981-06-04 | 1983-03-16 | イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア | 印字針装置 |
| JPS5845971A (ja) * | 1981-09-12 | 1983-03-17 | Rohm Co Ltd | サ−マルプリンタヘッドとその製造法 |
-
1985
- 1985-05-08 JP JP60096091A patent/JPS61254361A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613185A (en) * | 1979-07-12 | 1981-02-09 | Ricoh Co Ltd | Luminescent element array for spot scanning and recorder |
| JPS5845072A (ja) * | 1981-06-04 | 1983-03-16 | イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア | 印字針装置 |
| JPS5845971A (ja) * | 1981-09-12 | 1983-03-17 | Rohm Co Ltd | サ−マルプリンタヘッドとその製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0414631B2 (enExample) | 1992-03-13 |
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