JPS61247951A - 温度ガス両用センサ - Google Patents

温度ガス両用センサ

Info

Publication number
JPS61247951A
JPS61247951A JP9006585A JP9006585A JPS61247951A JP S61247951 A JPS61247951 A JP S61247951A JP 9006585 A JP9006585 A JP 9006585A JP 9006585 A JP9006585 A JP 9006585A JP S61247951 A JPS61247951 A JP S61247951A
Authority
JP
Japan
Prior art keywords
sensor
sensor base
gas
base body
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9006585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469746B2 (enrdf_load_stackoverflow
Inventor
Satoshi Sekido
聰 関戸
Koichi Tachibana
立花 弘一
Koji Yamamura
康治 山村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TECH RES ASSOC CONDUCT INORG COMPO
Original Assignee
TECH RES ASSOC CONDUCT INORG COMPO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TECH RES ASSOC CONDUCT INORG COMPO filed Critical TECH RES ASSOC CONDUCT INORG COMPO
Priority to JP9006585A priority Critical patent/JPS61247951A/ja
Publication of JPS61247951A publication Critical patent/JPS61247951A/ja
Publication of JPH0469746B2 publication Critical patent/JPH0469746B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP9006585A 1985-04-26 1985-04-26 温度ガス両用センサ Granted JPS61247951A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9006585A JPS61247951A (ja) 1985-04-26 1985-04-26 温度ガス両用センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9006585A JPS61247951A (ja) 1985-04-26 1985-04-26 温度ガス両用センサ

Publications (2)

Publication Number Publication Date
JPS61247951A true JPS61247951A (ja) 1986-11-05
JPH0469746B2 JPH0469746B2 (enrdf_load_stackoverflow) 1992-11-09

Family

ID=13988140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9006585A Granted JPS61247951A (ja) 1985-04-26 1985-04-26 温度ガス両用センサ

Country Status (1)

Country Link
JP (1) JPS61247951A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0469746B2 (enrdf_load_stackoverflow) 1992-11-09

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