JPS61242779A - レ−ザ加工装置におけるレ−ザ光の傾斜及び焦点を検出する方法 - Google Patents
レ−ザ加工装置におけるレ−ザ光の傾斜及び焦点を検出する方法Info
- Publication number
- JPS61242779A JPS61242779A JP60081485A JP8148585A JPS61242779A JP S61242779 A JPS61242779 A JP S61242779A JP 60081485 A JP60081485 A JP 60081485A JP 8148585 A JP8148585 A JP 8148585A JP S61242779 A JPS61242779 A JP S61242779A
- Authority
- JP
- Japan
- Prior art keywords
- light
- workpiece
- laser beam
- laser
- focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 16
- 238000003754 machining Methods 0.000 title 1
- 238000012545 processing Methods 0.000 description 13
- 238000001514 detection method Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 11
- 238000012937 correction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009412 basement excavation Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60081485A JPS61242779A (ja) | 1985-04-18 | 1985-04-18 | レ−ザ加工装置におけるレ−ザ光の傾斜及び焦点を検出する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60081485A JPS61242779A (ja) | 1985-04-18 | 1985-04-18 | レ−ザ加工装置におけるレ−ザ光の傾斜及び焦点を検出する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61242779A true JPS61242779A (ja) | 1986-10-29 |
| JPH0566235B2 JPH0566235B2 (enrdf_load_html_response) | 1993-09-21 |
Family
ID=13747704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60081485A Granted JPS61242779A (ja) | 1985-04-18 | 1985-04-18 | レ−ザ加工装置におけるレ−ザ光の傾斜及び焦点を検出する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61242779A (enrdf_load_html_response) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63174987U (enrdf_load_html_response) * | 1987-02-13 | 1988-11-14 | ||
| JPS6448686A (en) * | 1987-08-19 | 1989-02-23 | Nec Corp | Laser beam trimming device |
| JPH01141303A (ja) * | 1987-11-27 | 1989-06-02 | Ishikawajima Harima Heavy Ind Co Ltd | 3次元加工用ティーチングセンサ |
| CN111670345A (zh) * | 2017-12-22 | 2020-09-15 | 普雷茨特两合公司 | 用于检测激光射束的焦点位置的方法和设备 |
| WO2024084750A1 (ja) * | 2022-10-20 | 2024-04-25 | 三菱重工業株式会社 | レーザ旋回装置、レーザ加工装置および加工方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5339123A (en) * | 1976-09-22 | 1978-04-10 | Canon Inc | Automatic winder of cameras |
-
1985
- 1985-04-18 JP JP60081485A patent/JPS61242779A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5339123A (en) * | 1976-09-22 | 1978-04-10 | Canon Inc | Automatic winder of cameras |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63174987U (enrdf_load_html_response) * | 1987-02-13 | 1988-11-14 | ||
| JPS6448686A (en) * | 1987-08-19 | 1989-02-23 | Nec Corp | Laser beam trimming device |
| JPH01141303A (ja) * | 1987-11-27 | 1989-06-02 | Ishikawajima Harima Heavy Ind Co Ltd | 3次元加工用ティーチングセンサ |
| CN111670345A (zh) * | 2017-12-22 | 2020-09-15 | 普雷茨特两合公司 | 用于检测激光射束的焦点位置的方法和设备 |
| US11530946B2 (en) | 2017-12-22 | 2022-12-20 | Precitec Gmbh & Co. Kg | Method and device for detecting a focal position of a laser beam |
| WO2024084750A1 (ja) * | 2022-10-20 | 2024-04-25 | 三菱重工業株式会社 | レーザ旋回装置、レーザ加工装置および加工方法 |
| JP2024060649A (ja) * | 2022-10-20 | 2024-05-07 | 三菱重工業株式会社 | レーザ旋回装置、レーザ加工装置および加工方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0566235B2 (enrdf_load_html_response) | 1993-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH10288578A (ja) | 粒子測定装置及びその校正方法 | |
| JPS62201301A (ja) | レ−ザ−干渉測長機 | |
| JP4130236B2 (ja) | 物体表面形状測定方法及び装置 | |
| JPS61242779A (ja) | レ−ザ加工装置におけるレ−ザ光の傾斜及び焦点を検出する方法 | |
| US5051575A (en) | Optical surface roughness measuring apparatus using double-focus lens for producing parallel and converged beams for measurement | |
| US4105335A (en) | Interferometric optical phase discrimination apparatus | |
| JPH10253892A (ja) | 位相干渉顕微鏡 | |
| JPS63149513A (ja) | 光学式変位計測方法 | |
| JPS6370110A (ja) | 距離測定装置 | |
| JPH06213623A (ja) | 光学式変位センサ | |
| US5636189A (en) | Astigmatic method for detecting a focussing error in an optical pickup system | |
| JP2966950B2 (ja) | 試料変位測定装置 | |
| JPS62503049A (ja) | 二次元的な対象物を整向、検査及び/または測定するための方法及び装置 | |
| JPS6283612A (ja) | 変位変換器 | |
| JPS63196807A (ja) | 光学式変位計測方法 | |
| JPS63153442A (ja) | ビ−ムスプリツタの光学特性測定装置 | |
| JPS63172905A (ja) | 回折光の分離方法および分離装置 | |
| JPH07174552A (ja) | 焦点検出装置 | |
| JPH0275906A (ja) | 結像型変位計 | |
| JPH03238307A (ja) | 外径測定装置 | |
| JPH03242511A (ja) | 微小変位計 | |
| JPS61120912A (ja) | 距離測定装置 | |
| JP2011099914A (ja) | 偏光光学素子 | |
| JPH0593611A (ja) | 厚さ測定装置 | |
| JPS61139936A (ja) | 焦点検出装置 |