JPS61241988A - ジヨセフソン集積回路の製造方法 - Google Patents

ジヨセフソン集積回路の製造方法

Info

Publication number
JPS61241988A
JPS61241988A JP60082515A JP8251585A JPS61241988A JP S61241988 A JPS61241988 A JP S61241988A JP 60082515 A JP60082515 A JP 60082515A JP 8251585 A JP8251585 A JP 8251585A JP S61241988 A JPS61241988 A JP S61241988A
Authority
JP
Japan
Prior art keywords
josephson
layer
integrated circuit
electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60082515A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360184B2 (enExample
Inventor
Shinichi Morohashi
信一 諸橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60082515A priority Critical patent/JPS61241988A/ja
Publication of JPS61241988A publication Critical patent/JPS61241988A/ja
Publication of JPH0360184B2 publication Critical patent/JPH0360184B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60082515A 1985-04-19 1985-04-19 ジヨセフソン集積回路の製造方法 Granted JPS61241988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60082515A JPS61241988A (ja) 1985-04-19 1985-04-19 ジヨセフソン集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60082515A JPS61241988A (ja) 1985-04-19 1985-04-19 ジヨセフソン集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS61241988A true JPS61241988A (ja) 1986-10-28
JPH0360184B2 JPH0360184B2 (enExample) 1991-09-12

Family

ID=13776662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60082515A Granted JPS61241988A (ja) 1985-04-19 1985-04-19 ジヨセフソン集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS61241988A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234575A (ja) * 1987-03-24 1988-09-29 Agency Of Ind Science & Technol 超電導回路のパタ−ン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234575A (ja) * 1987-03-24 1988-09-29 Agency Of Ind Science & Technol 超電導回路のパタ−ン形成方法

Also Published As

Publication number Publication date
JPH0360184B2 (enExample) 1991-09-12

Similar Documents

Publication Publication Date Title
JPS58200586A (ja) ニオブ−絶縁体−ニオブのジヨセフソンのトンネル接合デバイスのその場製造の方法
CN105428517B (zh) 一种双通道超导连接及其制备方法
JP2009111306A (ja) ジョセフソン接合を備えた電子デバイスとその製造方法
US20050062131A1 (en) A1/A1Ox/A1 resistor process for integrated circuits
US4299679A (en) Method of producing Josephson elements of the tunneling junction type
JPH0766462A (ja) 超伝導回路
CA2025800C (en) Silver metal electrode on oxide superconductor
JPH05102547A (ja) ジヨセフソン集積回路装置の製造方法
JPS61241988A (ja) ジヨセフソン集積回路の製造方法
US4178602A (en) Thin film cryotron
JPH0322711B2 (enExample)
JP2646440B2 (ja) ジョセフソン接合素子の製造方法
JP2526402B2 (ja) 超伝導ジョセフソン素子の製造方法
JPS603796B2 (ja) 超電導回路用コンタクト
JPS6068681A (ja) 超伝導トランジスタ
JPS61144892A (ja) シヨセフソン集積回路の製造方法
JPS60113484A (ja) ジョセフソン集積回路装置の製造方法
JPH0634417B2 (ja) ジヨセフソン接合素子の製造方法
JPH05243628A (ja) ジョセフソン接合素子及びその製造方法
JP2535539B2 (ja) ジョセフソン回路の製造方法
JPH053754B2 (enExample)
JPH03263884A (ja) ジョセフソン集積回路の製造方法
JPH1041557A (ja) 超伝導平面回路及びその製造方法
JPS6224677A (ja) 超伝導回路用接地面の形成方法
JPH077189A (ja) ジョセフソン接合素子

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term