JPS61239682A - 積層型圧電バイモルフ素子の製造方法 - Google Patents
積層型圧電バイモルフ素子の製造方法Info
- Publication number
- JPS61239682A JPS61239682A JP60079422A JP7942285A JPS61239682A JP S61239682 A JPS61239682 A JP S61239682A JP 60079422 A JP60079422 A JP 60079422A JP 7942285 A JP7942285 A JP 7942285A JP S61239682 A JPS61239682 A JP S61239682A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- internal electrode
- sheet
- electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 238000010030 laminating Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 238000003475 lamination Methods 0.000 claims description 8
- 238000010304 firing Methods 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 101100243951 Caenorhabditis elegans pie-1 gene Proteins 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60079422A JPS61239682A (ja) | 1985-04-16 | 1985-04-16 | 積層型圧電バイモルフ素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60079422A JPS61239682A (ja) | 1985-04-16 | 1985-04-16 | 積層型圧電バイモルフ素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61239682A true JPS61239682A (ja) | 1986-10-24 |
| JPH0257353B2 JPH0257353B2 (enrdf_load_stackoverflow) | 1990-12-04 |
Family
ID=13689425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60079422A Granted JPS61239682A (ja) | 1985-04-16 | 1985-04-16 | 積層型圧電バイモルフ素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61239682A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5233256A (en) * | 1991-01-30 | 1993-08-03 | Murata Manufacturing Co., Ltd. | Method of driving piezoelectric bimorph device and piezoelectric bimorph device |
| US5552658A (en) * | 1993-09-28 | 1996-09-03 | U.S. Philips Corporation | Torsional actuator and method of manufacturing same |
| CN110098315A (zh) * | 2018-01-30 | 2019-08-06 | 太阳诱电株式会社 | 层叠压电陶瓷部件和压电器件 |
| CN110098314A (zh) * | 2018-01-30 | 2019-08-06 | 太阳诱电株式会社 | 层叠压电陶瓷部件及其制造方法和压电器件 |
| JP2019134036A (ja) * | 2018-01-30 | 2019-08-08 | 太陽誘電株式会社 | 積層圧電セラミック部品及び圧電デバイス |
| JP2019134034A (ja) * | 2018-01-30 | 2019-08-08 | 太陽誘電株式会社 | 積層圧電セラミック部品及び圧電デバイス |
| US11362261B2 (en) * | 2018-01-30 | 2022-06-14 | Taiyo Yuden Co., Ltd | Multi-layer piezoelectric ceramic component and piezoelectric device |
-
1985
- 1985-04-16 JP JP60079422A patent/JPS61239682A/ja active Granted
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5233256A (en) * | 1991-01-30 | 1993-08-03 | Murata Manufacturing Co., Ltd. | Method of driving piezoelectric bimorph device and piezoelectric bimorph device |
| US5552658A (en) * | 1993-09-28 | 1996-09-03 | U.S. Philips Corporation | Torsional actuator and method of manufacturing same |
| CN110098315A (zh) * | 2018-01-30 | 2019-08-06 | 太阳诱电株式会社 | 层叠压电陶瓷部件和压电器件 |
| CN110098314A (zh) * | 2018-01-30 | 2019-08-06 | 太阳诱电株式会社 | 层叠压电陶瓷部件及其制造方法和压电器件 |
| JP2019134036A (ja) * | 2018-01-30 | 2019-08-08 | 太陽誘電株式会社 | 積層圧電セラミック部品及び圧電デバイス |
| JP2019134034A (ja) * | 2018-01-30 | 2019-08-08 | 太陽誘電株式会社 | 積層圧電セラミック部品及び圧電デバイス |
| JP2019134037A (ja) * | 2018-01-30 | 2019-08-08 | 太陽誘電株式会社 | 積層圧電セラミック部品の製造方法、積層圧電セラミック部品及び圧電デバイス |
| US11309481B2 (en) * | 2018-01-30 | 2022-04-19 | Taiyo Yuden Co., Ltd | Multi-layer piezoelectric ceramic component-mounted piezoelectric device |
| US11362261B2 (en) * | 2018-01-30 | 2022-06-14 | Taiyo Yuden Co., Ltd | Multi-layer piezoelectric ceramic component and piezoelectric device |
| CN110098315B (zh) * | 2018-01-30 | 2024-01-02 | 太阳诱电株式会社 | 层叠压电陶瓷部件和压电器件 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0257353B2 (enrdf_load_stackoverflow) | 1990-12-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |