JPS61239105A - 印刷パタ−ンの検査方法 - Google Patents

印刷パタ−ンの検査方法

Info

Publication number
JPS61239105A
JPS61239105A JP60080057A JP8005785A JPS61239105A JP S61239105 A JPS61239105 A JP S61239105A JP 60080057 A JP60080057 A JP 60080057A JP 8005785 A JP8005785 A JP 8005785A JP S61239105 A JPS61239105 A JP S61239105A
Authority
JP
Japan
Prior art keywords
window
pattern
printed pattern
printed
windows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60080057A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418768B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tatsuo Yamamura
山村　辰男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP60080057A priority Critical patent/JPS61239105A/ja
Publication of JPS61239105A publication Critical patent/JPS61239105A/ja
Publication of JPH0418768B2 publication Critical patent/JPH0418768B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Image Analysis (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP60080057A 1985-04-17 1985-04-17 印刷パタ−ンの検査方法 Granted JPS61239105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60080057A JPS61239105A (ja) 1985-04-17 1985-04-17 印刷パタ−ンの検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60080057A JPS61239105A (ja) 1985-04-17 1985-04-17 印刷パタ−ンの検査方法

Publications (2)

Publication Number Publication Date
JPS61239105A true JPS61239105A (ja) 1986-10-24
JPH0418768B2 JPH0418768B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-27

Family

ID=13707603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60080057A Granted JPS61239105A (ja) 1985-04-17 1985-04-17 印刷パタ−ンの検査方法

Country Status (1)

Country Link
JP (1) JPS61239105A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02234005A (ja) * 1989-03-08 1990-09-17 Matsushita Electric Ind Co Ltd 対象物の特徴部の位置の検出方法
WO2014184960A1 (ja) * 2013-05-17 2014-11-20 富士機械製造株式会社 検査装置、検査方法、および、制御装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443768A (en) * 1977-09-13 1979-04-06 Dainippon Printing Co Ltd Device for measuring area ratio of net crossings
JPS5572805A (en) * 1978-11-28 1980-06-02 Fujitsu Ltd Pattern check system
JPS601505A (ja) * 1983-06-20 1985-01-07 Hitachi Ltd パタ−ン検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443768A (en) * 1977-09-13 1979-04-06 Dainippon Printing Co Ltd Device for measuring area ratio of net crossings
JPS5572805A (en) * 1978-11-28 1980-06-02 Fujitsu Ltd Pattern check system
JPS601505A (ja) * 1983-06-20 1985-01-07 Hitachi Ltd パタ−ン検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02234005A (ja) * 1989-03-08 1990-09-17 Matsushita Electric Ind Co Ltd 対象物の特徴部の位置の検出方法
WO2014184960A1 (ja) * 2013-05-17 2014-11-20 富士機械製造株式会社 検査装置、検査方法、および、制御装置
JPWO2014184960A1 (ja) * 2013-05-17 2017-02-23 富士機械製造株式会社 検査装置、検査方法、および、制御装置

Also Published As

Publication number Publication date
JPH0418768B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-27

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