JPS61234349A - 半導体マルチバイオセンサの製造方法 - Google Patents
半導体マルチバイオセンサの製造方法Info
- Publication number
- JPS61234349A JPS61234349A JP60075758A JP7575885A JPS61234349A JP S61234349 A JPS61234349 A JP S61234349A JP 60075758 A JP60075758 A JP 60075758A JP 7575885 A JP7575885 A JP 7575885A JP S61234349 A JPS61234349 A JP S61234349A
- Authority
- JP
- Japan
- Prior art keywords
- enzyme
- ion
- photoresist layer
- biosensor
- enzyme immobilized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 108090000790 Enzymes Proteins 0.000 claims abstract description 26
- 102000004190 Enzymes Human genes 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 19
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 17
- 239000012528 membrane Substances 0.000 claims description 23
- 239000003431 cross linking reagent Substances 0.000 claims description 3
- 239000012460 protein solution Substances 0.000 claims description 3
- 108091005804 Peptidases Proteins 0.000 claims 1
- 239000004365 Protease Substances 0.000 claims 1
- 102100037486 Reverse transcriptase/ribonuclease H Human genes 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 4
- 230000006698 induction Effects 0.000 abstract 4
- 229940088598 enzyme Drugs 0.000 description 18
- 239000007864 aqueous solution Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- SXRSQZLOMIGNAQ-UHFFFAOYSA-N Glutaraldehyde Chemical compound O=CCCCC=O SXRSQZLOMIGNAQ-UHFFFAOYSA-N 0.000 description 2
- 102000004142 Trypsin Human genes 0.000 description 2
- 108090000631 Trypsin Proteins 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 239000012588 trypsin Substances 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 108010015776 Glucose oxidase Proteins 0.000 description 1
- 239000004366 Glucose oxidase Substances 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241000120694 Thestor Species 0.000 description 1
- 101710162629 Trypsin inhibitor Proteins 0.000 description 1
- 229940122618 Trypsin inhibitor Drugs 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 229940116332 glucose oxidase Drugs 0.000 description 1
- 235000019420 glucose oxidase Nutrition 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002753 trypsin inhibitor Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
- C12Q1/001—Enzyme electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Zoology (AREA)
- Wood Science & Technology (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microbiology (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Biotechnology (AREA)
- Biophysics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Bioinformatics & Cheminformatics (AREA)
- General Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Genetics & Genomics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60075758A JPS61234349A (ja) | 1985-04-10 | 1985-04-10 | 半導体マルチバイオセンサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60075758A JPS61234349A (ja) | 1985-04-10 | 1985-04-10 | 半導体マルチバイオセンサの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61234349A true JPS61234349A (ja) | 1986-10-18 |
| JPH0519948B2 JPH0519948B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Family
ID=13585451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60075758A Granted JPS61234349A (ja) | 1985-04-10 | 1985-04-10 | 半導体マルチバイオセンサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61234349A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990005910A1 (en) * | 1988-11-14 | 1990-05-31 | I Stat Corp | Wholly microfabricated biosensors and process for the manufacture and use thereof |
| US5063081A (en) * | 1988-11-14 | 1991-11-05 | I-Stat Corporation | Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor |
| US5212050A (en) * | 1988-11-14 | 1993-05-18 | Mier Randall M | Method of forming a permselective layer |
| US6306594B1 (en) | 1988-11-14 | 2001-10-23 | I-Stat Corporation | Methods for microdispensing patterened layers |
-
1985
- 1985-04-10 JP JP60075758A patent/JPS61234349A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990005910A1 (en) * | 1988-11-14 | 1990-05-31 | I Stat Corp | Wholly microfabricated biosensors and process for the manufacture and use thereof |
| US5063081A (en) * | 1988-11-14 | 1991-11-05 | I-Stat Corporation | Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor |
| US5200051A (en) * | 1988-11-14 | 1993-04-06 | I-Stat Corporation | Wholly microfabricated biosensors and process for the manufacture and use thereof |
| US5212050A (en) * | 1988-11-14 | 1993-05-18 | Mier Randall M | Method of forming a permselective layer |
| US5837446A (en) * | 1988-11-14 | 1998-11-17 | I-Stat Corporation | Process for the manufacture of wholly microfabricated biosensors |
| US6306594B1 (en) | 1988-11-14 | 2001-10-23 | I-Stat Corporation | Methods for microdispensing patterened layers |
| WO1990005910A3 (en) * | 1988-11-14 | 2004-04-22 | I Stat Corp | Wholly microfabricated biosensors and process for the manufacture and use thereof |
| US7074610B2 (en) | 1988-11-14 | 2006-07-11 | I-Stat Corporation | System and method of microdispensing and arrays of biolayers provided by same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519948B2 (enrdf_load_stackoverflow) | 1993-03-18 |
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