JPS61234349A - Manufacture of semiconductor multi-biosensor - Google Patents

Manufacture of semiconductor multi-biosensor

Info

Publication number
JPS61234349A
JPS61234349A JP60075758A JP7575885A JPS61234349A JP S61234349 A JPS61234349 A JP S61234349A JP 60075758 A JP60075758 A JP 60075758A JP 7575885 A JP7575885 A JP 7575885A JP S61234349 A JPS61234349 A JP S61234349A
Authority
JP
Japan
Prior art keywords
enzyme immobilized
biosensor
photoresist layer
induction section
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60075758A
Other versions
JPH0519948B2 (en
Inventor
Yoshie Kawana
Jun Kimura
Toshihide Kuriyama
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP60075758A priority Critical patent/JPH0519948B2/ja
Publication of JPS61234349A publication Critical patent/JPS61234349A/en
Publication of JPH0519948B2 publication Critical patent/JPH0519948B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/001Enzyme electrodes

Abstract

PURPOSE:To form a biosensor having several kinds of enzyme immobilized films, by a method wherein an enzyme immobilized film and a photoresist layer are formed on a substrate provided with an ion sensor and a process of removing all but a portion required therefor. CONSTITUTION:An ion induction section 2 of an FE type ion sensor is provided on the top surface of a substrate 1 and an enzyme immobilized film 3 and a photoresist layer 4a are formed over the entire surface thereof. Then, the photoresist layer 4a is removed except for a specified surface of the ion induction section 2a by exposure and development and the enzyme immobilized film 3 is decomposed. Thereafter, a second enzyme immobilized film 5 and a photoresist layer 4b are formed on the top surface of the ion induction section and the same removing process is repeated to form a biosensor having different enzyme immobilized films 3 and 5 on the ion induction section 2. Thus, a massproducible fine multi-biosensor can be obtained by applying an IC production technology.
JP60075758A 1985-04-10 1985-04-10 Expired - Lifetime JPH0519948B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60075758A JPH0519948B2 (en) 1985-04-10 1985-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60075758A JPH0519948B2 (en) 1985-04-10 1985-04-10

Publications (2)

Publication Number Publication Date
JPS61234349A true JPS61234349A (en) 1986-10-18
JPH0519948B2 JPH0519948B2 (en) 1993-03-18

Family

ID=13585451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60075758A Expired - Lifetime JPH0519948B2 (en) 1985-04-10 1985-04-10

Country Status (1)

Country Link
JP (1) JPH0519948B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990005910A1 (en) * 1988-11-14 1990-05-31 I Stat Corp Wholly microfabricated biosensors and process for the manufacture and use thereof
US5063081A (en) * 1988-11-14 1991-11-05 I-Stat Corporation Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor
US5212050A (en) * 1988-11-14 1993-05-18 Mier Randall M Method of forming a permselective layer
US6306594B1 (en) 1988-11-14 2001-10-23 I-Stat Corporation Methods for microdispensing patterened layers

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990005910A1 (en) * 1988-11-14 1990-05-31 I Stat Corp Wholly microfabricated biosensors and process for the manufacture and use thereof
US5063081A (en) * 1988-11-14 1991-11-05 I-Stat Corporation Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor
US5200051A (en) * 1988-11-14 1993-04-06 I-Stat Corporation Wholly microfabricated biosensors and process for the manufacture and use thereof
US5212050A (en) * 1988-11-14 1993-05-18 Mier Randall M Method of forming a permselective layer
US5837446A (en) * 1988-11-14 1998-11-17 I-Stat Corporation Process for the manufacture of wholly microfabricated biosensors
US6306594B1 (en) 1988-11-14 2001-10-23 I-Stat Corporation Methods for microdispensing patterened layers
US7074610B2 (en) 1988-11-14 2006-07-11 I-Stat Corporation System and method of microdispensing and arrays of biolayers provided by same

Also Published As

Publication number Publication date
JPH0519948B2 (en) 1993-03-18

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