JPS6250656A - Biosensor and its production - Google Patents

Biosensor and its production

Info

Publication number
JPS6250656A
JPS6250656A JP60190772A JP19077285A JPS6250656A JP S6250656 A JPS6250656 A JP S6250656A JP 60190772 A JP60190772 A JP 60190772A JP 19077285 A JP19077285 A JP 19077285A JP S6250656 A JPS6250656 A JP S6250656A
Authority
JP
Japan
Prior art keywords
thin film
biosensor
enzyme
group
film pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP60190772A
Other languages
Japanese (ja)
Inventor
Kazufumi Ogawa
一文 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60190772A priority Critical patent/JPS6250656A/en
Priority to EP86306571A priority patent/EP0214805B1/en
Priority to US06/900,629 priority patent/US4881109A/en
Priority to DE8686306571T priority patent/DE3688489T2/en
Publication of JPS6250656A publication Critical patent/JPS6250656A/en
Priority to US07/353,326 priority patent/US4960722A/en
Priority to JP4311758A priority patent/JPH069699A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Peptides Or Proteins (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)

Abstract

PURPOSE:To obtain a biosensor having high sensitivity and high reliability by fixing either protein or enzyme by prescribed bonds onto a gate electrode of an FET via a thin hydrophilic photosensitive film pattern consisting of a prescribed main material, thereby securely and selectively fixing the protein or enzyme without losing the activity thereof to the electrode. CONSTITUTION:A water soluble photosensitive material (an aq. soln. of pullular and ammonium dichromate) is coated on the substrate 2 on which the FET is preliminarily formed to form the thin hydrophilic photosensitive film 3. The film is then exposed 8 by using a photomask 5 opened only in the part corresponding to the gate electrode 4 and is developed, by which the thin hydrophilic photosensitive film pattern 6 is formed. The pattern 6 is essentially made of a material contg. a hydroxyl group or carboxyl group. The substrate is then immersed in an aq. periodic acid soln. to oxidize the OH group on the surface to an aldehyde. The protein and enzyme having the specific activity are brought into addition reaction via the bonds of chemical formulas I-III and are fixed as a thin enzyme film 7. The substrate 1 is subjected to dicing and assemblying of electrodes, by which the biosensor is completed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、バイオセンサーおよびその製造方法に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a biosensor and a method for manufacturing the same.

さらに詳しくは、電界効果トランジイスタのゲート電極
上に任意のタンパク質や酵素を固定した生体物質に特異
的に感応するバイオセンサーに関するものであり、生体
物質の計測に利用するものである。
More specifically, the present invention relates to a biosensor that is specifically sensitive to biological substances, in which arbitrary proteins or enzymes are immobilized on the gate electrode of a field effect transistor, and is used for measuring biological substances.

従来の技術 これまで、バイオセンサーは、ガラス電極表面にタンパ
ク質や酵素を固定した方式のものや、電界効果トランジ
イスタ(FIT)のゲート電極上にタンパク質や酵素を
固定し、た方式のものが知られているが、従来の方法で
は、酵素やタンパク質の固定法に問題があシ、あまり高
信頼のものが得られていなかった。
Conventional technology Up until now, biosensors have been known to use methods such as those in which proteins and enzymes are immobilized on the surface of a glass electrode, and those in which proteins and enzymes are immobilized on the gate electrode of a field-effect transistor (FIT). However, conventional methods have problems with the method of immobilizing enzymes and proteins, making it difficult to obtain highly reliable results.

すなわち、従来のタンパク質や酵素の固定法は、FIT
の電極やガラス電極に直接酵素やタンパク質を塗布した
り、樹脂にタンパク質や酵素を混入して塗布したり、樹
脂粒子に固定したものを塗布する方法が用いられていた
In other words, the conventional method for immobilizing proteins and enzymes is FIT
Methods used include applying enzymes and proteins directly to the electrodes and glass electrodes, mixing proteins and enzymes with resin and applying them, or applying them fixed to resin particles.

発明が解決しようとする問題点 しかしながら、直接塗布する方法では、測定中にタンパ
ク質や酵素が脱離したシして耐久性に問題があったし、
樹脂中にタンパク質や酵素を混入して塗布したシ、樹脂
粒子に固定したものを塗布する方法では、活性が低かっ
た等で問題があった。
Problems to be Solved by the Invention However, with the direct application method, proteins and enzymes were desorbed during measurement, resulting in durability problems.
Methods in which proteins or enzymes are mixed into resin and applied, or methods in which proteins or enzymes are applied fixed to resin particles have had problems such as low activity.

また、従来の塗布方法では、FETのゲート電極上にの
み選択的にタンパク質や酵素を固定するのが非常に難し
かった。
Furthermore, with conventional coating methods, it is very difficult to selectively immobilize proteins and enzymes only on the gate electrode of the FET.

問題点を解決するための手段 以上述べてきた従来法の欠点に鑑み、本発明は、FKT
ゲート電極上に反応性有機薄膜を介してタンパクや酵素
を反応固定する方法を提供するものである。すなわち分
子中に水酸基(OH)やカルボキシル基(COOH)基
を有する樹脂、例えば、プルラン、ペクチン等の多糖類
やゼラチン、カゼイン等のタンパク質やポリビニルアル
コール、ポリビニルピロリドン等の水溶性高分子を用い
、重クロム酸アンモニウム等の重クロム酸塩、又はシア
レジン等のジアゾ化合物、又は4.4′−ジアジドスチ
ルベン−2,2’−シスルフォニツクアシドナトリウム
塩等のジアジド化合物を添加して水溶性感光物質を調整
する。
Means for Solving the Problems In view of the drawbacks of the conventional methods described above, the present invention provides FKT
The present invention provides a method for reactively immobilizing proteins and enzymes on a gate electrode via a reactive organic thin film. That is, using resins having hydroxyl (OH) or carboxyl (COOH) groups in their molecules, such as polysaccharides such as pullulan and pectin, proteins such as gelatin and casein, and water-soluble polymers such as polyvinyl alcohol and polyvinylpyrrolidone, Water-soluble photosensitization is achieved by adding a dichromate such as ammonium dichromate, a diazo compound such as shea resin, or a diazide compound such as 4,4'-diazidostilbene-2,2'-cisulfonic acid sodium salt. Adjust substances.

次に、FETの形成されたウェハー上へスピナー等を用
い塗布し、さらにホトマスクを用いてゲート電極上にの
み水溶性感光物質の薄膜がパターン状に残るように露光
、現像して親水性の樹脂(OH基、C0OH基、Nl2
基等を含む)パターン(以下、親水性感光薄膜パターン
という)をゲート電極上にのみ形成する。
Next, the hydrophilic resin is coated onto the wafer on which the FET is formed using a spinner, and then exposed and developed using a photomask so that a thin film of the water-soluble photosensitive material remains in a pattern only on the gate electrode. (OH group, C0OH group, Nl2
(hereinafter referred to as a hydrophilic photosensitive thin film pattern) is formed only on the gate electrode.

さらに、前記親水性感光薄膜パターンの表面をアルデヒ
ド法やシアンブロマイド法を用いて化学処理し、タンパ
ク質や酵素を付加反応させて、ゲート電極上にのみ選択
的に固定させる方法を提供するものである。
Furthermore, the present invention provides a method of chemically treating the surface of the hydrophilic photosensitive thin film pattern using an aldehyde method or a cyanobromide method, causing an addition reaction of proteins and enzymes, and selectively immobilizing them only on the gate electrode. .

作用 本発明の方法を用いることにより、タンパク質や酵素は
、親水性の樹脂パターン(水溶性感光物質の薄膜を露光
、現像して残ったもの)中に存在する親水性基(OH,
0OOH基)をタンパク質や酵素のNl2  基と付加
反応する H −C=Qや−o−1=N基に化学処理して変換した後タ
ンパク質や酵素を化学反応で付加させるため、基板上の
任意の場所に選択的に付加させることが可能となる。ま
だ、タンパク質や酵素は、ゲート電極上の極薄い水溶性
薄膜を介してゲート電極上に固定されるため、活性が高
くしかも強固に固定される。
Effect By using the method of the present invention, proteins and enzymes can be converted into hydrophilic groups (OH,
0OOH group) to H -C=Q or -o-1=N group that undergoes an addition reaction with the Nl2 group of proteins and enzymes. It becomes possible to selectively add the information to the location of . However, since proteins and enzymes are immobilized on the gate electrode via an extremely thin water-soluble film on the gate electrode, they have high activity and are firmly immobilized.

実施例 以下に本発明の一実施例を図面とともに説明する。第1
図に示すように、あらかじめFET1の形成された基板
2上に、水溶性感光物質(例えば分子量20万のプルラ
ン1oy−と重クロム酸アンモニウム11Pを100c
cの水に溶解したもの)をスピナーでC,Sμm程度の
厚みになるように塗布し水溶性感光薄膜3を形成する。
EXAMPLE An example of the present invention will be described below with reference to the drawings. 1st
As shown in the figure, a water-soluble photosensitive material (for example, pullulan 1oy- with a molecular weight of 200,000 and ammonium dichromate 11P) is placed on a substrate 2 on which an FET 1 is previously formed.
A water-soluble photosensitive thin film 3 is formed by applying (c) dissolved in water using a spinner to a thickness of approximately C.S μm.

次に任意のパ゛ターンを有するホトマスク例えばゲート
電極4上に対応した部分のみ開口されたホトマスク5を
用い露光8を行ない(第2図)、現像すると親水性感光
薄膜パターン6(水溶性感光薄膜3が露光現像されて残
った薄膜パターン)が形成される(第3図)。
Next, exposure 8 is carried out using a photomask 5 having an arbitrary pattern, for example, a photomask 5 which is opened only in a portion corresponding to the gate electrode 4 (FIG. 2). When developed, a hydrophilic photosensitive thin film pattern 6 (water-soluble photosensitive thin film A thin film pattern (remaining after exposure and development of 3) is formed (FIG. 3).

次に、過沃素酸水溶液に浸漬し、次式(1)に従って表
面のOH基をアルデヒドに酸化する(アルデヒド法)。
Next, it is immersed in an aqueous periodic acid solution, and the OH groups on the surface are oxidized to aldehyde according to the following formula (1) (aldehyde method).

(プルラン分子の一部) H20H 区 さらに、特定の活性を持つタンパク質や酵素を式(2)
に従って付加反応させて固定させる。
(Part of the pullulan molecule)
Fix by addition reaction according to the instructions.

R,−C:N−R2 (タンパク質又は酵素の分子) 従って、タンパク質や酵素は、選択的にゲート電極4上
の親水性感光薄膜パターン6と化学反応によりタンパク
質又は酵素薄膜7として固定される(第4図)。
R, -C:N-R2 (Protein or enzyme molecule) Therefore, the protein or enzyme is selectively fixed as a protein or enzyme thin film 7 through a chemical reaction with the hydrophilic photosensitive thin film pattern 6 on the gate electrode 4 ( Figure 4).

最後に、基板をダイシングして電極の接続等の組立を行
うとバイオセンサが完成する。
Finally, the biosensor is completed by dicing the substrate and performing assembly such as electrode connections.

なお、以上の実施例では、アルデヒド法を示したが、次
式(3)のようなシアノブロマイド法を用いたタンパク
質や酵素の固定も同じように行なえる。
In addition, although the aldehyde method was shown in the above example, proteins and enzymes can be similarly immobilized using the cyanobromide method as shown in the following formula (3).

また、プルランの代りに、ペクチン等の多糖類やゼラチ
ン、カゼイン等のタンパク質やポリビニルアルコール、
ポリビニルピロリドン等の水溶性高分子で、光架橋剤を
添加することにより感光性薄膜を形成することができ、
しかも分子内にOH基を有するものであれば用いること
が可能である。
In addition, instead of pullulan, polysaccharides such as pectin, proteins such as gelatin and casein, polyvinyl alcohol,
A water-soluble polymer such as polyvinylpyrrolidone that can form a photosensitive thin film by adding a photocrosslinking agent.
Furthermore, any compound having an OH group in its molecule can be used.

さらにまた、光架橋剤としては、重クロム酸アンモニウ
ム塩の他に、他の重クロム酸塩、又はジアゾレジン等の
ジアゾ化合物、又は、4,4′−ジアジドスチルベン−
2,2’−ジスルホニックアシッドナトリウム塩等のジ
アジド化合物を用いることが可能である。
Furthermore, as a photocrosslinking agent, in addition to ammonium dichromate, other dichromates, diazo compounds such as diazoresin, or 4,4'-diazidostilbene-
It is possible to use diazide compounds such as 2,2'-disulfonic acid sodium salt.

なお、プルランの代りに、プルランを一部アセチル化し
たプルランアセテート(置換度1.5〜2.5)を用い
た場合には、溶媒としてアセトンを用いれば、同様の固
定膜が得られることが確認された。
In addition, when pullulan acetate (substitution degree 1.5 to 2.5), which is partially acetylated pullulan, is used instead of pullulan, a similar fixed film can be obtained by using acetone as the solvent. confirmed.

発明の効釆 以上のように本発明によれば、タンパク質や酵素を選択
的にしかも活性を失うことなく強固に固定できる。また
、酵素やタンパク質は非常に薄い親水性薄膜を介して固
定されるため、高感度でしかも信頼性の高いバイオセン
サを提供できる。
Effects of the Invention As described above, according to the present invention, proteins and enzymes can be selectively and firmly immobilized without loss of activity. Furthermore, since enzymes and proteins are immobilized via a very thin hydrophilic film, a highly sensitive and highly reliable biosensor can be provided.

さらにまた、製造工程も簡単なため、コストを大幅に低
減できる効果もある。
Furthermore, since the manufacturing process is simple, there is also the effect of significantly reducing costs.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第4図は本発明の一実施例におけるバイオセン
サとその製造工程を説明するための工程断面図である。 1・・・・・・電界効果トランジスタ、3・・・・・・
親水性感光薄膜、4・・・・・・ゲート電極、6・・・
・・・親水性感光薄膜パターン。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
1 to 4 are process sectional views for explaining a biosensor and its manufacturing process in one embodiment of the present invention. 1... Field effect transistor, 3...
Hydrophilic photosensitive thin film, 4... Gate electrode, 6...
...Hydrophilic photosensitive thin film pattern. Name of agent: Patent attorney Toshio Nakao and 1 other person 1st
figure

Claims (7)

【特許請求の範囲】[Claims] (1)電界効果トランジスタのゲート電極上に、親水性
感光薄膜パターンを介して、タンパク質と酵素のうちの
1つを固定してなるバイオセンサー。
(1) A biosensor in which one of a protein and an enzyme is immobilized on the gate electrode of a field effect transistor via a hydrophilic photosensitive thin film pattern.
(2)親水性感光薄膜パターンの主材が水酸基またはカ
ルボキシル基を含む物質よりなる特許請求の範囲第1項
記載のバイオセンサー。
(2) The biosensor according to claim 1, wherein the main material of the hydrophilic photosensitive thin film pattern is a substance containing a hydroxyl group or a carboxyl group.
(3)親水性感光薄膜パターンとタンパク質または酵素
との化学結合が、▲数式、化学式、表等があります▼、 ▲数式、化学式、表等があります▼、▲数式、化学式、
表等があります▼結合を介して行な われている特許請求の範囲第2項記載のバイオセンサー
(3) The chemical bond between a hydrophilic photosensitive thin film pattern and a protein or enzyme is ▲There are mathematical formulas, chemical formulas, tables, etc.▼, ▲There are mathematical formulas, chemical formulas, tables, etc.▼, ▲Mathematical formulas, chemical formulas,
There are tables, etc.▼The biosensor according to claim 2, which is achieved through bonding.
(4)親水性感光薄膜パターンの主材が、プルラン、ペ
クチン等の多糖類やゼラチン、カゼイン等のタンパク質
やポリビニルアルコール、ポリビニルピロリドン等の水
溶性合成高分子である特許請求の範囲第1項記載のバイ
オセンサー。
(4) The main material of the hydrophilic photosensitive thin film pattern is polysaccharides such as pullulan and pectin, proteins such as gelatin and casein, and water-soluble synthetic polymers such as polyvinyl alcohol and polyvinylpyrrolidone. biosensor.
(5)親水性感光薄膜パターンの光架橋材が、重クロム
酸アンモニウム等の重クロム塩又はジアゾレジン等のジ
アゾ化合物又は、4,4′−ジアジドスチルベン−2,
2′−ジスルホニックアシッドナトリウム塩等のジアジ
ド化合物である特許請求の範囲第1項記載のバイオセン
サー。
(5) The photocrosslinking material of the hydrophilic photosensitive thin film pattern is a dichromium salt such as ammonium dichromate, a diazo compound such as diazoresin, or 4,4'-diazidostilbene-2,
The biosensor according to claim 1, which is a diazide compound such as 2'-disulfonic acid sodium salt.
(6)電界効果トランジィスタのゲート電極上に水溶性
感光物質をホトリソ法を用いて薄膜パターン状に形成す
る工程と、親水性感光薄膜の感応基を化学処理する工程
と、化学処理された基にタンパク質または酵素を反応固
定する工程とを含むバイオセンサーの製造方法。
(6) A process of forming a water-soluble photosensitive material into a thin film pattern on the gate electrode of a field effect transistor using photolithography, a process of chemically treating the sensitive groups of the hydrophilic photosensitive thin film, and a process of chemically treating the sensitive groups of the hydrophilic photosensitive thin film; A method for producing a biosensor, comprising a step of reaction-immobilizing a protein or an enzyme.
(7)感応基としてOH基を用い化学処理して▲数式、
化学式、表等があります▼基または−O−C≡N基に変
換する工程を含む特許請求の範囲第6項記載のバイオセ
ンサーの製造方法。
(7) By chemical treatment using OH group as a sensitive group, ▲mathematical formula,
There are chemical formulas, tables, etc. The method for producing a biosensor according to claim 6, which includes a step of converting into a ▼ group or an -O-C≡N group.
JP60190772A 1985-08-29 1985-08-29 Biosensor and its production Withdrawn JPS6250656A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP60190772A JPS6250656A (en) 1985-08-29 1985-08-29 Biosensor and its production
EP86306571A EP0214805B1 (en) 1985-08-29 1986-08-26 Sensor using a field effect transistor and method of fabricating the same
US06/900,629 US4881109A (en) 1985-08-29 1986-08-26 Sensor using a field effect transistor and method of fabricating the same
DE8686306571T DE3688489T2 (en) 1985-08-29 1986-08-26 SENSORS USING A FIELD EFFECT TRANSISTOR AND THEIR PRODUCTION METHOD.
US07/353,326 US4960722A (en) 1985-08-29 1989-05-15 Sensor using a field effect transistor and method of fabricating the same
JP4311758A JPH069699A (en) 1985-08-29 1992-11-20 Immobilization of protein

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60190772A JPS6250656A (en) 1985-08-29 1985-08-29 Biosensor and its production
JP4311758A JPH069699A (en) 1985-08-29 1992-11-20 Immobilization of protein

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4311758A Division JPH069699A (en) 1985-08-29 1992-11-20 Immobilization of protein

Publications (1)

Publication Number Publication Date
JPS6250656A true JPS6250656A (en) 1987-03-05

Family

ID=26506303

Family Applications (2)

Application Number Title Priority Date Filing Date
JP60190772A Withdrawn JPS6250656A (en) 1985-08-29 1985-08-29 Biosensor and its production
JP4311758A Pending JPH069699A (en) 1985-08-29 1992-11-20 Immobilization of protein

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069699A (en) * 1985-08-29 1994-01-18 Matsushita Electric Ind Co Ltd Immobilization of protein
JPWO2005111618A1 (en) * 2004-05-18 2008-03-27 独立行政法人理化学研究所 Substance immobilizing agent, substance immobilizing method using the same, and substance immobilizing substrate using the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3788513B2 (en) 2003-09-11 2006-06-21 セイコーエプソン株式会社 Method for immobilizing molecules on solid phase substrate and method for producing biosensor using the same
JP2006316010A (en) * 2005-05-13 2006-11-24 Institute Of Physical & Chemical Research Substance-fixing agent, method for fixing substance and substrate for fixing substance

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029657A (en) * 1983-07-28 1985-02-15 Mitsubishi Electric Corp Glucose sensor
JPS6079258A (en) * 1983-10-07 1985-05-07 Mitsubishi Electric Corp Manufacture of enzyme sensor for measuring lipid
JPS60247151A (en) * 1984-05-23 1985-12-06 Fujitsu Ltd Fet biosensor
JPS61153559A (en) * 1984-12-27 1986-07-12 Mitsubishi Electric Corp Semiconductor enzyme sensor
JPS61165656A (en) * 1985-01-18 1986-07-26 Mitsubishi Electric Corp Formation of immobilized enzyme membrane

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250656A (en) * 1985-08-29 1987-03-05 Matsushita Electric Ind Co Ltd Biosensor and its production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029657A (en) * 1983-07-28 1985-02-15 Mitsubishi Electric Corp Glucose sensor
JPS6079258A (en) * 1983-10-07 1985-05-07 Mitsubishi Electric Corp Manufacture of enzyme sensor for measuring lipid
JPS60247151A (en) * 1984-05-23 1985-12-06 Fujitsu Ltd Fet biosensor
JPS61153559A (en) * 1984-12-27 1986-07-12 Mitsubishi Electric Corp Semiconductor enzyme sensor
JPS61165656A (en) * 1985-01-18 1986-07-26 Mitsubishi Electric Corp Formation of immobilized enzyme membrane

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069699A (en) * 1985-08-29 1994-01-18 Matsushita Electric Ind Co Ltd Immobilization of protein
JPWO2005111618A1 (en) * 2004-05-18 2008-03-27 独立行政法人理化学研究所 Substance immobilizing agent, substance immobilizing method using the same, and substance immobilizing substrate using the same
JP4630865B2 (en) * 2004-05-18 2011-02-09 独立行政法人理化学研究所 Substance immobilizing agent, substance immobilizing method using the same, and substance immobilizing substrate using the same

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