JPS61234348A - 半導体バイオセンサの製造方法 - Google Patents
半導体バイオセンサの製造方法Info
- Publication number
- JPS61234348A JPS61234348A JP60075757A JP7575785A JPS61234348A JP S61234348 A JPS61234348 A JP S61234348A JP 60075757 A JP60075757 A JP 60075757A JP 7575785 A JP7575785 A JP 7575785A JP S61234348 A JPS61234348 A JP S61234348A
- Authority
- JP
- Japan
- Prior art keywords
- enzyme
- ion
- photoresist layer
- film
- induction section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000004065 semiconductor Substances 0.000 title claims abstract description 10
- 108090000790 Enzymes Proteins 0.000 claims abstract description 24
- 102000004190 Enzymes Human genes 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 15
- 108091005804 Peptidases Proteins 0.000 claims description 2
- 239000004365 Protease Substances 0.000 claims description 2
- 102100037486 Reverse transcriptase/ribonuclease H Human genes 0.000 claims description 2
- 230000003100 immobilizing effect Effects 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 abstract description 9
- 239000010980 sapphire Substances 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 5
- 239000010931 gold Substances 0.000 abstract description 5
- 229910052737 gold Inorganic materials 0.000 abstract description 5
- 239000007864 aqueous solution Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 102000004142 Trypsin Human genes 0.000 abstract description 2
- 108090000631 Trypsin Proteins 0.000 abstract description 2
- 239000012588 trypsin Substances 0.000 abstract description 2
- 230000006698 induction Effects 0.000 abstract 4
- 239000012528 membrane Substances 0.000 description 18
- 230000000694 effects Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 108010093096 Immobilized Enzymes Proteins 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- QKNYBSVHEMOAJP-UHFFFAOYSA-N 2-amino-2-(hydroxymethyl)propane-1,3-diol;hydron;chloride Chemical compound Cl.OCC(N)(CO)CO QKNYBSVHEMOAJP-UHFFFAOYSA-N 0.000 description 1
- 108091003079 Bovine Serum Albumin Proteins 0.000 description 1
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- SXRSQZLOMIGNAQ-UHFFFAOYSA-N Glutaraldehyde Chemical compound O=CCCCC=O SXRSQZLOMIGNAQ-UHFFFAOYSA-N 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 101710162629 Trypsin inhibitor Proteins 0.000 description 1
- 229940122618 Trypsin inhibitor Drugs 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 108010046334 Urease Proteins 0.000 description 1
- 229940098773 bovine serum albumin Drugs 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000012460 protein solution Substances 0.000 description 1
- 230000017854 proteolysis Effects 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 239000002753 trypsin inhibitor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
- C12Q1/001—Enzyme electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Zoology (AREA)
- Wood Science & Technology (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microbiology (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Biotechnology (AREA)
- Biophysics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Bioinformatics & Cheminformatics (AREA)
- General Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Genetics & Genomics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60075757A JPS61234348A (ja) | 1985-04-10 | 1985-04-10 | 半導体バイオセンサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60075757A JPS61234348A (ja) | 1985-04-10 | 1985-04-10 | 半導体バイオセンサの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61234348A true JPS61234348A (ja) | 1986-10-18 |
| JPH0519947B2 JPH0519947B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Family
ID=13585425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60075757A Granted JPS61234348A (ja) | 1985-04-10 | 1985-04-10 | 半導体バイオセンサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61234348A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5063081A (en) * | 1988-11-14 | 1991-11-05 | I-Stat Corporation | Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor |
-
1985
- 1985-04-10 JP JP60075757A patent/JPS61234348A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5063081A (en) * | 1988-11-14 | 1991-11-05 | I-Stat Corporation | Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519947B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4894339A (en) | Immobilized enzyme membrane for a semiconductor sensor | |
| KR0175917B1 (ko) | 전체가 마이크로 제작된 바이오센서 및 그 생산 방법과 동 센서의 용도 | |
| WO2003093822A3 (en) | Device for closure of a vascular defect | |
| Hanazato et al. | Integrated multi-biosensors based on an ion-sensitive field-effect transistor using photolithographic techniques | |
| KR870008189A (ko) | 효소센서 및 그 제조방법 | |
| JPS6188135A (ja) | 半導体バイオセンサの製造方法 | |
| JPS61234348A (ja) | 半導体バイオセンサの製造方法 | |
| JP2770783B2 (ja) | バイオセンサ素子の製造方法 | |
| ATE36557T1 (de) | Verfahren zur bestimmung der wirksamkeit von substraten oder enzymen. | |
| EP0545547B1 (en) | Immobilized enzyme film, protein immobilized film and process for forming the same | |
| JPS61234349A (ja) | 半導体マルチバイオセンサの製造方法 | |
| JPH0349388B2 (enrdf_load_stackoverflow) | ||
| JPS61153559A (ja) | 半導体酵素センサ | |
| JP2617745B2 (ja) | 細微狭小領域への生体触媒の固定化方法 | |
| JPH0519654B2 (enrdf_load_stackoverflow) | ||
| JP2687942B2 (ja) | 固定化酵素膜の形成方法 | |
| JPS61283862A (ja) | 酵素固定化膜の製造方法 | |
| JPS645489A (en) | Functional organic thin film and production thereof | |
| JPS63279153A (ja) | バイオセンサチツプ | |
| JPS61245051A (ja) | 半導体マルチバイオセンサの製造方法 | |
| JP3102378B2 (ja) | バイオセンサの製造方法 | |
| JPS63241346A (ja) | プレ−ナ型バイオセンサの製造方法 | |
| JPS6250656A (ja) | バイオセンサ−およびその製造方法 | |
| JPH0481740B2 (enrdf_load_stackoverflow) | ||
| JPS62225941A (ja) | 半導体バイオセンサ酵素固定化膜の形成方法 |