JPS61225851A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法Info
- Publication number
- JPS61225851A JPS61225851A JP60066799A JP6679985A JPS61225851A JP S61225851 A JPS61225851 A JP S61225851A JP 60066799 A JP60066799 A JP 60066799A JP 6679985 A JP6679985 A JP 6679985A JP S61225851 A JPS61225851 A JP S61225851A
- Authority
- JP
- Japan
- Prior art keywords
- conductor layer
- insulating film
- groove
- capacitor insulating
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000003990 capacitor Substances 0.000 claims abstract description 85
- 239000004020 conductor Substances 0.000 claims abstract description 56
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000009792 diffusion process Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052698 phosphorus Inorganic materials 0.000 abstract description 5
- 239000011574 phosphorus Substances 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 14
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 241000282693 Cercopithecidae Species 0.000 description 1
- 101000617728 Homo sapiens Pregnancy-specific beta-1-glycoprotein 9 Proteins 0.000 description 1
- 102100021983 Pregnancy-specific beta-1-glycoprotein 9 Human genes 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60066799A JPS61225851A (ja) | 1985-03-30 | 1985-03-30 | 半導体装置及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60066799A JPS61225851A (ja) | 1985-03-30 | 1985-03-30 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61225851A true JPS61225851A (ja) | 1986-10-07 |
| JPH023303B2 JPH023303B2 (enrdf_load_stackoverflow) | 1990-01-23 |
Family
ID=13326274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60066799A Granted JPS61225851A (ja) | 1985-03-30 | 1985-03-30 | 半導体装置及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61225851A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63299371A (ja) * | 1987-05-29 | 1988-12-06 | Matsushita Electric Ind Co Ltd | 溝堀り型キャパシタの製造方法 |
| JPH01179443A (ja) * | 1988-01-06 | 1989-07-17 | Fujitsu Ltd | 半導体装置 |
| US5354710A (en) * | 1988-01-14 | 1994-10-11 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor devices using an adsorption enhancement layer |
| US5753530A (en) * | 1992-04-21 | 1998-05-19 | Seiko Instruments, Inc. | Impurity doping method with diffusion source of boron-silicide film |
-
1985
- 1985-03-30 JP JP60066799A patent/JPS61225851A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63299371A (ja) * | 1987-05-29 | 1988-12-06 | Matsushita Electric Ind Co Ltd | 溝堀り型キャパシタの製造方法 |
| JPH01179443A (ja) * | 1988-01-06 | 1989-07-17 | Fujitsu Ltd | 半導体装置 |
| US5354710A (en) * | 1988-01-14 | 1994-10-11 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor devices using an adsorption enhancement layer |
| US5753530A (en) * | 1992-04-21 | 1998-05-19 | Seiko Instruments, Inc. | Impurity doping method with diffusion source of boron-silicide film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH023303B2 (enrdf_load_stackoverflow) | 1990-01-23 |
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